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Integrated gas sensor device, in particular for detecting carbon monoxide (CO)

  • US 9,746,439 B2
  • Filed: 06/27/2014
  • Issued: 08/29/2017
  • Est. Priority Date: 06/28/2013
  • Status: Active Grant
First Claim
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1. An integrated gas sensor device comprising:

  • a substrate having a first surface and a second surface and having one or more first through holes that extend between the first and second surfaces;

    an insulating layer on said first surface of said substrate, the insulating layer including a plurality of second through holes and a plurality of third through holes;

    a working electrode, a counter electrode and a reference electrode on said insulating layer, said working electrode and said counter electrode having active areas, respectively, that are exposed to an environment external to the device by the plurality of second through holes and the plurality of third through holes, respectively, and the one or more first through holes in the substrate;

    an electrolyte layer on the working electrode, the counter electrode and the reference electrode; and

    a hydrogel layer on said electrolyte layer, said electrolyte and hydrogel layers having a substantially same perimeter and covering at least said working, counter and reference electrodes, said hydrogel layer configured act as a water reservoir.

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