System and method for manufacturing photovoltaic structures with a metal seed layer

• US 9,761,744 B2
• Filed: 10/22/2015
• Issued: 09/12/2017
• Est. Priority Date: 10/22/2015
• Status: Active Grant

• Current Assignee: Tesla Inc.
• Original Assignee: Tesla Inc.
• Inventors: Wang, Wei
• Primary Examiner(s): Everhart, Caridad
• Application Number:
  US14/920,776
• Publication Number:
  US 20170117423A1
• Time in Patent Office: 691 Days
• Field of Search: 136253
• CPC Class Codes: C23C 14/34 Sputtering
• CPC Class Codes: C23C 14/50 Substrate holders
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 7/126 for solar cells
• CPC Class Codes: H01L 21/67 Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere processes per se H01L21/30, H01L21/46, H01L23/00; simple temporary support means, e.g. using adhesives, electric or magnetic means H01L21/68, H01L21/302; apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto H01L24/74;
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/022466 made of transparent conductive layers, e.g. TCO, ITO layers
• CPC Class Codes: H01L 31/0747 comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
• CPC Class Codes: H01L 31/075 the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
• CPC Class Codes: H01L 31/1864 Annealing
• CPC Class Codes: H01L 31/1884 Manufacture of transparent electrodes, e.g. TCO, ITO
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy
• CPC Class Codes: Y02E 10/548 Amorphous silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

One embodiment of the present invention can provide a system for fabrication of a photovoltaic structure. The system can include a physical vapor deposition tool configured to sequentially deposit a transparent conductive oxide layer and a metallic layer on an emitter layer formed in a first surface of a Si substrate, without requiring the Si substrate to be removed from the physical vapor deposition tool after depositing the transparent conductive oxide layer. The system can further include an electroplating tool configured to plate a metallic grid on the metallic layer and a thermal annealing tool configured to anneal the transparent conductive oxide layer.

Claims

1. A method for fabricating a photovoltaic structure, the method comprising:

obtaining a Si substrate;

forming an emitter layer on a first surface of the Si substrate;

depositing, using a physical vapor deposition machine, a transparent conductive oxide layer on the emitter layer;

depositing, without removing the Si substrate from the physical vapor deposition machine and without first annealing the deposited transparent conductive oxide layer, a metallic layer on the transparent conductive oxide layer; and

annealing the transparent conductive oxide layer after depositing the metallic layer.

2. The method of claim 1, further comprising:

before the annealing, depositing, using a plating technique, a metallic grid on the metallic layer, and wherein the annealing process simultaneously anneals the transparent conductive oxide layer and the plated metallic grid.

3. The method of claim 1, further comprising:

forming a surface-field layer on a second surface of the Si substrate;

depositing, using the physical vapor deposition machine, a second transparent conductive oxide layer on the surface-field layer;

depositing, without removing the substrate from the physical vapor deposition machine, a second metallic layer on the second transparent conductive oxide layer; and

depositing, using a plating technique, a second metallic grid on the second metallic seed layer.

4. The method of claim 1, wherein depositing the transparent conductive oxide layer or the metallic layer comprises sputtering, evaporation, or both.

5. The method of claim 1, wherein the metallic layer includes:

Cu, Ni, Ag, Ti, Ta, W, TiN, TaN, WN, TiW, NiCr, or any combination thereof.

6. The method of claim 1, wherein the transparent conductive oxide layer includes:

indium-tin-oxide (ITO), aluminum-doped zinc-oxide (ZnO;

Al), gallium-doped zinc-oxide (ZnO;

Ga), tungsten-doped indium oxide (IWO), Zn—

In—

Sn—

O (ZITO), or any combination thereof.

7. The method of claim 1, wherein depositing the transparent conductive oxide layer is performed at a temperature lower than 100°

C.

8. The method of claim 1, wherein annealing the transparent conductive oxide layer involves subjecting the photovoltaic structure to a temperature ranging from 150°

C. to 400°

C.

9. The method of claim 8, wherein annealing the transparent conductive oxide layer comprises subjecting the photovoltaic structure to the temperature for a time period ranging from 5 seconds to 5 minutes.

10. The method of claim 8, wherein the annealing is performed in:

air;

vacuum;

forming gas;

or

inert gases.

11. A system for fabrication of a photovoltaic structure, the system comprising:

a physical vapor deposition tool configured to sequentially deposit a transparent conductive oxide layer and a metallic layer on an emitter layer formed on a first surface of a Si substrate, without requiring the Si substrate to be removed from the physical vapor deposition tool after depositing the transparent conductive oxide layer and without first annealing the deposited transparent conductive oxide layer;

an electroplating tool configured to plate a metallic grid on the metallic layer; and

a thermal annealing tool configured to anneal the transparent conductive oxide layer.

12. The system of claim 11, wherein the electroplating tool is configured to plate a metallic grid before the thermal annealing tool annealing the transparent conductive oxide layer, and wherein the thermal annealing tool is configured to simultaneously anneal the plated metallic grid and the transparent conductive oxide layer.

13. The system of claim 11,

wherein the physical vapor deposition tool is further configured to sequentially deposit a second transparent conductive oxide layer and a second metallic layer on a surface-field layer formed on a second surface of the Si substrate, without requiring the Si substrate to be removed from the physical vapor deposition tool after depositing the second transparent conductive oxide layer;

and

wherein the electroplating tool is further configured to deposit a second metallic grid on the second metallic seed layer.

14. The system of claim 11, wherein the physical vapor deposition tool is configured to perform sputtering, evaporation, or both.

15. The system of claim 11, wherein the metallic layer includes:

Cu, Ni, Ag, Ti, Ta, W, TiN, TaN, WN, TiW, NiCr, or any combination thereof.

16. The system of claim 11, wherein the transparent conductive oxide layer includes:

indium-tin-oxide (ITO), aluminum-doped zinc-oxide (ZnO;

Al), gallium-doped zinc-oxide (ZnO;

Ga), tungsten-doped indium oxide (IWO), Zn—

in—

Sn—

O (ZITO), or any combination thereof.

17. The system of claim 11, wherein the thermal annealing tool is configured to subject the photovoltaic structure to a temperature ranging from 150°

C. to 400°

C.

18. The system of claim 17, wherein the thermal annealing tool is configured to subject the photovoltaic structure to the temperature for a time period ranging from 5 seconds to 5 minutes.

19. The system of claim 18, wherein the thermal annealing tool is configured to anneal the transparent conductive oxide layer in:

air;

vacuum;

forming gas;

or

inert gases.

20. The system of claim 18, wherein the physical vapor deposition tool is configured to deposit the transparent conductive oxide layer at a temperature lower than 100°

C.