Pressure sensor, and sensor unit provided with same
First Claim
Patent Images
1. A pressure sensor comprising:
- a sensor chip comprising;
a main body comprising;
a movable portion provided with a plurality of pressure detection elements, the movable portion being adapted to displace in response to a pressure acting thereon; and
a fixed portion that is continuous with the movable portion;
a circuit formed in a first layer laminated on the main body, the circuit being connected to the pressure detection elements through a conductive element; and
a shield layer formed in a second layer laminated on the first layer, the shield layer having an opening extending therethrough directly above the movable portion, the shield layer formed continuously around the opening;
a capacitor formed between the shield layer and an output voltage line; and
a resistor connected between the shield layer and a ground line, the resistor having a resistance value greater than or equal to 10Ω and
less than or equal to 1 MΩ
.
1 Assignment
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Accused Products
Abstract
When a main body of a sensor chip (1) is in a grounded state, a shield layer (71) constituting a shield electrode formed on a circuit layer (72) is grounded through a resistor (46).
37 Citations
15 Claims
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1. A pressure sensor comprising:
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a sensor chip comprising; a main body comprising; a movable portion provided with a plurality of pressure detection elements, the movable portion being adapted to displace in response to a pressure acting thereon; and a fixed portion that is continuous with the movable portion; a circuit formed in a first layer laminated on the main body, the circuit being connected to the pressure detection elements through a conductive element; and a shield layer formed in a second layer laminated on the first layer, the shield layer having an opening extending therethrough directly above the movable portion, the shield layer formed continuously around the opening; a capacitor formed between the shield layer and an output voltage line; and a resistor connected between the shield layer and a ground line, the resistor having a resistance value greater than or equal to 10Ω and
less than or equal to 1 MΩ
. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A pressure sensor comprising:
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a sensor chip comprising; a main body comprising; a movable portion provided with a plurality of pressure detection elements, the movable portion being adapted to displace in response to a pressure acting thereon; and a fixed portion that is continuous with the movable portion; a circuit formed in a first layer laminated on the main body, the circuit being connected to the pressure detection elements through a conductive element; a shield layer formed in a second layer laminated on the first layer, the shield layer having an opening extending therethrough directly above the movable portion, the shield layer formed continuously around the opening; a capacitor formed between the shield layer and a ground line; and a resistor connected between the shield layer and an input voltage line, the resistor having a resistance value greater than or equal to 10Ω and
less than or equal to 1 MΩ
. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A pressure sensor comprising:
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a sensor chip comprising; a main body comprising; a fixed portion formed on a glass layer; a movable portion integrally formed with the fixed portion, the movable portion being displaceable in response to pressure acting thereon; and a plurality of pressure detection elements positioned on the main body; a circuit layer laminated on the main body, the circuit layer having a circuit formed therein that is electrically connected to the pressure detection elements through a conductive element; a shield layer laminated on the circuit layer, the shield layer having an opening extending therethrough directly above the movable portion, wherein the shield layer is formed continuously around the opening; and a capacitor formed between the shield layer and one of;
an output voltage line and a ground line; anda resistor connected between the shield layer and the other one of the output voltage line and the ground line, the resistor having a resistance value greater than or equal to 10Ω and
less than or equal to 1 MΩ
.
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Specification