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Pressure sensing element comprising electrode including protrusion having elasticity

  • US 9,752,940 B2
  • Filed: 12/08/2015
  • Issued: 09/05/2017
  • Est. Priority Date: 12/22/2014
  • Status: Active Grant
First Claim
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1. A pressure sensing element comprising:

  • a first electrode including at least one protrusion having elasticity;

    a second electrode facing the at least one protrusion;

    a dielectric disposed between the first electrode and the second electrode and including a first dielectric and a second dielectric, anda spacer disposed between the first electrode and the second electrode;

    wherein the first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode without application of a load,the second dielectric is disposed between a first portion of the first electrode, the first portion not including the at least one protrusion, and the first dielectric, andthe spacer is disposed only on a peripheral portion of each of the first electrode and the second electrode, and the spacer directly contacts the first portion of the first electrode.

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