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Physical quantity sensor with multiple masses and displacement conversion mechanism

  • US 9,746,489 B2
  • Filed: 11/24/2014
  • Issued: 08/29/2017
  • Est. Priority Date: 11/25/2013
  • Status: Active Grant
First Claim
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1. A functional element comprising:

  • a driving portion;

    a first mass portion which is movable in a first direction and is driven by the driving portion;

    a first connection portion which is connected to the first mass portion at a first end and is extendable and contractible in the first direction along the length of the first connection portion;

    a second connection portion which is connected to a second end of the first connection portion and is formed in a second direction intersecting the first direction, the length of the second connection portion extending in the second direction; and

    a second mass portion which is connected to an end of the second connection portion,wherein the second mass portion can rotate with an axial center of the second connection portion as a rotational axis.

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