Methods for perforating multi-layer graphene through ion bombardment
First Claim
Patent Images
1. A method comprising:
- providing a sheet of graphene-based material comprising multi-layer graphene having between about 10 and about 20 graphene layers;
exposing the sheet of graphene-based material comprising multi-layer graphene to a particle beam having an ion energy of at least about 1500 eV to produce a plurality of damage tracks in the multi-layer graphene, the damage tracks extending entirely through the basal planes of the multiple graphene sheets; and
exposing the sheet of graphene-based material comprising multi-layer graphene to a chemical etchant to remove carbon atoms from the graphene at the damage tracks and open a plurality of pores extending through the multiple graphene sheets.
1 Assignment
0 Petitions
Accused Products
Abstract
Multi-layer sheets of graphene-based material having a plurality of pores extending therethrough are described herein. Methods for making the sheets include exposing a graphene-based material comprising multilayer graphene having from 5 to 20 layers of graphene to a particle beam having an ion energy of at least about 1500 eV to create damage tracks in the graphene sheets. The damage tracks in the graphene sheets are then exposed to a chemical etchant, such as an oxidant to define pores through the stacked graphene sheets. Production of the damage tracks and etching of the damage tracks can take place while the graphene is disposed on a substrate.
-
Citations
16 Claims
-
1. A method comprising:
-
providing a sheet of graphene-based material comprising multi-layer graphene having between about 10 and about 20 graphene layers; exposing the sheet of graphene-based material comprising multi-layer graphene to a particle beam having an ion energy of at least about 1500 eV to produce a plurality of damage tracks in the multi-layer graphene, the damage tracks extending entirely through the basal planes of the multiple graphene sheets; and exposing the sheet of graphene-based material comprising multi-layer graphene to a chemical etchant to remove carbon atoms from the graphene at the damage tracks and open a plurality of pores extending through the multiple graphene sheets. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
- 11. A sheet of graphene-based material comprising multi-layer graphene having from 10 to 20 graphene layers and comprising a plurality of pores extending therethrough.
Specification