High speed high voltage switching circuit

• US 9,755,641 B1
• Filed: 01/12/2015
• Issued: 09/05/2017
• Est. Priority Date: 01/10/2014
• Status: Active Grant

• Current Assignee: ASM America Incorporated (ASM International NV)
• Original Assignee: Reno Technologies Inc.
• Inventors: Bhutta, Imran Ahmed
• Primary Examiner(s): Hiltunen, Thomas J
• Application Number:
  US14/594,275
• Time in Patent Office: 967 Days
• CPC Class Codes: H03K 17/04163 in field-effect transistor switches
• CPC Class Codes: H03K 17/08 Modifications for protecting switching circuit against overcurrent or overvoltage
• CPC Class Codes: H03K 17/081 without feedback from the output circuit to the control circuit
• CPC Class Codes: H03K 17/08116 in composite switches H03K17/0812, H03K17/0814 take precedence
• CPC Class Codes: H03K 17/12 Modifications for increasing the maximum permissible switched current
• CPC Class Codes: H03K 19/017518 using a combination of bipolar and field effect transistors [BIFET]
• CPC Class Codes: H03K 19/017536 using opto-electronic devices
• CPC Class Codes: H03K 19/017572 using opto-electronic devices

Abstract

A control circuit for an electronic switch includes a first power switch receiving a common input signal and a first voltage input and a second power switch receiving the common input signal and a second voltage input. The first and second power switches switchably connect the first voltage input and the second voltage input, respectively, to a common output in response to the common input signal. The second voltage input is opposite in polarity to the first voltage input, and the first power switch and the second power switch are configured to asynchronously connect the first voltage input and the second voltage input, respectively, to the common output in response to the common input signal, the electronic switch being switched according to the first voltage input or the second voltage input being connected to the common output.

Claims

1. A circuit for switching a diode, the circuit comprising:

a diode, the diode being a PiN diode or an NiP diode;

a first power switch receiving a common input signal and a first voltage and configured to switchably provide the first voltage to a common output in response to the common input signal, the first power switch comprising a plurality of optocoupler phototransistors connected in series;

a second power switch receiving the common input signal and a second voltage and configured to switchably connect the second voltage to the common output in response to the common input signal, wherein;

the second voltage is opposite in polarity to the first voltage;

the first power switch and the second power switch are configured to asynchronously provide the first voltage and the second voltage, respectively, to the common output in response to the common input signal, the diode being switched according to the first voltage or the second voltage being connected to the common output; and

when the plurality of optocoupler phototransistors of the first power switch are switched off, a voltage drop from the first voltage to the second voltage occurs across the plurality of optocoupler phototransistors.

2. The circuit of claim 1, wherein the first voltage differs from the second voltage by at least two orders of magnitude.

3. The circuit of claim 1, wherein the first voltage is greater than 500 volts.

4. The circuit of claim 1, wherein the first voltage differs from the second voltage by at least three of magnitude.

5. The circuit of claim 1, wherein the first power switch electrically isolates the common input signal from the first voltage.

6. The circuit of claim 1, wherein the common input signal is a 5 volt control signal.

7. The circuit of claim 1, wherein the first power switch and the second power switch, in combination, are configured to switch between the first voltage and the second voltage on the common output in about 15 μ

sec or less.

8. A circuit for switching a diode, the circuit comprising:

a diode;

a first power switch receiving a common input signal and a first voltage and configured to switchably provide the first voltage to a common output in response to the common input signal, the first power switch comprising a plurality of optocoupler phototransistors connected in series;

a second power switch receiving the common input signal and a second voltage and configured to switchably connect the second voltage to the common output in response to the common input signal, wherein;

the first power switch and the second power switch are configured to asynchronously provide the first voltage and the second voltage, respectively, to the common output in response to the common input signal, the diode being switched according to the first voltage or the second voltage being connected to the common output; and

when the plurality of optocoupler phototransistors of the first power switch are switched off, a voltage drop from the first voltage to the second voltage occurs across the plurality of optocoupler phototransistors.

9. The circuit of claim 8, wherein the first voltage is greater than 1000 volts.

10. The circuit of claim 8, wherein the first voltage differs from the second voltage by at least two orders of magnitude.

11. The circuit of claim 8, wherein the first power switch electrically isolates the common input signal from the first voltage.

12. The circuit of claim 8, wherein the common input signal is a 5 volt control signal.

13. The circuit of claim 8, wherein the first power switch and the second power switch, in combination, are configured to switch between the first voltage and the second voltage on the common output in about 15 μ

sec or less.

14. A method of switching a diode, the method comprising:

providing a first voltage to a first power switch, the first power switch comprising a plurality of optocoupler phototransistors connected in series;

providing a second voltage to a second power switch;

providing a common input signal to the first power switch and to the second power switch; and

controlling the first power switch and the second power switch with the common input signal, wherein the first power switch provides the first voltage to a common output in response to the common input signal, and the second power switch asynchronously provides, with respect to the first voltage, the second voltage to the common output in response to the common input signal, and wherein the diode, which is electronically coupled to the common output, is switched according to the first voltage or the second voltage being provided to the common output;

wherein when the plurality of optocoupler phototransistors of the first power switch are switched off, a voltage drop from the first voltage to the second voltage occurs across the plurality of optocoupler phototransistors.

15. The method of claim 14, wherein the second voltage is opposite in polarity to the first voltage.

16. The method of claim 15, wherein the first voltage is greater than 500 volts.

17. The method of claim 14, wherein the first voltage differs from the second voltage by at least two orders of magnitude.

18. The method of claim 14, wherein the first voltage differs from the second voltage by at least three orders of magnitude.

19. The method of claim 14, wherein the first power switch electrically isolates the common input signal from the first voltage.

20. The method of claim 14, wherein the common input signal is a 5 volt control signal.

21. The method of claim 14, wherein the first power switch and the second power switch, in combination, are configured to switch between the first voltage and the second voltage on the common output in about 15 μ

sec or less.