Apparatus and method for reactive ion etching

• US 9,761,458 B2
• Filed: 02/25/2011
• Issued: 09/12/2017
• Est. Priority Date: 02/26/2010
• Status: Active Grant

• Current Assignee: Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno
• Original Assignee: Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno
• Inventors: Roozeboom, Freddy, Lankhorst, Adriaan Marinus, Poodt, Paulus Willibrordus George, Koster, Norbertus Benedictus, Winands, Gerardus Johan Jozef, Vermeer, Adrianus Johannes Petrus Maria
• Primary Examiner(s): Wanga, Timon
• Application Number:
  US13/581,093
• Publication Number:
  US 20130118895A1
• Time in Patent Office: 2,391 Days
• Field of Search: None
• CPC Class Codes: C23C 16/0245 by etching with a plasma
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]
• CPC Class Codes: H01J 2237/3341 Reactive etching
• CPC Class Codes: H01J 37/32366 Localised processing
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/32706 Polarising the substrate
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/30655 comprising alternated and repeated etching and passivation steps, e.g. Bosch process
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like

Abstract

The invention relates to an apparatus for reactive ion etching of a substrate, comprising: a plasma etch zone including an etch gas supply and arranged with a plasma generating structure for igniting a plasma and comprising an electrode structure arranged to accelerate the etch plasma toward a substrate portion to have ions impinge on the surface of the substrate; a passivation zone including a cavity provided with a passivation gas supply; said supply arranged for providing a passivation gas flow from the supply to the cavity; the cavity in use being bounded by the injector head and the substrate surface; and a gas purge structure comprising a gas exhaust arranged between said etch zone and passivation zone; the gas purge structure thus forming a spatial division of the etch and passivation zones.

Claims

1. Apparatus for reactive ion etching of a substrate, comprising:

an injector head comprising

a plasma etch zone including an etch cavity having an etch cavity height H_e to a substrate surface, the etch cavity being provided with an etch gas supply and arranged with a plasma generating structure for igniting a plasma and further comprising an electrode structure arranged to accelerate the etch plasma toward a first substrate portion to have ions impinge on the surface of the substrate;

a passivation zone including a passivation cavity having a passivation cavity height H_p to a substrate surface, the passivation cavity being provided with a passivation gas supply;

said supply arranged for providing a passivation gas flow from the supply to the passivation cavity;

the passivation cavity in use being bounded by the injector head and the substrate surface; and

a gas purge structure comprising a gas exhaust arranged between said etch zone and passivation zone;

the gas purge structure thus forming a spatial division between each of the etch and passivation zones;

wherein said apparatus comprises cavity walls, and wherein said plasma etch zone and said passivation zone are confined by gas bearings at outer perimeters thereof,

the apparatus further comprising a bearing gas injector arranged for providing one or more of the gas bearings, wherein the bearing gas injector is arranged in a bearing face part facing the substrate, the bearing face part defining a gap distance H_g to the substrate, which is smaller than the etch cavity height H_e and the passivation cavity height H_p; and

a pressure controller cooperating with the bearing gas injector for controlling the pressure of the gas bearings, the pressure controller being configured to independently control a first pressure in said etch cavity and a second pressure in said passivation cavity.

2. Apparatus according to claim 1, further comprising a gas bearing structure comprising the bearing gas injector, wherein the bearing gas injector is arranged for injecting a bearing gas between the injector head and the substrate surface.

3. Apparatus according to claim 2, wherein the bearing gas injector comprises a flow restriction defining the gas bearing'"'"'s mechanical stiffness.

4. Apparatus according to claim 2, wherein the gas bearing is formed, seen in a direction normal to the substrate surface as undulated shapes to prevent first order bending modes of the sheet substrate.

5. Apparatus according to claim 1, wherein the etch cavity height H_e is larger than the passivation cavity height H_p.

6. Apparatus according to claim 1, wherein the passivation zone comprises a multiple of supplies, at least one supply arranged for supplying a precursor gas in an atomic layer deposition process step;

and a further supply provided with a reactant supply, the further supply in use being bounded by a flow barrier.

7. Apparatus according to claim 6, wherein the at least one supply is provided in a respective further cavity including a drain confining the further cavity.

8. Apparatus according to claim 2, further comprising a support part arranged opposite the injector head for supporting a substrate to be held by said gas bearing structure;

the support part comprising an electrode for directing the etch plasma towards the substrate.

9. Apparatus according to claim 1, wherein the injector head is movable towards and away from the conveying plane.

10. Apparatus according to claim 1, further comprising a temperature control, arranged to keep the cavity temperature of the passivation cavity in a range between −

20°

C. to +75°

C.

11. Method for reactive ion etching on a surface of a substrate, the method comprising using the apparatus of claim 1 to perform time-cycled steps of:

a) placing the plasma etch zone above the first substrate portion, having a sub portions sensitive to the etch plasma;

b) supplying the etch plasma and accelerating the etch plasma by the electrode structure toward the first substrate portion to have ions impinge on the surface of the substrate for etching the sub portions;

c) moving the injector head relative to the substrate, to position the passivation zone above the first substrate portion; and

d) supplying a passivation layer on the substrate portion, by providing the passivation gas in the cavity from the passivation gas supply.

12. Method according to claim 11, the passivation zone comprises a multiple of supplies, said supplying of the passivation layer provided in an atomic layer deposition process step by supplying a precursor gas in a first cavity;

and a reactant supply is provided in further cavity provided with a reactant supply, the further cavity in use being bounded by a flow barrier.

13. Method according to claim 11 further comprising placing the injector head in gas bearing contact with the substrate by a gas bearing structure.

14. Method according to claim 11 further comprising controlling the cavity temperature in a range between −

20 C to +75°

C.

15. The apparatus of claim 1, wherein the electrode structure is configured to accelerate the etch plasma toward the first substrate portion in the plasma etch zone, and wherein the passivation gas supply is configured to provide the passivation gas flow simultaneously to a second substrate portion of the substrate.

16. Apparatus according to claim 1, wherein the pressure controller is configured for controlling the first pressure and the second pressure such that the second pressure is higher than the first pressure.