Thin film deposition
First Claim
Patent Images
1. A method of encapsulating a device including a plurality of protrusions extending therefrom, comprising:
- locally treating at least one of the protrusions, at least one of the at least one of the having a corresponding shadow region; and
depositing a thin film to encapsulate the device after a local treatment of the at least one of the protrusions.
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Accused Products
Abstract
A method of preparing a surface for deposition of a thin film thereon, wherein the surface including a plurality of protrusions extending therefrom and having shadowed regions, includes locally treating at least one of the protrusions.
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Citations
13 Claims
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1. A method of encapsulating a device including a plurality of protrusions extending therefrom, comprising:
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locally treating at least one of the protrusions, at least one of the at least one of the having a corresponding shadow region; and depositing a thin film to encapsulate the device after a local treatment of the at least one of the protrusions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A device, comprising:
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a surface comprising a plurality of protrusions extending therefrom, at least one of the plurality of protrusions having a corresponding shadow region; and a thin film deposited to encapsulate the device, wherein at least one of the plurality of protrusions has undergone a local treatment prior to a deposition of the thin film. - View Dependent Claims (10)
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11. A microelectronic device, comprising:
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a surface comprising a plurality of protrusions extending therefrom, at least one of the plurality of protrusions having a corresponding shadow region; and a thin film deposited to encapsulate the microelectronic device, wherein at least one of the plurality of protrusions has undergone a local treatment prior to a deposition of the thin film. - View Dependent Claims (12)
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13. A system for preparing a surface for deposition of a thin film thereon, wherein the surface includes a plurality of protrusions extending therefrom which have shadowed regions, comprising:
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at least one detecting device to locate protrusion satisfying a threshold value for at least one measurable aspect of the protrusions; and at least one device to locally treat at least one of the protrusions for which the measurable aspect exceeds the threshold value.
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Specification