Single motor dynamic calibration unit
First Claim
Patent Images
1. A calibration unit comprising:
- a test head configured to rotate about a rotation axis between a first stationary angular position and a second stationary angular position, the rotation axis extending at an angle relative to a known axis, the test head having a first position configured to receive a first device under test (DUT) comprising a first application specific integrated circuit (ASIC) and a second position configured to receive a second DUT comprising a second ASIC; and
a measurement unit electrically coupled to the first position and the second position, configured to measure a first output of the first DUT as the test head rotates between the first stationary angular position and the second stationary angular position, and configured to measure a second output of the first DUT at the second stationary angular position while the second DUT is loaded or unloaded onto the second position of the test head,wherein rotation of the test head about the rotation axis allows for excitation of at least three degrees of freedom of the first DUT, andwherein the measurement unit is configured to calibrate the first DUT by programming a calibration coefficient into the first ASIC.
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Accused Products
Abstract
A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.
6 Citations
25 Claims
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1. A calibration unit comprising:
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a test head configured to rotate about a rotation axis between a first stationary angular position and a second stationary angular position, the rotation axis extending at an angle relative to a known axis, the test head having a first position configured to receive a first device under test (DUT) comprising a first application specific integrated circuit (ASIC) and a second position configured to receive a second DUT comprising a second ASIC; and a measurement unit electrically coupled to the first position and the second position, configured to measure a first output of the first DUT as the test head rotates between the first stationary angular position and the second stationary angular position, and configured to measure a second output of the first DUT at the second stationary angular position while the second DUT is loaded or unloaded onto the second position of the test head, wherein rotation of the test head about the rotation axis allows for excitation of at least three degrees of freedom of the first DUT, and wherein the measurement unit is configured to calibrate the first DUT by programming a calibration coefficient into the first ASIC. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for configuring devices under test (DUTS), comprising:
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loading a first device under test (DUT) comprising a first application specific integrated circuit (ASIC) onto a test head at a loading position; rotating the test head around a single rotation axis to a first fixed position, wherein the single rotation axis is at an angle relative to a known axis; exciting the first DUT at the first fixed position; measuring a first output of the first DUT at the first fixed position; rotating the test head around the single rotation axis to a second fixed position; exciting the first DUT at the second fixed position; measuring a second output of the first DUT at the second fixed position; programming a calibration coefficient into the first ASIC while the first DUT is loaded on the test head; loading, substantially concurrently with measuring the second output of the first DUT at the second fixed position, a second DUT comprising a second ASIC onto the test head; and unloading the first DUT at an unloading position, wherein the exciting the first DUT at the first and second positions allows for excitation of at least three degrees of freedom of the first DUT. - View Dependent Claims (14, 15, 16, 17, 18, 19, 24, 25)
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20. A triaxis MEMS calibration system comprising:
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a calibration unit comprising; a test head configured to rotate about a rotation axis between a first stationary angular position and a second stationary angular position, the rotation axis extending at an angle relative to a known axis, the test head having a first position configured to receive a first device under test (DUT) comprising a first application specific integrated circuit (ASIC) and a second position configured to receive a second DUT comprising a second ASIC; and a measurement unit electrically coupled to the first position and a second position, configured to receive the first DUT, configured to measure a first output of the first DUT as the test head rotates between the first stationary angular position and the second stationary angular position, and configured to measure a second output of the first DUT at the second stationary angular position, wherein rotation of the test head about the rotation axis allows for excitation of at least three degrees of freedom of the first DUT, and wherein the measurement unit is configured to calibrate the first DUT by programming a calibration coefficient into the first ASIC; and a turret handler configured to place the first DUT onto the test head and in the first position prior to rotation of the test head, remove the first DUT from the test head and the first position after rotation, and place the second DUT onto the second position of the test head while the measurement unit measures the second output of the first DUT at the second stationary angular position. - View Dependent Claims (21, 22, 23)
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Specification