Pressure sensor and pressure sensing method

• US 9,752,941 B2
• Filed: 09/05/2013
• Issued: 09/05/2017
• Est. Priority Date: 09/05/2012
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd., Sungkyunkwan University Foundation For Corporate Collaboration (SungKyunKwan University)
• Original Assignee: Samsung Electronics Co. Ltd., Sungkyunkwan University Foundation For Corporate Collaboration (SungKyunKwan University)
• Inventors: Jeon, Sang-hun, Park, Jong-jin, Nguyen, Thanh Tien, Bae, Ji-hyun, Byun, Kyung-eun, Lee, Nae-eung, Kim, Do-il, Tran, Quang Trung
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): DAVIS HOLLINGTON, OCTAVIA L
• Application Number:
  US14/018,505
• Publication Number:
  US 20140060210A1
• Time in Patent Office: 1,461 Days
• Field of Search: 7386268
• CPC Class Codes: G01L 1/16 using properties of piezoelectric devices
• CPC Class Codes: H01L 29/84 controllable by variation of applied mechanical force, e.g. of pressure

Abstract

A pressure sensor and a pressure sensing method are provided. The pressure sensor includes a substrate; a sensor thin film transistor (TFT) disposed on the substrate and including a gate insulating layer, wherein the gate insulating layer includes an organic matrix in which piezoelectric inorganic nano-particles are dispersed; a power unit configured to apply an alternating current (AC) signal to a gate of the sensor TFT; and a pressure sensing unit configured to obtain a remnant polarization value based on a drain current which is generated in response to the AC signal and detected by the sensor TFT, and to sense a pressure based on the remnant polarization value.

Claims

1. A pressure sensor comprising:

a substrate;

a sensor thin film transistor (TFT) disposed on the substrate and comprising a gate insulating layer, wherein the gate insulating layer comprises an organic matrix in which piezoelectric inorganic nano-particles are dispersed;

a power unit configured to apply an alternating current (AC) signal to a gate of the sensor TFT; and

a pressure sensing unit configured to obtain a remnant polarization value based on a drain current which is generated in response to the AC signal and detected by the sensor TFT, and to sense pressure based on the remnant polarization value.

2. The pressure sensor of claim 1, wherein when an amplitude of the AC signal applied to the gate is V_G^amp, an amplitude of the drain current is I_D^amp, and an average drain current value is I_D^mean, the remnant polarization value is in proportion to a value of

3. The pressure sensor of claim 1, wherein the AC signal has a frequency ranging from about 0.001 Hz to about 1 GHz.

4. The pressure sensor of claim 1, wherein a voltage amplitude of the AC signal ranges from 0.01 V to 100 V.

5. The pressure sensor of claim 1, wherein the organic matrix comprises a piezoelectric organic material.

6. The pressure sensor of claim 5, wherein the piezoelectric organic material is selected from P(VDF-TrFE), P(VDF-TrFE-CFE), and P(VDF-TrFE-CtFE).

7. The pressure sensor of claim 5, wherein the organic matrix has a crystalline structure.

8. The pressure sensor of claim 5, wherein the piezoelectric inorganic nano-particles are selected from the group consisting of gallium orthophosphate (GaPO₄), langasite (La₃Ga₅SiO₁₄), a quartz analogic crystal, barium titanate (BaTiO₃), lead titanate (PbTiO₃), lead zirconate titanate (Pb[Zr_xTi_1-x]O₃ (0≦

x≦

1), potassium niobate (KNbO₃), lithium niobate (LiNbO₃), lithium tantalate (LiTaO₃), sodium tungstate (Na₂WO₃), zinc oxide (Zn₂O₃), Ba₂NaNb₅O₅, Pb₂KNb₅O₁₅, sodium potassium niobate ((K,Na)NbO₃), bismuth ferrite (BiFeO₃), sodium niobate (NaNbO₃), bismuth titanate (Bi₄Ti₃O₁₂), and sodium bismuth titanate (Na_0.5Bi_0.5TiO₃).

9. The pressure sensor of claim 1, further comprising a switching TFT that is electrically connected to the sensor TFT, wherein a sensor pixel structure of the pressure sensor comprises one switching TFT and one sensor TFT.

10. The pressure sensor of claim 1, wherein the organic matrix has a crystalline structure.

11. The pressure sensor of claim 10, wherein the organic matrix is formed to have the crystalline structure through an annealing process which implements a temperature of 120°

C. or higher.

12. The pressure sensor of claim 1, wherein the substrate is a flexible substrate, wherein the substrate is formed of a material including polyimide.

13. A pressure sensing method comprising:

applying an alternating current (AC) signal to a gate of a sensor thin film transistor (TFT) comprising a piezoelectric gate insulating layer;

detecting a drain current from the sensor TFT, the drain current being generated in response to the AC signal;

obtaining a remnant polarization value based on the drain current; and

sensing a pressure based on the remnant polarization value,

wherein when an amplitude of the AC signal applied to the gate is V_G^amp, an amplitude of the drain current is I_D^amp, and an average drain current value is I_D^mean, the remnant polarization value is in proportion to a value of

14. The pressure sensing method of claim 13, wherein the AC signal has a frequency from about 0.001 Hz to about 1 GHz.

15. The pressure sensing method of claim 13, wherein a voltage amplitude of the AC signal ranges from 0.01 V to 100 V.

16. The pressure sensing method of claim 13, wherein the piezoelectric gate insulating layer comprises an organic matrix, in which piezoelectric inorganic nano-particles are dispersed, wherein the organic matrix comprises a piezoelectric organic material.

17. The pressure sensing method of claim 16, wherein the piezoelectric organic material is selected from P(VDF-TrFE), P(VDF-TrFE-CFE), and P(VDF-TrFE-CtFE).

18. The pressure sensing method of claim 16, wherein the piezoelectric inorganic nano-particles are selected from the group consisting of gallium orthophosphate (GaPO₄), langasite (La₃Ga₅SiO₁₄), a quartz analogic crystal, barium titanate (BaTiO₃), lead titanate (PbTiO₃), lead zirconate titanate (Pb[Zr_xTi_1-x]O₃ (0≦

x≦

1), potassium niobate (KNbO₃), lithium niobate (LiNbO₃), lithium tantalate (LiTaO₃), sodium tungstate (Na₂WO₃), zinc oxide (Zn₂O₃), Ba₂NaNb₅O₅, Pb₂KNb₅O₁₅, sodium potassium niobate ((K,Na)NbO₃), bismuth ferrite (BiFeO₃), sodium niobate (NaNbO₃), bismuth titanate (Bi₄Ti₃O₁₂), and sodium bismuth titanate (Na_0.5Bi_0.5TiO₃).

19. A pressure sensor comprising:

a substrate comprised of a flexible material;

a sensor thin film transistor (TFT) disposed on the substrate and comprising a gate insulating layer, wherein the gate insulating layer comprises a combination of an organic material and an inorganic material; and

a pressure sensing unit configured to obtain a remnant polarization value based on a drain current detected by the sensor TFT, and to sense pressure based on the remnant polarization value,

wherein when an amplitude of an AC signal applied to a gate of the sensor TFT is V_G^amp, an amplitude of the drain current is I_D^amp, and an average drain current value is I_D^mean, the remnant polarization value is in proportion to a value of