Automatic defect detection and classification for high throughput electron channeling contrast imaging
First Claim
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1. A method for automatic detection and classification of crystalline defects of a crystalline material, said method comprising:
- obtaining a first image of a crystalline material utilizing electron channeling contrast imaging (ECCI) under a particular channeling condition;
altering the ECCI conditions to obtain a second image;
distinguishing crystalline defects from other features present in said second image;
tallying the number of said crystalline defects;
processing, using an algorithm, features of said crystalline defects in said second image to determine a defect fingerprint for each of said crystalline defects; and
classifying the defect type of each of said crystalline defects by comparing said defect fingerprint to a library containing images of defect fingerprints of known defect types.
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Abstract
Imaging and processing techniques are employed to identify crystalline defects obtained by ECCI from surrounding topography and is combined with defect counting and automatic classification.
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Citations
19 Claims
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1. A method for automatic detection and classification of crystalline defects of a crystalline material, said method comprising:
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obtaining a first image of a crystalline material utilizing electron channeling contrast imaging (ECCI) under a particular channeling condition; altering the ECCI conditions to obtain a second image; distinguishing crystalline defects from other features present in said second image; tallying the number of said crystalline defects; processing, using an algorithm, features of said crystalline defects in said second image to determine a defect fingerprint for each of said crystalline defects; and classifying the defect type of each of said crystalline defects by comparing said defect fingerprint to a library containing images of defect fingerprints of known defect types. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for automatic detection of crystalline defects of a crystalline material, said method comprising:
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providing a substrate containing a plurality of patterned structures comprising a crystalline material, wherein each of said patterned structure is misaligned relative to at least one type of crystalline defect present in each patterned structure; and obtaining an image of each patterned structure utilizing electron channeling contrast imaging (ECCI). - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification