Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame
First Claim
1. A micro-electro-mechanical system (MEMS) device, comprising:
- a substrate;
a proof mass, including at least two slots, each of the slots including a first inner space and an opening, wherein the first inner space is relatively closer to a center area of the proof mass than the opening;
at least two anchors, respectively located in the corresponding first inner spaces and connected to the substrate;
at least two linkages, respectively located in the corresponding slots and connected to the corresponding anchors; and
a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors, the multi-dimensional spring structure comprising;
a plurality of first springs, connected to the proof mass for assisting an out-of-plane movement of the proof mass;
a plurality of second springs, each of the second springs being directly or indirectly connected between a corresponding one of the linkages and a corresponding one of the first springs, for assisting an in-plane movement of the proof mass, wherein the first springs and second springs respectively assist movements of the proof mass in different dimensions; and
an outer frame which is connected to the first and second springs and forms a frame-like structure which encompasses all of the proof mass, wherein the second springs are connected to the proof mass through the first springs.
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Abstract
The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.
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Citations
10 Claims
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1. A micro-electro-mechanical system (MEMS) device, comprising:
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a substrate; a proof mass, including at least two slots, each of the slots including a first inner space and an opening, wherein the first inner space is relatively closer to a center area of the proof mass than the opening; at least two anchors, respectively located in the corresponding first inner spaces and connected to the substrate; at least two linkages, respectively located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors, the multi-dimensional spring structure comprising; a plurality of first springs, connected to the proof mass for assisting an out-of-plane movement of the proof mass; a plurality of second springs, each of the second springs being directly or indirectly connected between a corresponding one of the linkages and a corresponding one of the first springs, for assisting an in-plane movement of the proof mass, wherein the first springs and second springs respectively assist movements of the proof mass in different dimensions; and an outer frame which is connected to the first and second springs and forms a frame-like structure which encompasses all of the proof mass, wherein the second springs are connected to the proof mass through the first springs. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A micro-electro-mechanical system (MEMS) device, comprising:
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a substrate; a proof mass, including at least two slots, each of the slots including a first inner space and an opening, wherein the first inner space is relatively closer to a center area of the proof mass than the opening; at least two anchors, respectively located in the corresponding first inner spaces and connected to the substrate; at least two linkages, respectively located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors, the multi-dimensional spring structure comprising; a plurality of first springs, connected to the proof mass for assisting an out-of-plane movement of the proof mass; and a plurality of second springs, each of the second springs being directly or indirectly connected between a corresponding one of the linkages and a corresponding one of the first springs, for assisting an in-plane movement of the proof mass, wherein the first springs and second springs respectively assist movements of the proof mass in different dimensions; wherein the first springs are reflection-symmetric with respect to a first center line of the proof mass and the second springs are reflection-symmetric with respect to a second center line of the proof mass.
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Specification