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Controlling the uniformity of PECVD deposition

  • US 9,764,093 B2
  • Filed: 11/20/2013
  • Issued: 09/19/2017
  • Est. Priority Date: 11/30/2012
  • Status: Active Grant
First Claim
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1. A method of plasma modifying a syringe barrel or cartridge barrel having a surface to be treated, the method comprising:

  • providing plasma in or near the surface under conditions effective for plasma modification of the surface of the syringe barrel or cartridge barrel further comprising generating the plasma by providing an outer electrode outside the barrel and an inner electrode at least partially inside the lumen of the barrel and energizing the electrodes using radiofrequency energy; and

    at least part of the time while providing plasma, providing a magnetic field in or near the plasma, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the syringe barrel or cartridge barrel, in which the uniformity of plasma modification is expressed as a ratio of;

    one standard deviation of coating thickness/mean coating thickness and the ratio is from 0.5 to 0.2.

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