Semiconductor device with field electrode structure
First Claim
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1. A semiconductor device comprising:
- a semiconductor body;
a gate structure extending into the semiconductor body and surrounding a mesa section of the semiconductor body on all sides, the mesa section comprising a rectifying structure and a first drift zone section;
a field electrode structure surrounded on all sides by the mesa section and comprising a field electrode and a field dielectric sandwiched between the field electrode and the semiconductor body, wherein an extension of the field electrode in a plane approximately parallel to a first surface of the semiconductor body is less than approximately 500 nm,wherein the mesa section is sandwiched between the field electrode structure and the gate structure.
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Abstract
According to an embodiment a semiconductor device includes a semiconductor body with a mesa section that may include a rectifying structure and a first drift zone section. The mesa section surrounds a field electrode structure that includes a field electrode and a field dielectric sandwiched between the field electrode and the semiconductor body. A maximum horizontal extension of the field electrode in a measure plane parallel to a first surface of the semiconductor body is at most 500 nm.
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Citations
12 Claims
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1. A semiconductor device comprising:
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a semiconductor body; a gate structure extending into the semiconductor body and surrounding a mesa section of the semiconductor body on all sides, the mesa section comprising a rectifying structure and a first drift zone section; a field electrode structure surrounded on all sides by the mesa section and comprising a field electrode and a field dielectric sandwiched between the field electrode and the semiconductor body, wherein an extension of the field electrode in a plane approximately parallel to a first surface of the semiconductor body is less than approximately 500 nm, wherein the mesa section is sandwiched between the field electrode structure and the gate structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electronic assembly, comprising:
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a semiconductor device that comprises a semiconductor body; a gate structure extending into the semiconductor body and surrounding a mesa section of the semiconductor body on all sides, the mesa section a rectifying structure and a first drift zone section; a field electrode structure surrounded by the mesa section on all sides and comprising a field electrode and a field dielectric sandwiched between the field electrode and the semiconductor body, wherein an extension of the field electrode in a plane approximately parallel to a first surface of the semiconductor body is less than approximately 500 nm, wherein the mesa section is sandwiched between the field electrode structure and the gate structure. - View Dependent Claims (11, 12)
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Specification