Semiconductor device and Zener diode

• US 9,735,291 B1
• Filed: 03/10/2016
• Issued: 08/15/2017
• Est. Priority Date: 03/10/2016
• Status: Active Grant

• Current Assignee: Macronix International Co., Ltd.
• Original Assignee: Macronix International Co., Ltd.
• Inventors: Chiou, Chun-Ming, Chang, Yu-Jui, Lin, Cheng-Chi
• Primary Examiner(s): Chin, Edward
• Application Number:
  US15/066,624
• Time in Patent Office: 523 Days
• Field of Search: 257173, 257355, 257E21388, 257E21694, 257E27016, 257E27103, 257E29012, 257E29013, 257E29026, 257E29114, 257E29146, 257E29182, 257E29183, 257E29187, 257E29202, 257E29211, 257E29225, 257E29258, 257E29262, 257109, 257112, 257133, 257146, 257314, 257328, 257341, 257343, 257367, 257370, 438133
• CPC Class Codes: H01L 29/0607 for preventing surface leakage or controlling electric field concentration
• CPC Class Codes: H01L 29/0649 Dielectric regions, e.g. SiO2 regions, air gaps
• CPC Class Codes: H01L 29/0684 characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
• CPC Class Codes: H01L 29/0688 characterised by the particular shape of a junction between semiconductor regions
• CPC Class Codes: H01L 29/0692 Surface layout
• CPC Class Codes: H01L 29/66106 Zener diodes
• CPC Class Codes: H01L 29/866 Zener diodes

Abstract

A semiconductor device includes a substrate; a well region of a first-conductivity-type, disposed in the substrate; a first impurity region of a first-conductivity-type disposed in the well region; a second impurity region of the second-conductivity-type disposed in the well region, the second-conductivity-type being opposite to the first-conductivity-type; a third impurity region disposed in the well region, a portion of the first impurity region overlapping a first portion of the third impurity region, a portion of the second impurity region overlapping a second portion of the third impurity region, and a third portion of the third impurity region being disposed between the first impurity region and the second impurity region; and a fourth impurity region and a barrier layer disposed in the substrate, the fourth impurity region and the barrier layer enclosing the well region from around and below, respectively.

Claims

1. A semiconductor device having a Zener diode, the semiconductor device comprising:

a substrate;

a well region of a first-conductivity-type, disposed in the substrate;

a first impurity region of the first-conductivity-type disposed in the well region;

a second impurity region of a second-conductivity-type disposed in the well region, the second-conductivity-type being opposite to the first-conductivity-type;

a third impurity region disposed in the well region, a portion of the first impurity region overlapping a first portion of the third impurity region, a portion of the second impurity region overlapping a second portion of the third impurity region, and a third portion of the third impurity region being disposed between the first impurity region and the second impurity region; and

a fourth impurity region and a barrier layer disposed in the substrate, the fourth impurity region and the barrier layer enclosing the well region from around and below, respectively.

2. The semiconductor device of claim 1, wherein the third impurity region is of the second-conductivity-type while the fourth impurity region is also of the second-conductivity-type.

3. The semiconductor device of claim 1, further comprising a fifth impurity region disposed in the substrate and surrounding the fourth impurity region.

4. The semiconductor device of claim 3, wherein the fifth impurity region is of the first-conductivity-type.

5. The semiconductor device of claim 4, wherein the fourth impurity region and the barrier layer forms a charge barrier that blocks a leakage current from within the charge barrier to the fifth impurity region or to the substrate.

6. The semiconductor device of claim 5, wherein a forward bias is applied to the first impurity region and the third impurity region.

7. The semiconductor device of claim 5, wherein the leakage current being blocked emancipates from active regions of the first impurity region or the second impurity region.

8. The semiconductor device of claim 5, wherein the fourth impurity region is connected to the first impurity region by metal routing of the semiconductor device.

9. The semiconductor device of claim 3, further comprising:

a dielectric layer disposed on the substrate;

a sixth impurity region disposed in the fourth impurity region, the sixth region having the same conductivity type as the fourth impurity region but doped with a higher concentration of dopants than the fourth impurity region;

a first electrode coupled to the first impurity region via the dielectric layer;

a second electrode coupled to the second impurity region via the dielectric layer; and

a third electrode coupled to the sixth impurity region via the dielectric layer,

wherein the third electrode is shorted to the first electrode such that the sixth impurity region is electrically connected to the first impurity region and that a leakage current—

from within a charge barrier to the fifth impurity region or to the substrate—

is blocked.

10. The semiconductor device of claim 9, further comprising a first isolation region located between an outer boundary of the third impurity region and an inner boundary of the fourth impurity region, and a second isolation region located between an outer boundary of the fourth impurity region and an inner boundary of the fifth impurity region.

11. The semiconductor device of claim 1, wherein the second impurity region has a doping concentration greater than a doping concentration of the third impurity region.

12. The semiconductor device of claim 1, wherein the first impurity region has a first plurality of branches while the second impurity region has a second plurality of branches.

13. The semiconductor device of claim 12, wherein at least one portion of the first plurality of branches of the first impurity region interlaces with at least one portion of the second plurality of branches of the second impurity region.

14. A semiconductor device having a Zener diode, the semiconductor device comprising:

a substrate;

a well region of a first-conductivity-type, disposed in the substrate;

a first impurity region of the first-conductivity-type disposed in the well region;

a second impurity region of a second-conductivity-type disposed in the well region, the second-conductivity-type being opposite to the first-conductivity-type;

a third impurity region disposed in the well region, wherein a portion of the third impurity region is disposed between the first impurity region and the second impurity region;

a fourth impurity region and a barrier layer disposed in the substrate, the fourth impurity region and the barrier layer respectively enclosing the well region from around and below to form a charge barrier;

a fifth impurity region disposed in the substrate and surrounding the fourth impurity region;

a first isolation region between an outer boundary of the third impurity region and an inner boundary of the fourth impurity region; and

a second isolation region between an outer boundary of the fourth impurity region and an inner boundary of the fifth impurity region.

15. The semiconductor device of claim 14, wherein the second impurity region is located within the third impurity region, and wherein the second impurity region has a doping concentration greater than a doping concentration of the third impurity region.

16. The semiconductor device of claim 14, wherein no bias voltage is applied between the fourth impurity region and the first impurity region.

17. The semiconductor device of claim 14, wherein the first impurity region has a first plurality of branches while the second impurity region has a second plurality of branches, and wherein at least a first portion the first plurality of branches and at least a second portion of the second plurality of branches are complementary in shape.