Method for transferring semiconductor structure

• US 9,722,134 B1
• Filed: 08/16/2016
• Issued: 08/01/2017
• Est. Priority Date: 08/16/2016
• Status: Active Grant

• Current Assignee: Mikro Mesa Technology Co., Ltd.
• Original Assignee: Mikro Mesa Technology Co., Ltd.
• Inventors: Chen, Li-Yi, Lee, Hsin-Wei
• Primary Examiner(s): Maruf, Sheikh
• Application Number:
  US15/238,706
• Time in Patent Office: 350 Days
• Field of Search: 438 26, 438 27, 438 46, 438 34, 438455, 438464, 257 40, 257100, 257E21499
• CPC Class Codes: H01L 2224/95136 involving guiding structures, e.g. shape matching, spacers or supporting members
• CPC Class Codes: H01L 2933/0033 relating to semiconductor body packages
• CPC Class Codes: H01L 2933/0066 relating to arrangements for conducting electric current to or from the semiconductor body
• CPC Class Codes: H01L 33/0008 having p-n or hi-lo junctions
• CPC Class Codes: H01L 33/005 Processes
• CPC Class Codes: H01L 33/0093 Wafer bonding; Removal of the growth substrate
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
• CPC Class Codes: H01L 33/62 Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls

Abstract

A method for transferring a semiconductor structure is provided. The method includes: coating an adhesive layer onto a carrier substrate; disposing the semiconductor structure onto the adhesive layer, such that the adhesive layer temporarily adheres the semiconductor structure, in which the adhesive layer includes an adhesive component and a surfactant component therein after the disposing; irradiating the electromagnetic wave to the adhesive layer through the carrier substrate to reduce adhesion pressure of the adhesive layer to the semiconductor structure while remaining the semiconductor structure within a predictable position, in which the semiconductor structure has a rejection band or is completely opaque, the carrier substrate has a pass band, and the pass band of the carrier substrate and the rejection band of the semiconductor structure overlaps; and transferring the semiconductor structure from the adhesive layer to a receiving substrate structure after the adhesion pressure of the adhesive layer is reduced.

Claims

1. A method for transferring at least one semiconductor structure, the method comprising:

coating an adhesive layer onto a carrier substrate;

disposing the semiconductor structure onto the adhesive layer, such that the adhesive layer temporarily adheres the semiconductor structure thereto, wherein the adhesive layer comprises at least one adhesive component and at least one surfactant component at least after the disposing;

irradiating at least one electromagnetic wave to the adhesive layer at least through the carrier substrate to reduce adhesion pressure of the adhesive layer to the semiconductor structure while remaining the semiconductor structure within a predictable position on the adhesive layer, wherein the semiconductor structure has an optical rejection band in between ultraviolet to infrared or is completely opaque, the carrier substrate has an pass band in between ultraviolet to infrared, and the pass band of the carrier substrate and the rejection band of the semiconductor structure at least partially overlap;

actuating a transfer head to pick up the semiconductor structure from the adhesive layer after the adhesion pressure of the adhesive layer is reduced; and

releasing the semiconductor structure from the transfer head onto a receiving substrate structure.

2. The method of claim 1, further comprising:

mixing the surfactant component with the adhesive component before the coating.

3. The method of claim 1, further comprising:

disposing the surfactant component onto a bottom surface of the semiconductor structure before the semiconductor structure is disposed onto the adhesive layer, wherein the bottom surface of the semiconductor structure is in contact with the adhesive layer after the semiconductor structure is disposed onto the adhesive layer.

4. The method of claim 1, further comprising:

disposing the surfactant component onto a top surface of the adhesive layer before the semiconductor structure is disposed onto the adhesive layer, wherein the top surface of the adhesive layer is in contact with the semiconductor structure after the semiconductor structure is disposed onto the adhesive layer.

5. The method of claim 1, wherein the surfactant component comprises at least one fluorosurfactant component, at least one siliconesurfactant component, at least one hydrocarbon surfactant component, or any combination thereof.

6. The method of claim 1, wherein the surfactant component comprises at least one fluorosurfactant component, at least one siliconesurfactant component, or any combination thereof.

7. The method of claim 1, wherein the surfactant component comprises at least one fluorosurfactant component.

8. The method of claim 1, wherein the electromagnetic wave to the adhesive layer drives the surfactant component toward a top surface of the adhesive layer facing the semiconductor structure.

9. The method of claim 1, wherein the pass band of the carrier substrate is in a range between about 150 nm to about 1800 nm.

10. The method of claim 1, wherein the rejection band of the semiconductor structure is in a range between about 150 nm to about 1800 nm.

11. The method of claim 1, wherein the electromagnetic wave has a wavelength in a range between about 150 nm to about 1800 nm.

12. The method of claim 1, further comprising:

performing at least one process on the semiconductor structure temporarily adhered to the adhesive layer before the adhesion pressure of the adhesive layer is reduced.

13. The method of claim 1, wherein the semiconductor structure is an unchipped semiconductor structure;

and

further comprising;

chipping the unchipped semiconductor structure temporarily adhered to the adhesive layer before the adhesion pressure of the adhesive layer is reduced.

14. The method of claim 1, wherein the semiconductor structure is a light emitting diode (LED) with a growth substrate thereon;

and

further comprising;

removing the growth substrate from the LED temporarily adhered to the adhesive layer before the adhesion pressure of the adhesive layer is reduced.

15. The method of claim 1, wherein the reduced adhesion pressure of the adhesive layer to the semiconductor structure is smaller than adhesion pressure of the adhesive layer to the carrier substrate.

16. The method of claim 1, wherein the adhesive layer has a Young'"'"'s modulus less than or equal to about 30 GPa before and after the adhesion pressure of the adhesive layer is reduced.

17. The method of claim 1, wherein the semiconductor structure is picked up by electrostatics force, vacuum force, magnetic force, or combinations thereof.