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Flow sensor

  • US 9,746,359 B2
  • Filed: 06/28/2013
  • Issued: 08/29/2017
  • Est. Priority Date: 06/28/2013
  • Status: Expired due to Fees
First Claim
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1. A flow sensor comprising:

  • a flow restriction disposed within a passage such that a fluid passing through the passage must pass through the flow restriction;

    an upstream pressure sensor coupled to the passage at a point upstream of the flow restriction and configured to measure and provide an upstream pressure of the fluid within the passage;

    a downstream pressure sensor coupled to the passage at a point downstream of the flow restriction and configured to measure and provide a downstream pressure of the fluid within the passage;

    pressure sensor electronics coupled to the upstream pressure sensor and the downstream pressure sensor and configured to determine a pressure drop measurement;

    a filter coupled to the passage upstream of the upstream pressure sensor;

    a temperature sensor coupled to the passage upstream of the filter and configured to measure and provide a temperature of the fluid within the passage;

    a package for housing the upstream pressure sensor, the downstream pressure sensor, the pressure sensor electronics, and the temperature sensor, wherein the upstream pressure sensor is connected to the passage through a first gas passage, the downstream pressure sensor is connected to the passage through a second gas passage, and the temperature sensor is connected to the passage through a feed-through connected to the passage upstream of the filter;

    a non-volatile memory configured to store compensation parameters which characterize flow resistance characteristics of the flow restriction, the compensation parameters comprising a pressure drop of at least one predetermined fluid characterized for the flow restriction; and

    a flow sensor processor coupled to the memory, the upstream and downstream pressure sensors and the temperature sensor and configured to accept measurements therefrom and calculate a compensated flow rate based at least in part on the measured pressures and temperature.

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