Gas injection apparatus and substrate processing apparatus using same

• US 9,732,424 B2
• Filed: 08/24/2010
• Issued: 08/15/2017
• Est. Priority Date: 08/31/2009
• Status: Active Grant

• Current Assignee: Wonik IPS Co., Ltd.
• Original Assignee: Wonik IPS Co., Ltd.
• Inventors: Lee, Jung-Hwan, Park, Woo-Young, Hahm, Tae-Ho
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US13/393,498
• Publication Number:
  US 20120152171A1
• Time in Patent Office: 2,548 Days
• Field of Search: 118715, 118728, 118 50, 15634529, 15634533, 15634534, 15634535, 15634536, 15634526, 15634551
• CPC Class Codes: C23C 16/45551 for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: H01L 21/68764 characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
• CPC Class Codes: H01L 21/68771 characterised by supporting more than one semiconductor substrate

Abstract

Provided are a gas injection device and substrate processing apparatus using the same. The gas injection device includes a plurality of gas injection units disposed above a substrate support part rotatably disposed within a chamber to support a plurality of substrates, the plurality of gas injection units being disposed along a circumference direction with respect to a center point of the substrate support part to inject a process gas onto the substrates. Wherein each of the plurality of gas injection units includes a top plate in which an inlet configured to introduce the process gas is provided and an injection plate disposed under the top plate to define a gas diffusion space between the injection plate and the top plate along a radius direction of the substrate support part, the injection plate having a plurality of gas injection holes under the gas diffusion space to inject the process gas introduced through the inlet and diffused in the gas diffusion space onto the substrate. In at least one gas injection unit of the plurality of gas injection units, the process gas is introduced into the gas diffusion space at a plurality of points.

Claims

1. A gas injection device comprising:

a plurality of gas injection units disposed above a plurality of substrate seat parts on a support plate rotatably disposed within a chamber to support a plurality of substrates, wherein the plurality of substrate seat parts are disposed on an upper portion of the support plate along a circumference direction of the support plate, wherein the plurality of gas injection units are disposed along the circumference direction with respect to a center point of the support plate to inject a process gas onto the substrates, and wherein an area covered by the plurality of gas injection units is larger than an area of the upper portion of the support plate,

wherein each of the plurality of gas injection units comprises;

a top plate having a plurality of inlets formed therein and arranged along a radial direction of the support plate, wherein the plurality of inlets are configured to introduce the process gas; and

an injection plate having a linear portion of a first groove recessed within an upper portion thereof and extending linearly along a radius direction of the support plate, wherein the injection plate is disposed under the top plate and attached to the top plate to define a gas diffusion space between the linear portion of the first groove in the injection plate and a bottom surface of the top plate, wherein a plurality of first gas injection holes are disposed along the linear portion of the first groove and configured to inject the process gas introduced through the at least one of the plurality of inlets and diffused in the gas diffusion space onto the substrate, and wherein a diameter of the first gas injection holes increases linearly outward from a central side of the support plate such that the first gas injection holes have at least three different diameters,

wherein, in at least one gas injection unit of the plurality of gas injection units, the process gas is introduced into the gas diffusion space at a plurality of points,

wherein an amount of process gas introduced through the plurality of inlets disposed adjacent to the central side of the support plate is less than an amount of process gas introduced through the inlets disposed at a peripheral side of the support plate, wherein the central side and the peripheral side are separated from one another along the radial direction of the support plate, and

wherein a circumference portion of a first groove is recessed in the upper portion of injection plate, wherein the circumference portion of the first groove extends from an end of the linear portion of the first groove along the circumference direction of the support plate to define a second gas diffusion space between the circumference portion of the first groove in the injection plate and a bottom surface of the top plate, and wherein a plurality of second gas injection holes are disposed along the circumference portion of the first groove.

2. The gas injection device of claim 1, wherein an intermediate plate is disposed between the top plate and the injection plate,

the gas diffusion space comprises a first gas diffusion space defined between the top plate and the intermediate plate and connected to the inlet and a second gas diffusion space defined between the intermediate plate and the injection plate and connected to the gas injection holes, and

the intermediate plate comprises a plurality of connection holes defined under the first gas diffusion space and connected to the second gas diffusion space.

3. The gas injection device of claim 1, wherein the inlet configured to introduce the process gas is biasedly disposed toward a central side of the support plate.

4. The gas injection device of claim 1, wherein the injection plate of each of the gas injection units is disposed along the circumference direction with respect to a center of the support plate to occupy a portion of the top plate, and each of the gas injection units is coupled to a lower portion of the top plate.

5. The gas injection device of claim 2, wherein the larger number of connection holes defined in the intermediate plate are defined at the peripheral side of the support plate than at the central side of the support plate along the radius direction of the support plate.

6. The gas injection device of claim 2, wherein each of the connection holes defined at the peripheral side of the support plate along the radius direction of the support plate among the plurality of connection holes defined in the intermediate plate has a diameter greater than a diameter of each of the connection holes defined at the central side of the support plate.

7. The gas injection device of claim 1, wherein the gas injection units comprise a plurality of source gas injection units configured to inject a source gas and a plurality of purge gas injection units configured to inject a purge gas.

8. The gas injection device of claim 7, further comprising a central purge gas injection unit disposed at a central portion of the plurality of gas injection units disposed along the circumference direction of the support plate so that the purge gas for purging the source gases is supplied toward the central side of the support plate.

9. The gas injection device of claim 7, wherein two or more injection units disposed adjacent to each other to inject the same gas among the source gas injection units and the purge gas injection units are grouped to form a gas injection block.

10. The gas injection device of claim 9, wherein the source gas injection units comprise injection units configured to inject the source gas and injection units configured to inject a reaction gas reacting with the source gas, and the plurality of injection units configured to inject the source gas or the plurality of injection units configured to inject the reaction gas are grouped to form a gas injection block.

11. The gas injection device of claim 7, wherein a buffer injection unit through which a gas is selectively injected or not injected is disposed between the plurality of gas injection units.

12. A substrate processing apparatus comprising:

a chamber having an inner space in which predetermined processes with respect to substrates are performed;

a substrate support part on which the plurality of substrates are seated, the substrate support part being rotatably disposed within the chamber; and

a gas injection device disposed above the substrate support part to inject a gas onto the substrates, wherein the gas injection device is configured according to any one of claims 1, 4, and 7 to 11.

13. The gas injection device of claim 1, wherein a diameter of the second gas injection holes is greater than a diameter of the first gas injection holes.