Mineral identification using sequential decomposition into elements from mineral definitions

• US 9,734,986 B2
• Filed: 06/02/2015
• Issued: 08/15/2017
• Est. Priority Date: 10/26/2012
• Status: Active Grant

• Current Assignee: FEI Company (Thermo Fisher Scientific Incorporated)
• Original Assignee: FEI Company (Thermo Fisher Scientific Incorporated)
• Inventors: Buhot, Michael, Owen, Michael James
• Primary Examiner(s): Stoffa, Wyatt
• Assistant Examiner(s): Chang, Hanway
• Application Number:
  US14/728,751
• Publication Number:
  US 20150338358A1
• Time in Patent Office: 805 Days
• Field of Search: 250306, 250307, 250309, 250310, 250311, 250305
• CPC Class Codes: G01N 23/2252 Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
• CPC Class Codes: H01J 2237/221 Image processing
• CPC Class Codes: H01J 2237/24585 Other variables, e.g. energy, mass, velocity, time, temperature
• CPC Class Codes: H01J 2237/2561 electron
• CPC Class Codes: H01J 37/252 Tubes for spot-analysing by electron or ion beams; Microanalysers

Abstract

Mineral definitions each include a list of elements, each of the elements having a corresponding standard spectrum. To determine the composition of an unknown mineral sample, the acquired spectrum of the sample is sequentially decomposed into the standard spectra of the elements from the element list of each of the mineral definitions, and a similarity metric computed for each mineral definition. The unknown mineral is identified as the mineral having the best similarity metric.

Claims

1. A method of determining the mineral present at a point in a sample of unknown composition, comprising:

directing an electron beam toward a point on the sample to acquire an x-ray spectrum;

providing a mineral definition for a first mineral, the mineral definition for the first mineral including a list of elements comprising the first mineral, each of the elements having a corresponding standard spectrum associated with the first mineral, the combination of the standard spectra associated with the first mineral forming a first combined standard spectrum;

providing a mineral definition for a second mineral, the mineral definition for the second mineral including a list of elements comprising the second mineral, each of the elements having a corresponding standard spectrum associated with the second mineral, the combination of the standard spectra associated with the second mineral forming a second combined standard spectrum;

comparing the acquired spectrum from the point on the sample to the first combined standard spectrum of the elements from the element list of a first mineral definition;

comparing the acquired spectrum from the point on the sample to the second combined standard spectrum of the elements from the element list of a second mineral definition;

determining whether the first combined standard spectrum or the second combined standard spectrum best matches the acquired spectrum;

classifying the point on the sample as being composed of the first mineral if the first combined standard spectrum matches the acquired spectrum better than the second combined standard spectrum; and

classifying the point on the sample as being composed of the second mineral if the second combined standard spectrum matches the acquired spectrum better than the first combined standard spectrum.

2. The method of claim 1 in which comparing the spectrum of the unknown mineral sample to the combined spectra of the elements from each mineral definition includes splitting elemental standard spectra into segments and individually fitting segments of the acquired spectrum of the sample to segments of the elemental standard spectra.

3. The method of claim 2 in which the multiple segments correspond to multiple peaks in the standard spectra.

4. The method of claim 1 in which comparing the spectrum of the unknown mineral sample to the combined spectra of the elements from each mineral definition includes calculating an overall probability match between the sample and the combined spectra of the elements from each mineral definition.

5. The method of claim 1 in which calculating an overall probability for the unknown mineral sample to the mineral definition includes determining an average backscattered electron value and standard deviation for the multiple known samples of a mineral and comparing said average backscattered electron value and standard deviation to a backscattered electron value of the unknown mineral sample.

6. The method of claim 1 comparing the spectrum of the unknown mineral sample to the combined spectra of the elements from each mineral definition includes computing a nearest point in the mineral definition to values from the decomposed spectrum.

7. A system for spectrum data analysis, comprising:

an electron beam column for directing an electron beam toward a sample;

an x-ray spectrometer for measuring the energy of x-rays emitted from the sample in response to the electron beam;

a processor for executing computer instructions to analyze a mineral sample; and

a computer memory for storing instructions for carrying out the method of claim 1.

8. A method of spectrum data analysis, the method comprising:

acquiring a spectrum of an unknown mineral sample;

selecting a first mineral definition, the first mineral definition including an element list of the elements comprising the first mineral;

decomposing the spectrum of the unknown mineral sample using elements from the first mineral definition;

calculating an overall match probability between the unknown mineral sample and the first mineral definition; and

selecting a second mineral definition, the second mineral definition including an element list of the elements comprising the second mineral;

decomposing the spectrum of the unknown mineral sample using elements from the second mineral definition;

calculating an overall match probability between the unknown mineral sample and the second mineral definition; and

in response to the first mineral definition having a greater match probability than the second mineral definition, classifying the acquired spectrum as being composed of the first mineral; and

in response to the second mineral definition having a greater match probability than the first mineral definition, classifying the acquired spectrum as being composed of the second mineral.

9. The method of claim 8, further comprising computing a nearest point in the mineral definition to values from the decomposed spectrum.

10. The method of claim 8, further comprising displaying the overall probability for a user to review.

11. The method of claim 8, further comprising:

creating a mineral definition by measuring multiple known samples of a mineral; and

storing the definition in a database.

12. The method of claim 11 in which the step of creating a mineral definition by measuring multiple known samples of a mineral is repeated multiple times to create multiple mineral definitions.

13. The method of claim 8 in which calculating an overall probability for the unknown mineral sample to the mineral definition includes determining an average backscattered electron value and standard deviation for the multiple known samples of a mineral and comparing said average backscattered electron value and standard deviation to a backscattered electron value of the unknown mineral sample.

14. The method of claim 8, in which decomposing the spectrum of the unknown mineral sample using elements from the selected element list includes obtaining elemental spectra for the mineral definition selected and splitting the elemental spectra into segments based on the number of peaks present in the spectrum of the unknown mineral sample.

15. The method of claim 14, in which splitting the spectrum into segments includes splitting the spectrum into regions around known peak energies.

16. The method of claim 8, in which decomposing the spectrum of the unknown mineral sample includes performing a curve fitting of the elemental spectra to the spectrum of the unknown mineral sample.

17. The method of claim 16 in which performing a curve fitting of elemental spectra includes a linear decomposition.

18. The method of claim 8 in which computing a nearest point in the mineral definition to values from the decomposed spectrum includes a least squares method to determine the minimum distance from the values from the decomposed spectrum to the nearest point in the mineral definition.

19. The method of claim 8 in which calculating an overall probability match for the unknown mineral sample to the mineral definition includes calculating individual element probability matches from the decomposed spectrum to the mineral definition and calculating an overall similarity metric by multiplying the individual element probability matches.