On-chip parameter measurement
First Claim
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1. An integrated circuit comprising:
- metrology control circuitry comprising a reference sensor;
one or more local supply voltage nodes;
a plurality of functional circuit blocks each including functional circuitry, wherein each of the plurality of functional circuit blocks is coupled to receive a corresponding local supply voltage from at least one of the one or more local supply voltage nodes; and
a plurality of sensors coupled in series to the metrology control circuitry, wherein;
the plurality of functional circuit blocks includes at least one of the plurality of sensors;
each of the plurality of sensors is coupled to the same local supply voltage node of the functional circuit block in which it is included to receive the local supply voltage that is provided to the functional circuitry implemented in its corresponding one of the functional circuit blocks;
each of the plurality of sensors is configured to measure and provide indications of a system parameter to the metrology control circuitry; and
each of the sensors is calibrated by the metrology control circuitry using the reference sensor to compensate for process, voltage, and temperature dependencies.
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Abstract
An apparatus and method for performing on-chip parameter measurement is disclosed. In one embodiment, an IC includes a number of functional circuit blocks each having one or more sensors for measuring parameters such as voltage and temperature. Each of the functional blocks includes circuitry coupled to receive power from a local supply voltage node. Similarly, the circuitry in each of the sensors is also coupled to receive power from the corresponding local supply voltage node. Each of the sensors may be calibrated to compensate for process, voltage, and temperature variations. Various methods based on characterization of the sensors may be used to perform the calibrations.
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Citations
40 Claims
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1. An integrated circuit comprising:
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metrology control circuitry comprising a reference sensor; one or more local supply voltage nodes; a plurality of functional circuit blocks each including functional circuitry, wherein each of the plurality of functional circuit blocks is coupled to receive a corresponding local supply voltage from at least one of the one or more local supply voltage nodes; and a plurality of sensors coupled in series to the metrology control circuitry, wherein; the plurality of functional circuit blocks includes at least one of the plurality of sensors; each of the plurality of sensors is coupled to the same local supply voltage node of the functional circuit block in which it is included to receive the local supply voltage that is provided to the functional circuitry implemented in its corresponding one of the functional circuit blocks; each of the plurality of sensors is configured to measure and provide indications of a system parameter to the metrology control circuitry; and each of the sensors is calibrated by the metrology control circuitry using the reference sensor to compensate for process, voltage, and temperature dependencies. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method comprising:
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calibrating a plurality of sensors implemented in an integrated circuit, the plurality of sensors being coupled in series to a metrology control circuit having a reference sensor, wherein the integrated circuit includes a plurality of functional circuit blocks, and wherein one or more of the plurality of sensors is implemented in each of the plurality of circuit blocks, and wherein each of the plurality of sensors is coupled to a same local supply voltage node of the functional circuit block in which it is included to receive a local supply voltage that is also received by functional circuitry in its corresponding one of the functional circuit blocks, and wherein calibrating each of the plurality of sensors comprises the metrology control circuit using the reference sensor to compensate for process, voltage, and temperature dependencies; and providing, based on measurements performed by each of the plurality of sensors, indications of one or more system parameters to the metrology control circuit. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. An apparatus comprising:
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metrology control circuitry comprising a reference sensor; one or more functional circuit blocks each including functional circuitry coupled to receive a respective local supply voltage; and a plurality of sensors coupled in series to the metrology control circuitry, wherein; each of the one or more functional circuit blocks includes one or more of the plurality of sensors; each of the sensors includes one or more ring oscillators each coupled to the same respective local supply voltage node of the functional circuit block in which it is included to receive the local supply voltage that is provided to the functional circuitry implemented in its corresponding functional circuit block; each of the plurality of sensors is configured to determine a local voltage and a local temperature based on a frequency of oscillation of its corresponding ring oscillator and provide the local voltage and the local temperature to the metrology control circuitry; and each ring oscillator of each of the plurality of sensors is calibrated by the metrology control circuitry using the reference sensor to compensate for process, voltage and temperature dependencies. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification