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Optical projection array exposure system

  • US 9,733,573 B2
  • Filed: 01/11/2016
  • Issued: 08/15/2017
  • Est. Priority Date: 06/04/2012
  • Status: Active Grant
First Claim
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1. An illumination-projection assembly, comprising:

  • a first prism, wherein the first prism comprises;

    a first surface;

    a second surface; and

    a first hypotenuse; and

    a second prism, wherein the second prism comprises;

    a third surface;

    a fourth surface;

    a second hypotenuse;

    wherein the first hypotenuse and the second hypotenuse are facing one another, and wherein the first hypotenuse and the second hypotenuse are separated by an air gap; and

    a digital micro-mirror device adjacent the third surface, the digital micro-mirror device having a width less than a width of the third surface, and having a midpoint of the width that is vertically offset from a midpoint of the width of the third surface.

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