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Method and system for removing boron from magnetic junctions usable in spin transfer torque memory applications

  • US 9,735,350 B2
  • Filed: 12/28/2015
  • Issued: 08/15/2017
  • Est. Priority Date: 01/05/2015
  • Status: Active Grant
First Claim
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1. A method for providing a magnetic junction residing on a substrate and usable in a magnetic device, the magnetic junction including a top and a plurality of sides, the method comprising:

  • depositing a first magnetic layer;

    depositing a nonmagnetic spacer layer;

    depositing a second magnetic layer, the nonmagnetic spacer layer being between the first magnetic layer and the second magnetic layer, a free layer being one of the first magnetic layer and the second magnetic layer, a reference layer being an other of the first magnetic layer and the second magnetic layer, the free layer having a magnetic moment switchable between a plurality of stable magnetic states when a write current is passed through the magnetic junction, the second magnetic layer including an amorphous magnetic layer having at least one nonmagnetic constituent, the at least one nonmagnetic constituent being glass-forming; and

    performing an anneal in a gas having an affinity for the at least one nonmagnetic constituent, the gas including at least one of a first gas and a second gas, the first gas forming a gaseous compound with the at least one nonmagnetic constituent, the second gas forming a solid compound with the at least one nonmagnetic constituent, the second gas being usable in the anneal performed after the magnetic junction has been defined, the solid compound residing at least on the plurality of sides of the magnetic junction.

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