Sputtering apparatus including target mounting and control

• US 9,738,967 B2
• Filed: 09/25/2012
• Issued: 08/22/2017
• Est. Priority Date: 07/12/2006
• Status: Active Grant

• Current Assignee: Cardinal CG Company (Cardinal Glass Industries Incorporated)
• Original Assignee: Cardinal CG Company (Cardinal Glass Industries Incorporated)
• Inventors: Brabender, Dennis M, Kokoschke, Jeffrey L
• Primary Examiner(s): BERMAN, JASON
• Application Number:
  US13/626,295
• Publication Number:
  US 20130220795A1
• Time in Patent Office: 1,792 Days
• Field of Search: 20429826, 20429821, 20419212
• CPC Class Codes: C23C 14/3414 Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
• CPC Class Codes: C23C 14/3464 using more than one target C23C14/56 takes precedence
• CPC Class Codes: C23C 14/352 using more than one target C23C14/56 takes precedence
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: H01J 37/32458 Vessel
• CPC Class Codes: H01J 37/32752 for moving the material across the discharge
• CPC Class Codes: H01J 37/3417 Arrangements
• CPC Class Codes: H01J 37/342 Hollow targets
• CPC Class Codes: H01J 37/3447 Collimators, shutters, apertures

Abstract

A sputtering chamber includes at least two sputtering targets, one of the at least two targets disposed on a first side a substrate conveyor extending within the chamber, and another of the at least two targets disposed on a second side of the conveyor. The at least two targets may be independently operable, and at least one of the targets, if inactivated, may be protected by a shielding apparatus. Both of the at least two targets may be mounted to a first wall of a plurality of walls enclosing the sputtering chamber.

Claims

1. A sputtering target assembly for a single sputtering chamber of a sputter coating apparatus, comprising:

a lid to seal off an opening to the chamber, the lid including a first part and a second part, the first part being separable from the second part;

a first pair of sputtering targets mounted to the first part of the lid for placement within the chamber, at a first distance from the lid, when the lid seals off the opening, each target of the first pair of sputtering targets being cylindrical and including a longitudinal axis about which the corresponding target of the first pair rotates, and both longitudinal axes of the first pair being located at the first distance, when the lid seals off the chamber; and

a second pair of sputtering targets mounted to the second part of the lid for placement within the chamber, at a second distance from the lid, when the lid seals off the opening, each target of the second pair of sputtering targets being cylindrical and including a longitudinal axis about which the corresponding target of the second pair rotates, and both longitudinal axes of the second pair being located at the second distance, when the lid seals off the chamber;

wherein the second distance is greater than the first distance such that the second pair of sputtering targets are spaced apart from the first pair of sputtering targets to allow conveyance of a substrate in between the first and second pairs of sputtering targets in a direction approximately parallel with the lid, when the lid seals off the opening; and

the longitudinal axis of each of the first pair of sputtering targets is aligned with the longitudinal axis of the corresponding target of the second pair of sputtering targets in order that both/opposing sides of the substrate can be simultaneously coated by the first and second pairs of sputtering targets when conveyed therebetween.

2. The assembly of claim 1, wherein the opening extends over a top of the chamber.

3. The assembly of claim 1, wherein the at least one first sputtering target comprises of a pair of first targets and the at least one second sputtering target comprises a pair of second targets.

4. The assembly of claim 1, wherein each of the pair of first targets is independently operable and each of the pair of second targets is independently operable, such that one target of each of the pairs can be activated, while another target of each pair can be inactivated.

5. The assembly of claim 1, wherein the at least one first target and the at least one second target are independently operable, such that one of the at least one first target and the at least one second target can be activated while the other is inactivated.

6. The assembly of claim 1, wherein:

the lid includes a first part and a second part, the first part being separable from the second part;

the at least one first target is mounted to the first part; and

the at least one second target is mounted to the second part.

7. The assembly of claim 6, wherein the first part surrounds at least a portion of the second part, when the lid seals off the opening to the chamber.

8. The assembly of claim 1, wherein each of the at least one first target and each of the at least one second target are cylindrical and extend from a first end to a second end, and further comprising:

a first end block coupled to the lid and housing an assembly that couples one of the first and second ends of each of the at least one first target to the lid; and

a second end block coupled to the lid and housing an assembly that couples one of the first and second ends of each of the at least one second target to the lid.

