Coating liquid for forming metal oxide film, metal oxide film, field-effect transistor, and method for producing field-effect transistor
First Claim
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1. A coating liquid for farming a metal oxide film, comprising:
- an indium compound;
at least one selected from the group consisting of a calcium compound and a barium compound;
at least one selected from the group consisting of a first compound containing a metal with a maximum positive value of an oxidation number of IV, a second compound containing a metal with a maximum positive value of an oxidation number of V, and a third compound containing a metal with a maximum positive value of an oxidation number of VI; and
an organic solvent.
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Abstract
To provide a coating liquid for forming a metal oxide film, containing: an indium compound; at least one selected from the group consisting of a magnesium compound, a calcium compound, a strontium compound, and a barium compound; at least one selected from the group consisting of a compound containing a metal a maximum positive value of an oxidation number of which is IV, a compound containing a metal a maximum positive value of an oxidation number of which is V, and a compound containing a metal a maximum positive value of an oxidation number of which is VI; and an organic solvent.
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Citations
17 Claims
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1. A coating liquid for farming a metal oxide film, comprising:
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an indium compound; at least one selected from the group consisting of a calcium compound and a barium compound; at least one selected from the group consisting of a first compound containing a metal with a maximum positive value of an oxidation number of IV, a second compound containing a metal with a maximum positive value of an oxidation number of V, and a third compound containing a metal with a maximum positive value of an oxidation number of VI; and an organic solvent. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A coating liquid for forming a metal oxide film comprising:
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an indium compound; at least one selected from the group consisting of a magnesium compound, a calcium compound, a strontium compound, and a barium compound; at least one selected from the group consisting of a first compound containing a metal with a maximum positive value of an oxidation number of IV and a second compound containing a metal with a maximum positive value of an oxidation number of VI; and an organic solvent, wherein the first compound containing a metal with a maximum positive value of an oxidation number of IV is at least one selected from the group consisting of a zirconium compound and a hafnium compound. - View Dependent Claims (9)
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10. A coating liquid for forming a metal oxide film comprising:
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an indium compound; at least one selected from the group consisting of a magnesium compound, a calcium compound, a strontium compound, and a barium compound; at least one selected from the group consisting of a first compound containing a metal with a maximum positive value of an oxidation number of V, and a second compound containing a metal with a maximum positive value of an oxidation number of VI; and an organic solvent, wherein the first compound containing a metal with a maximum positive value of an oxidation number of V is at least one selected from the group consisting of a vanadium compound, a niobium compound, and an antimony compound. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification