Microelectromechanical structure with enhanced rejection of acceleration noise
First Claim
1. A device, comprising:
- a substrate;
an anchor on the substrate;
a rigid coupling element coupled to the anchor;
a first pair of sensing masses coupled to the rigid coupling element along a first axis; and
a second pair of sensing masses coupled to the rigid coupling element along a second axis that is transverse to the first axis.
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Abstract
An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.
92 Citations
8 Claims
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1. A device, comprising:
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a substrate; an anchor on the substrate; a rigid coupling element coupled to the anchor; a first pair of sensing masses coupled to the rigid coupling element along a first axis; and a second pair of sensing masses coupled to the rigid coupling element along a second axis that is transverse to the first axis. - View Dependent Claims (2, 3, 4, 5)
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6. A device, comprising:
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a substrate; an anchor on the substrate; a first rigid coupling element coupled to the anchor; a first pair of sensing masses coupled to the first rigid coupling element along a first axis; a second pair of sensing masses coupled to the first rigid coupling element along a second axis that is transverse to the first axis; and a third pair of sensing masses coupled to the second pair of sensing masses. - View Dependent Claims (7, 8)
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Specification