9. The assembly of claim 1, wherein the substrate is conveyed between the at least one first target and the at least one second target by a series of spaced-apart transport rollers defining a path of substrate travel, and the at least one first target is disposed above the path and the at least one second target is disposed below the path, when the lid seals off the opening.

10. The assembly of claim 1, wherein each of the at least one first sputtering target and each of the at least one second sputtering target are cylindrical and adapted for rotation about a longitudinal axis thereof.

11. The assembly of claim 10, further comprising:

at least one first rotary drive coupled to an end of the at least one first target; and

at least one second rotary drive coupled to an end of the at least one second target.

12. The assembly of claim 1, further comprising:

a first connector port electrically coupled to an electrode of the at least one first target; and

a second connector port electrically coupled to an electrode of the at least one second target;

wherein the first and second ports are mounted to the lid such that the ports are disposed outside the sputtering chamber, when the lid seals off the opening; and

the first and second ports are adapted to receive a connector plug electrically coupled to either a power supply or a grounded connection so that one of the at least one first target and the at least one second target can be selected to be active by coupling to the power supply, and another of the at least one first target and the at least one second target may be selected to be inactive by coupling to the grounded connection.

13. The assembly of claim 1, wherein the at least one first sputtering target comprises of a pair of first targets and the at least one second sputtering target comprises a pair of second targets, and further comprising:

a pair of first connector ports, each of the pair of first ports electrically coupled to a corresponding electrode of each of the pair of first targets; and

a pair of second connector ports, each of the pair of second ports electrically coupled to a corresponding electrode of each of the pair of second targets;

wherein the pairs of first and second ports are mounted to the lid such that the ports are disposed outside the sputtering chamber, when the lid seals off the opening; and

each port of the first and second pairs of ports are adapted to receive a connector plug electrically coupled to either a power supply or a grounded connection so that any one or a combination of the first targets and the second targets can be selected to be active by coupling to the power supply, and the remaining targets can be selected to be inactive by coupling to the grounded connection.

26. The sputtering target assembly according to claim 1 wherein the at least one first sputtering target is solely mounted to a first portion of the lid and the at least one second sputtering target is solely mounted to a second portion of the lid wherein the combination of the first portion of the lid and the second portion of the lid seals off the opening in the chamber and the first position of the lid may, be removed from the opening separately from the second portion of the lid so that the at least one first sputtering target may be serviced separately from the at least one second sputtering target.

27. The sputtering target assembly according to claim 1 wherein the lid can be removed from the opening thereby removing the at least one first sputtering target and the at least one second sputtering target.

28. The apparatus of claim 5, wherein:

each of the at least one first target and each of the at least one second target are cylindrical and extend from a first end to a second end;

and further comprising;

a first moveable shield including first and second arcuate panels extending between the first and second ends of one of the at least one first target, the first and second panels of the first shield being adapted to move with respect to one another about a circumference of the first target from a first position, in which the panels of the first shield protect the first target from being coated by sputtered material, to a second position in which the panels of the first shield allow at least a portion of the first target to be exposed for sputtering;

a second moveable shield including first and second arcuate panels extending between the first and second ends of one of the at least one second target, the first and second panels of the second shield being adapted to move with respect to one another about a circumference of the second target from a first position, in which the panels of the second shield protect the second target from being coated by sputtered material, to a second position, in which the panels of the second shield allow at least a portion of the second target to be exposed for sputtering.

29. The apparatus of claim 28, wherein:

the first moveable shield further includes a drive sprocket mating with an outer surface of the first arcuate panel of the first shield and an inner surface of the second arcuate panel of the first shield such that rotation of the drive sprocket moves the first arcuate panel of the first shield with respect to the second arcuate panel of the first shield; and

the second moveable shield further includes a drive sprocket mating with an outer surface of the first arcuate panel of the second shield and an inner surface of the second arcuate panel of the second shield such that rotation of the drive sprocket of the second shield moves the first arcuate panel of the second shield with respect to the second arcuate panel of the second shield.

