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Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method

  • US 9,753,296 B2
  • Filed: 07/21/2015
  • Issued: 09/05/2017
  • Est. Priority Date: 07/28/2014
  • Status: Active Grant
First Claim
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1. An illumination system comprising:

  • a beam combiner having a first input path, a second input path and an output path,a first spatial light modulator configured to receive and spatially modulate first radiation in accordance with a first programmable pattern;

    a second spatial light modulator configured to receive and spatially modulate second radiation in accordance with a second programmable pattern; and

    a polarizing element configured to polarize both the first radiation and the second radiation in a single polarization direction for input into the first spatial light modulator and second spatial light modulator, respectively;

    wherein the beam combiner is configured to receive the spatially modulated first radiation via said first input path, to receive the spatially modulated second radiation via said second input path and to output spatially modulated combined radiation via said output path; and

    wherein the polarizing element, the spatial light modulators and the beam combiner are configured such that the combined radiation has a first polarized component in portions of the output path determined by the first programmable pattern and has a second polarized component in portions of the output path determined by the second programmable pattern.

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