CMOS-MEMS integration by sequential bonding method

• US 9,761,557 B2
• Filed: 04/27/2015
• Issued: 09/12/2017
• Est. Priority Date: 04/28/2014
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Shin, Jong Il, Smeys, Peter, Shin, Jongwoo
• Primary Examiner(s): Crawford, Latanya N
• Application Number:
  US14/696,994
• Publication Number:
  US 20150311178A1
• Time in Patent Office: 869 Days
• CPC Class Codes: B81B 2207/012 the micromechanical device and the control or processing electronics being separate parts in the same package
• CPC Class Codes: B81C 1/00238 Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure
• CPC Class Codes: B81C 2203/019 characterised by the material or arrangement of seals between parts
• CPC Class Codes: B81C 2203/035 Soldering
• CPC Class Codes: B81C 2203/0792 Forming interconnections between the electronic processing unit and the micromechanical structure
• CPC Class Codes: H01L 2224/83065 being reducing
• CPC Class Codes: H01L 2224/83805 involving forming a eutectic alloy at the bonding interface
• CPC Class Codes: H01L 2224/83951 Forming additional members, e.g. for reinforcing, fillet sealant
• CPC Class Codes: H01L 24/83 using a layer connector

Abstract

Methods for bonding two wafers are disclosed. In one aspect, a first wafer includes an integrated circuit and the second wafer including a MEMS device. The method comprises depositing a bond pad on a metal on the first wafer and sequentially bonding the first wafer to the second wafer utilizing first and second temperatures. The second wafer is bonded to the bond pad at the first temperature and the bond pad and the metal are bonded at the second temperature. In another aspect, a first wafer including an integrated circuit, the second wafer includes a MEMS device. The method comprises depositing a bond pad on a metal on one of the first wafer and the second wafer and bonding the first wafer to the second wafer at a first temperature via a direct bond interface. The method includes bonding the bond pad to the metal at a second temperature.

Claims

1. A method for bonding a first wafer and a second wafer, comprising:

depositing a bond pad on a metal on the first wafer, the first surface of the bond pad in contact with the metal, the first wafer including an integrated circuit, and the second wafer including a MEMS device, wherein the bond pad comprises a germanium bond pad and the metal comprises aluminum;

positioning the second wafer in direct contact with a second surface of the bond pad opposite the first surface; and

sequentially bonding the first wafer to the second wafer utilizing first and second temperatures, wherein the second wafer is bonded to the bond pad at the first temperature and wherein the bond pad and the metal are bonded at the second temperature, wherein the bond between the germanium bond pad and the aluminum comprises a eutectic bond, and wherein a high temperature appealing of the second wafer is provided in a hydrogen environment before the second bonding step.

2. The method of claim 1, wherein the sequential bonding step comprises:

bonding the bond pad and the second wafer at a temperature not to exceed 300°

C.; and

bonding the bond pad and the metal to form a eutectic bond at a temperature greater than 420°

C.

3. The method of claim 1, wherein the first temperature is less than the second temperature.

4. The method of claim 1, wherein the first temperature is less than 400°

C. and the second temperature is greater than 400°

C.

5. The method of claim 1, wherein the eutectic bond provides a hermetic seal.

6. The method of claim 1, wherein the second wafer includes a device layer and a handle layer.

7. The method of claim 6, wherein the handle layer includes at least one standoff formed thereon.

8. The method of claim 7, wherein at least one standoff is bonded to the bond pad via bonding the bond pad and the second wafer.

9. The method of claim 1, wherein the second wafer comprise an engineered silicon-on-insulator (ESOI).

10. A method for bonding a first wafer and a second wafer, comprising:

depositing a bond pad on a metal on one of the first wafer and the second wafer, the first wafer including an integrated circuit, the second wafer including a MEMS device, wherein the bond pad comprises a germanium bond pad and the metal comprises aluminum;

bonding the first wafer to the second wafer at a first temperature via a direct bond interface; and

bonding the bond pad to the metal at a second temperature, wherein the bond between the germanium bond pad and the aluminum comprises a eutectic bond, and wherein a high temperature annealing of the second wafer is provided in a hydrogen environment before the second bonding step.

11. The method of claim 10, wherein the first temperature is less than the second temperature.

12. The method of claim 10, wherein the first temperature is less than 400°

C. and the second temperature is greater than 400°

C.

13. The method of claim 10, wherein the eutectic bond provides a hermetic seal.

14. The method of claim 10, wherein bonding to the direct bond interface requires surface treatment before bonding.

15. The method of claim 10, wherein an electrical connection is provided through the bonding the bond pad to the metal step.

16. The method of claim 10, wherein the bond pad is etched before bond pad formation.