Surface-enhanced raman scattering element

• US 9,726,608 B2
• Filed: 08/09/2013
• Issued: 08/08/2017
• Est. Priority Date: 08/10/2012
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Hirose, Masaki, Ito, Masashi, Shibayama, Katsumi, Maruyama, Yoshihiro
• Primary Examiner(s): Ayub, Hina F
• Application Number:
  US14/420,449
• Publication Number:
  US 20150219561A1
• Time in Patent Office: 1,460 Days
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons
• CPC Class Codes: G01N 2201/061 Sources

Abstract

A surface-enhanced Raman scattering element comprises a substrate having a principal surface; a molded layer having a support part formed on the principal surface of the substrate so as to extend along the principal surface and a fine structure part formed on the support part; and a conductor layer formed on the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering; the molded layer being relatively thinner in a direction intersecting the principal surface of the substrate at a center edge part of a fine structure area formed with the fine structure part in the molded layer than at an outer edge part of the fine structure area.

Claims

1. A surface-enhanced Raman scattering element comprising:

a substrate having a principal surface;

a molded layer having a support part formed on the principal surface of the substrate so as to extend along the principal surface and a fine structure part formed on the support part; and

a conductor layer formed on the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering;

wherein the molded layer is relatively thinner in a direction intersecting the principal surface of the substrate at projections in a center part of a fine structure area formed with the fine structure part in the molded layer than at projections at an outer edge part of the fine structure area,

wherein the projections are arranged into a two dimensional array on the support part, in a state where the projections are separate from each other.

2. A surface-enhanced Raman scattering element according to claim 1, wherein the fine structure part includes a plurality of projections formed on the support part;

and

wherein the projections have a forming density relatively lower at the outer edge part of the fine structure area than at the center part thereof.

3. A surface-enhanced Raman scattering element according to claim 1, wherein the molded layer is made relatively thinner in the direction intersecting the principal surface of the substrate at the center part of the fine structure area than at the outer edge part of the fine structure area due to a gradient in thickness of the support part.

4. A surface-enhanced Raman scattering element according to claim 1, further comprising a frame part formed on the principal surface of the substrate so as to surround the support part and fine structure part along the principal surface of the substrate.

5. A surface-enhanced Raman scattering element according to claim 1, wherein the fine structure part is formed all over the principal surface of the substrate.