Reduced-complexity self-bearing brushless DC motor
First Claim
Patent Images
1. A method of commutating a motor comprising:
- operatively interfacing a stator and actuated component of the motor;
arranging at least two single circuit winding sets relative to the actuated component; and
independently controlling each of the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets, driving forces of the actuated component and centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component.
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Abstract
A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.
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Citations
54 Claims
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1. A method of commutating a motor comprising:
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operatively interfacing a stator and actuated component of the motor; arranging at least two single circuit winding sets relative to the actuated component; and independently controlling each of the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets, driving forces of the actuated component and centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. - View Dependent Claims (2, 3, 4)
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5. An apparatus for commutating a motor comprising:
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at least two single circuit winding sets arranged relative to an actuated component of the motor; and commutation circuitry operable to independently control each of the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. - View Dependent Claims (6, 7, 8)
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9. A motor comprising:
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a stator having at least two independently controlled single circuit winding sets; an actuated component operatively interfacing the stator; and a controller communicatively connected to the at least two single circuit winding sets for controlling each of the at least two single circuit winding sets so that the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, wherein the at least two single circuit winding sets are arranged relative to the actuated component and the controller is programmed to control the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, and wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. - View Dependent Claims (10, 11, 12)
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13. A substrate processing apparatus comprising:
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a motor including; a stator having at least two independently controlled single circuit winding sets; an actuated component operatively interfacing the stator; and a controller communicatively connected to each of the at least two single circuit winding sets for controlling the at least two single circuit winding sets so that the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, wherein the at least two single circuit winding sets are arranged relative to the actuated component and the controller is programmed to control the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets, the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, and wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. - View Dependent Claims (14, 15, 16)
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17. A method of commutating a motor comprising:
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calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and applying the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to independently torque and independently center a rotor of the motor so that the rotor is actively centered with more than one but no more than two single circuit motor winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit motor winding sets produce both the driving forces of the actuated component and the centering forces of the actuated component. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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24. A method of commutating a motor comprising:
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calculating an electrical angle offset to produce at least a one dimensional force in commutation equations for commutating the motor; and applying the electrical angle offset to an electrical angle in the commutation equations such that the electrical angle offset in combination with the electrical angle operate to independently torque and independently center a rotor of the motor so that the rotor is actively centered with more than one but no more than two single circuit motor winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit motor winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component. - View Dependent Claims (25, 26, 27, 28, 29)
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30. An apparatus for commutating a motor comprising:
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circuitry for calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and a current amplifier operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to cause the common set of commutation equations to independently produce torque and independently produce active centering forces using more than one but no more than two single circuit winding sets in motors with at least two winding sets and in motors with at least three winding sets, wherein each individual single circuit winding set of the more than but no more than two single circuit winding seta produces both the driving forces of the actuated component and the centering forces of the actuated component. - View Dependent Claims (31, 32, 33, 34, 35)
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36. A motor comprising:
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a rotor; and windings driven by a current amplifier, the current amplifier having; circuitry for calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and an amplifier operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to cause the common set of commutation equations to independently produce torque and independently produce active centering forces that are different from each other in the motor using more than one but no more than two single circuit winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component, and wherein the motor is at least one of a two winding set motor or a three winding set motor. - View Dependent Claims (37, 38, 39, 40, 41)
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42. A substrate processing apparatus comprising:
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a controller for commutating a motor including; circuitry for calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and a current amplifier operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to cause the common set of commutation equations to produce both independent torque and independent active centering forces that are different from each other in the motor using more than one but no more than two single circuit winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component, and wherein the motor is at least one of a two winding set motor or a three winding set motor. - View Dependent Claims (43, 44, 45, 46, 47)
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48. A substrate processing apparatus comprising:
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a motor including; a rotor; and windings driven by a current amplifier, the current amplifier having; circuitry for calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and an amplifier operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to cause the common set of commutation equations to independently produce torque and independently produce active centering forces that are different from each other in the motor using more than one but no more than two single circuit winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component, and wherein the motor is at least one of a two winding set motor or a three winding set motor. - View Dependent Claims (49, 50, 51, 52, 53)
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54. A method of commutating a motor comprising:
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operatively interfacing a stator and actuated component of the motor; arranging at least two single circuit winding sets relative to the actuated component; and independently controlling each of the at least two single circuit winding sets so that with a minimum of two of the at least two winding sets, driving forces of the actuated component and centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the minimum two winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component so that the actuated component is independently driven and independently centered by the minimum two single circuit winding sets.
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Specification