Touch panel and method of manufacturing the same

• US 9,753,593 B2
• Filed: 06/22/2015
• Issued: 09/05/2017
• Est. Priority Date: 01/16/2015
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Jung, Sung-Ki, Kim, Jung-Hyun
• Primary Examiner(s): PARDO, THUY N
• Application Number:
  US14/746,060
• Publication Number:
  US 20160209949A1
• Time in Patent Office: 806 Days
• Field of Search: 345104, 345173, 345174
• CPC Class Codes: G03F 7/0035 Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
• CPC Class Codes: G03F 7/0043 Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof G03F7/0044 takes precedence
• CPC Class Codes: G06F 2203/04103 Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
• CPC Class Codes: G06F 3/0412 Digitisers structurally integrated in a display
• CPC Class Codes: G06F 3/042 by opto-electronic means
• CPC Class Codes: G06F 3/047 using sets of wires, e.g. crossed wires

Abstract

A touch panel for a display device and a method of manufacturing the same are disclosed. In one aspect, the method includes forming a photosensitive insulating layer over a substrate and forming a first conductive layer over the photosensitive insulating layer. The method also includes exposing the first conductive layer via a first mask including a pattern corresponding to a wiring electrode, removing the first mask, developing the exposed first conductive layer and forming the photosensitive insulating layer over the first conductive layer. The method further includes forming a second conductive layer and a carrier film over the photosensitive insulating layer and first exposing the second conductive layer via a second mask; removing the carrier film. The method also includes developing the exposed second conductive layer, and forming and drying the wiring electrode over the second conductive layer and the photosensitive insulating layer.

Claims

1. A method of manufacturing a touch panel for a display device, comprising:

forming a photosensitive insulating layer over a substrate;

forming a first conductive layer over the photosensitive insulating layer;

exposing the first conductive layer via a first mask including a pattern corresponding to a wiring electrode;

removing the first mask;

developing the exposed first conductive layer;

forming the photosensitive insulating layer over the first conductive layer;

forming a second conductive layer and a carrier film over the photosensitive insulating layer;

first exposing the second conductive layer via a second mask;

removing the carrier film;

applying a photoresist onto the second conductive layer;

second exposing the second conductive layer;

developing the exposed second conductive layer; and

forming and drying the wiring electrode over the second conductive layer and the photosensitive insulating layer, wherein each of the first and second conductive layers is formed of photosensitive silver nano wire (AgNW), and wherein the wiring electrode is electrically connected to the first conductive layer.

2. The method of claim 1, wherein, the photoresist is applied to a predetermined portion of the second conductive layer so as to form a via hole.

3. The method of claim 2, wherein, the forming and drying comprises electrically connecting the first conductive layer to the wiring electrode through the via hole.

4. The method of claim 1, wherein, the forming and drying comprises electrically connecting the wiring electrode to the second conductive layer.

5. The method of claim 1, further comprising exposing portions of the first conductive layer and the photosensitive insulating layer to the environment.

6. The method of claim 1, further comprising:

exposing portions of the first conductive layer and the photosensitive insulating layer to the environment; and

forming the wiring electrode to contact the exposed portions of the first conductive layer and the photosensitive insulating layer.

7. The method of claim 1, wherein the first conductive layer includes at least one first layer which is surrounded by the photosensitive insulating layer and at least one second layer which is at least partially exposed to the environment.

8. A touch panel for a display device, comprising:

a substrate;

a photosensitive insulating layer formed over the substrate;

a first conductive layer at least partially surrounded by the photosensitive insulating layer;

a second conductive layer formed over the photosensitive insulating layer; and

a wiring electrode formed over the second conductive layer and the photosensitive insulating layer, wherein each of the first and second conductive layers is formed of photosensitive silver nano wire (AgNW), and wherein the wiring electrode is electrically connected to the first conductive layer.

9. The touch panel of claim 8, wherein a via hole is formed in a portion of the photosensitive insulating layer, and wherein the wiring electrode is electrically connected to the first conductive layer through the via hole.

10. The touch panel of claim 8, wherein portions of the first conductive layer and the photosensitive insulating layer are exposed to the environment, and wherein the wiring electrode contacts the exposed portions of the first conductive layer and the photosensitive insulating layer.

11. The touch panel of claim 8, wherein the wiring electrode is formed of silver (Ag) or copper (Cu).

12. The touch panel of claim 8, wherein the first conductive layer includes at least one first layer which is surrounded by the photosensitive insulating layer and at least one second layer which is at least partially exposed to the environment.

13. The touch panel of claim 8, wherein the photosensitive insulating layer is configured to electrically insulate the first and second conductive layers.

14. The touch panel of claim 8, wherein the first conductive layer comprises a plurality of sub-conductive layers, and wherein a cross-section of at least one sub-conductive layer is completely surrounded by the photosensitive insulating layer.

15. A touch panel for a display device, comprising:

a substrate;

a photosensitive insulating layer formed over the substrate;

a first conductive layer including at least one first layer and at least one second layer;

a second conductive layer formed over the photosensitive insulating layer; and

a wiring electrode partially covering at least one of the first and second conductive layers and the photosensitive insulating layer, wherein the at least one first layer is surrounded by the photosensitive insulating layer, wherein the at least one second layer contacts the wiring electrode, wherein each of the first and second conductive layers is formed of photosensitive silver nano wire (AgNW), and wherein the wiring electrode is electrically connected to the first conductive layer.

16. The touch panel of claim 15, wherein a via hole is formed in a portion of the photosensitive insulating layer, and wherein the wiring electrode is electrically connected to the first conductive layer through the via hole.

17. The touch panel of claim 15, wherein portions of the first conductive layer and the photosensitive insulating layer are exposed to the environment via openings of the wiring electrode.

18. The touch panel of claim 15, wherein the second layer is at least partially exposed to the environment by an opening defined by the wiring electrode and the photosensitive insulating layer.

19. The touch panel of claim 15, wherein the at least one first layer and the at least one second layer have substantially the same width.