Method, apparatus, and system for establishing a virtual tether between a mobile device and a semiconductor processing tool

• US 9,736,135 B2
• Filed: 10/17/2014
• Issued: 08/15/2017
• Est. Priority Date: 10/17/2014
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Thorgrimsson, Chris, Weetman, Chad, Ballintine, Paul, Wong, Vincent, Huang, Chung Ho, Chan, Henry T.
• Primary Examiner(s): Mehrmanesh, Amir
• Application Number:
  US14/517,145
• Publication Number:
  US 20160112390A1
• Time in Patent Office: 1,033 Days
• Field of Search: None
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like
• CPC Class Codes: H04L 63/08 for authentication of entities cryptographic mechanisms or cryptographic arrangements for entity authentication H04L9/32
• CPC Class Codes: H04L 63/083 using passwords cryptographic mechanisms or cryptographic arrangements for entity authentication using a predetermined code H04L9/3226
• CPC Class Codes: H04L 63/0853 using an additional device, e.g. smartcard, SIM or a different communication terminal cryptographic mechanisms or cryptographic arrangements for entity authentication involving additional secure or trusted devices H04L9/3234
• CPC Class Codes: H04L 63/101 Access control lists [ACL]
• CPC Class Codes: H04W 12/068 using credential vaults, e.g. password manager applications or one time password [OTP] applications
• CPC Class Codes: H04W 12/08 Access security
• CPC Class Codes: H04W 12/50 Secure pairing of devices
• CPC Class Codes: H04W 12/77 Graphical identity
• CPC Class Codes: H04W 4/80 Services using short range communication, e.g. near-field communication [NFC], radio-frequency identification [RFID] or low energy communication

Abstract

A method for establishing a virtual tether between a mobile device and a semiconductor processing tool, the method including: obtaining, by a mobile device, a unique key associated with the semiconductor processing tool; establishing a unique pairing between the mobile device and the semiconductor processing tool based on the unique key that is obtained by the mobile device; in response to successfully establishing the unique pairing, authenticating a user of the mobile device for access to the semiconductor processing tool; in response to successfully authenticating the user, performing resource arbitration on the semiconductor processing tool which includes reserving one or more resources associated with the semiconductor processing tool based on a level of access granted to the user; monitoring an activity level of the mobile device over a period of time; and comparing the activity level to a predetermined activity level threshold.

Claims

1. A method for establishing a virtual tether between a mobile device and a semiconductor processing tool, the method comprising:

obtaining, by a mobile device, a unique key associated with the semiconductor processing tool;

establishing a unique pairing between the mobile device and the semiconductor processing tool based on the unique key that is obtained by the mobile device;

in response to successfully establishing the unique pairing between the mobile device and the semiconductor processing tool, authenticating a user of the mobile device for access to the semiconductor processing tool;

in response to successfully authenticating the user, performing resource arbitration on the semiconductor processing tool which includes reserving one or more resources associated with the semiconductor processing tool based on a level of access granted to the user;

monitoring an activity level of the mobile device over a period of time; and

comparing the activity level to a predetermined activity level threshold,

wherein the comparing includes determining whether the activity level is less than the predetermined activity level threshold, and when the activity level is determined to be less than the predetermined activity level threshold, revoking the reservation of the one or more resources associated with the semiconductor processing tool; and

wherein the revoking the reservation includes logging the user off of the mobile device, releasing the one or more reserved resources, and breaking the unique pairing between the mobile device and the semiconductor processing tool.

2. The method of claim 1, wherein the comparing includes determining whether the activity level is greater than or equal to the predetermined activity level threshold, and when the activity level is determined to be greater than or equal to the predetermined activity level threshold, maintaining the reservation of the one or more resources associated with the semiconductor processing tool.

3. The method of claim 1, wherein the reserving of the one or more resources associated with the semiconductor processing tool includes setting the mobile device to have (i) a master access level or (ii) an intermediate or shared access level to the semiconductor processing tool.

4. The method of claim 1, further comprising in response to successfully authenticating the user, controlling one or more operations of the semiconductor processing tool with the mobile device.

5. The method of claim 1, wherein the semiconductor processing tool is a plasma etching chamber used for fabricating semiconductor devices.