14. A method for deploying sputtering targets in a single sputtering chamber of a sputter coating apparatus, the method comprising:

removing a first portion of a lid from over an opening of the single sputtering chamber, while leaving a second portion of the lid in place over the opening, the first portion of the lid having a first pair of cylindrical sputtering targets mounted thereto, and the second portion of the lid having a second pair of cylindrical sputtering targets mounted thereto;

dismantling at least one of the first pair of cylindrical sputtering targets from the first portion of the lid;

mounting a replacement cylindrical sputtering target to the first portion of the lid of the chamber in place of each of the at least one of the first pair of cylindrical sputtering targets that was dismantled from the first portion of the lid; and

placing the first portion of the lid together with the second portion of the lid, which was left in place over the opening of the chamber, after mounting the at least one replacement cylindrical sputtering target thereto, to seal off the opening, such that the first pair of mounted cylindrical sputtering targets, including the at least one replacement cylindrical target, is spaced apart from the mounted second pair of cylindrical sputtering targets to allow a substrate, being conveyed through the chamber in a direction approximately parallel with the lid, to pass in between the first and second pairs of mounted cylindrical sputtering targets; and

wherein a longitudinal axis of each of the first pair of mounted cylindrical sputtering targets is aligned with a longitudinal axis of the corresponding target of the second pair of mounted cylindrical sputtering targets in order than both/opposing sides of the substrate can be simultaneously coated by the first and second pairs of mounted cylindrical sputtering targets when passing in between the mounted targets.

15. The method of claim 14, wherein placing the lid comprises lowering the lid over the opening, and wherein the at least one mounted first target is disposed above the at least one mounted second target within the chamber when the lid is placed.

16. The method of claim 14, further comprising:

activating the at least one mounted first target to deposit material on a surface of the substrate as the substrate passes between the mounted targets; and

shielding the at least one mounted second target against sputtering from the at least one first target.

17. The method of claim 16, wherein shielding the at least one mounted second target comprises actuating a moveable shield from outside the chamber.

18. The method of claim 14, wherein the at least one first target comprises a pair of first targets and the at least one second target comprises a pair of second targets, and further comprising:

activating one of the pair of first targets to deposit material on a first surface of the substrate as the substrate passes between the mounted targets;

shielding the other of the pair of first targets;

activating one of the pair of second targets to deposit material on a second surface of the substrate as the substrate passes between the mounted targets; and

shielding the other of the pair of second targets.

19. The method of claim 18, wherein:

shielding the other of the pair of first targets comprises actuating a first moveable shield from outside the chamber; and

shielding the other of the pair of second targets comprises actuating a second moveable shield from outside the chamber.

20. The method of claim 14, wherein, when the lid is placed over the opening, the at least one mounted first target is disposed above the substrate being conveyed through the chamber and the at least one mounted second target is disposed below the substrate being conveyed through the chamber.

21. The method of claim 14, wherein the first portion of the lid is separable from the second portion of the lid, and further comprising:

removing the first portion of the lid from the opening by separating the first portion from the second portion; and

dismantling at least one spent target from the first portion of the lid prior to mounting the at least one first target to the first portion of the lid.

22. The method of claim 14, wherein removing the first portion of the lid comprises raising the first portion and the spent target together, as an integral unit, away from the chamber.

23. The method of claim 14, wherein the second portion of the lid remains over the opening of the chamber while removing the first portion and dismantling the spent target.

24. The method of claim 14, wherein the at least one first target comprises a pair of first targets and the at least one second target comprises a pair of second targets, and further comprising:

electrically disconnecting electrodes of two targets of the pairs of first and second targets from at least one power supply, one of the two targets having been detected as being non-operational; and

electrically grounding the disconnected electrodes;

wherein disconnecting and grounding are accomplished after placing the lid and without removing the lid from over the opening.

25. The method of claim 24, further comprising:

electrically disconnecting an electrode of one of another two targets of the pairs of the first and second targets from a first power supply of the at least one power supply; and

electrically connecting the electrode of the one of the other two targets to a second power supply of the at least one power supply;

wherein an electrode of another of the other two targets is already connected to the second power supply; and

disconnecting and connecting the electrode of the one of the other two targets is accomplished after placing the lid and without removing the lid from the opening.