Organic film composition, process for forming organic film, patterning process, and compound
First Claim
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1. An organic film composition comprising a compound represented by the following general formula (4),
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Abstract
An organic film composition including a compound represented by the following general formula (1),
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- wherein n1 and n2 each independently represent 0 or 1; “W” represents a single bond or any of structures represented by the following formula (2); R1 represents any of structures represented by the following general formula (3); m1 and m2 each independently represent an integer of 0 to 7, with the proviso that m1+m2 is 1 to 14.
There can be provided an organic film composition for forming an organic film having dry etching resistance as well as advanced filling/planarizing characteristics.
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15 Claims
- 1. An organic film composition comprising a compound represented by the following general formula (4),
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15. A compound represented by the following general formula (4),
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