6. The method of claim 1, wherein the unique key is received from the semiconductor processing tool.

7. The method of claim 1, wherein the obtaining of the unique key is performed based on one of the following:

a near-field communication, a radio-frequency identification communication, a Bluetooth communication, and a Wi-Fi communication.

8. The method of claim 1, wherein the monitoring an activity level is based on sensor data obtained from one or more sensors within the mobile device.

9. The method of claim 8, wherein the one or more sensors within the mobile device are selected from the group comprising a GPS sensor, an accelerometer, a temperature sensor, a humidity sensor, a barometer, and one or more environmental sensors.

10. The method of claim 1, wherein the reserving of the one or more resources associated with the semiconductor processing tool includes setting the mobile device to have a master access level.

11. The method of claim 1, wherein the reserving of the one or more resources associated with the semiconductor processing tool includes setting the mobile device to an intermediate or shared access level.

12. The method of claim 1, wherein the authenticating includes comparing a login and password received from the mobile device with a stored login and password.

13. The method of claim 1, wherein the monitoring the activity level of the mobile device includes registering a time of a last input by the user on the mobile device.

14. The method of claim 1, further comprising:

revoking the reserving of the one or more resources by a remote device associated with a master user, and breaking the unique pairing between the mobile device and the semiconductor processing tool.

15. The method of claim 1, further comprising:

after the authenticating of the user, controlling the semiconductor processing tool with the mobile device.

16. A semiconductor processing tool that is virtually tethered to a mobile device, the semiconductor processing tool comprising:

a memory device storing a unique key associated with the semiconductor processing tool;

a transmitter configured to transmit the unique key to the mobile device, wherein a unique pairing is established between the mobile device and the semiconductor processing tool based on the unique key that is transmitted by the semiconductor processing tool, and in response to successfully establishing the unique pairing between the mobile device and the semiconductor processing tool, authenticating a user of the mobile device for access to the semiconductor processing tool; and

a processor configured to, in response to successfully authenticating the user, perform resource arbitration which includes reserving one or more resources associated with the semiconductor processing tool based on a level of access granted to the user, wherein an activity level of the mobile device is monitored over a period of time, and the activity level is compared to a predetermined activity level threshold;

wherein the comparing includes determining whether the activity level is less than the predetermined activity level threshold, and when the activity level is determined to be less than the predetermined activity level threshold, the reservation of the one or more resources associated with the semiconductor processing tool is revoked; and

wherein the revoking the reservation includes releasing the one or more reserved resources, and breaking the unique pairing between the mobile device and the semiconductor processing tool.

17. The semiconductor processing tool of claim 16, wherein when the activity level is determined to be greater than or equal to the predetermined activity level threshold, the reservation of the one or more resources associated with the semiconductor processing tool is maintained.

18. The semiconductor processing tool of claim 16, wherein when the activity level is determined to be less than the predetermined activity level threshold, the reservation of the one or more resources associated with the semiconductor processing tool is revoked.

19. A system for establishing a virtual tether between a mobile device and a semiconductor processing tool, the system comprising:

the semiconductor processing tool that includes a transmitter configured to transmit a unique key associated with the semiconductor processing tool to the mobile device; and

the mobile device that is configured to;

establish a unique pairing between the mobile device and the semiconductor processing tool based on the unique key that is obtained by the mobile device, and

authenticate, in response to successfully establishing the unique pairing between the mobile device and the semiconductor processing tool, a user of the mobile device for access to the semiconductor processing tool;

the semiconductor processing tool is configured to, in response to successful authentication of the user, perform resource arbitration which includes reserving one or more resources associated with the semiconductor processing tool based on a level of access granted to the user;

the mobile device is configured to monitor an activity level of the mobile device over a period of time; and

the mobile device is configured to compare the activity level to a predetermined activity level threshold;

wherein the comparing includes determining whether the activity level is less than the predetermined activity level threshold, and when the activity level is determined to be less than the predetermined activity level threshold, the reservation of the one or more resources associated with the semiconductor processing tool is revoked; and

wherein the revoking the reservation includes logging the user off of the mobile device, releasing the one or more reserved resources, and breaking the unique pairing between the mobile device and the semiconductor processing tool.

20. The system of claim 19, wherein when the activity level is determined to be greater than or equal to the predetermined activity level threshold, the reservation of the one or more resources associated with the semiconductor processing tool is maintained.