CMP pad dressers having leveled tips and associated methods
DCFirst Claim
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1. A CMP pad dresser, comprising:
- a rigid support substrate; and
a monolayer of a plurality of superabrasive particles coupled to the support substrate, wherein each superabrasive particle in the monolayer extends away from the support substrate to a protrusion distance, wherein a tip of each of the plurality of superabrasive particles aligns along a designated profile with a tip variation of from about 5 microns to about 100 microns, and wherein the difference in protrusion distance between the highest protruding tip and the second highest protruding tip of the monolayer of superabrasive particles is less than or equal to about 50 microns, and the difference in protrusion distance between the highest 1% of the protruding tips of the monolayer of superabrasive particles are within about 80 microns or less.
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Abstract
CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a CMP pad dresser can include a support substrate and a plurality of superabrasive particles secured to the support substrate with each superabrasive particle extending away from the support substrate to a protrusion distance, where a highest protruding tip of each of the plurality of superabrasive particles align along a designated profile with a tip variation of from about 5 microns to about 100 microns.
401 Citations
21 Claims
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1. A CMP pad dresser, comprising:
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a rigid support substrate; and a monolayer of a plurality of superabrasive particles coupled to the support substrate, wherein each superabrasive particle in the monolayer extends away from the support substrate to a protrusion distance, wherein a tip of each of the plurality of superabrasive particles aligns along a designated profile with a tip variation of from about 5 microns to about 100 microns, and wherein the difference in protrusion distance between the highest protruding tip and the second highest protruding tip of the monolayer of superabrasive particles is less than or equal to about 50 microns, and the difference in protrusion distance between the highest 1% of the protruding tips of the monolayer of superabrasive particles are within about 80 microns or less. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification