Controlling the uniformity of PECVD deposition
First Claim
1. A method of plasma modifying a syringe barrel or cartridge barrel having a surface to be treated, the method comprising:
- providing plasma in or near the surface under conditions effective for plasma modification of the surface of the syringe barrel or cartridge barrel further comprising generating the plasma by providing an outer electrode outside the barrel and an inner electrode at least partially inside the lumen of the barrel and energizing the electrodes using radiofrequency energy; and
at least part of the time while providing plasma, providing a magnetic field in or near the plasma, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the syringe barrel or cartridge barrel, in which the uniformity of plasma modification is expressed as a ratio of;
one standard deviation of coating thickness/mean coating thickness and the ratio is from 0.5 to 0.2.
7 Assignments
0 Petitions
Accused Products
Abstract
A method and apparatus for plasma modifying a workpiece such as a syringe barrel, cartridge barrel, vial, or blood tube is described. Plasma is provided within the lumen of the workpiece. The plasma is provided under conditions effective for plasma modification of a surface of the workpiece. A magnetic field is provided in at least a portion of the lumen. The magnetic field has an orientation and field strength effective to improve the uniformity of plasma modification of the interior surface of the generally cylindrical wall. A vessel made according to the process or using the apparatus described above. A pharmaceutical package comprising the syringe barrel or vial containing a pharmaceutical preparation, secured with a closure.
948 Citations
24 Claims
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1. A method of plasma modifying a syringe barrel or cartridge barrel having a surface to be treated, the method comprising:
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providing plasma in or near the surface under conditions effective for plasma modification of the surface of the syringe barrel or cartridge barrel further comprising generating the plasma by providing an outer electrode outside the barrel and an inner electrode at least partially inside the lumen of the barrel and energizing the electrodes using radiofrequency energy; and at least part of the time while providing plasma, providing a magnetic field in or near the plasma, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the syringe barrel or cartridge barrel, in which the uniformity of plasma modification is expressed as a ratio of;
one standard deviation of coating thickness/mean coating thickness and the ratio is from 0.5 to 0.2. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 12, 13, 15, 16, 17, 18, 19, 20, 21, 22, 24)
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10. A method of plasma modifying a syringe barrel or cartridge barrel having a surface to be treated, the method comprising:
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providing plasma in or near the surface under conditions effective for plasma modification of the surface of the syringe barrel or cartridge barrel; and at least part of the time while providing plasma, providing a magnetic field in or near the plasma by providing at least one magnetic field generator near the surface, each magnetic field generator having a north pole and a south pole defining a polar axis, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the syringe barrel or cartridge barrel, in which the uniformity of plasma modification is expressed as a ratio of; one standard deviation of coating thickness/mean coating thickness and the ratio is from 0.5 to 0.2 in which at least part of the time while providing the magnetic field, an even number of at least four magnetic field generators are arranged about the axis to provide a quadrupole or analogous structure between axially spaced ends, and at least part of the time while providing the magnetic field, at least one magnetic field generator has its polar axis generally parallel to the axis of the surface. - View Dependent Claims (11)
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14. A method of plasma modifying a syringe barrel or cartridge barrel having a surface to be treated, the method comprising:
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providing plasma in or near the surface under conditions effective for plasma modification via plasma enhanced chemical vapor deposition (PECVD) of the surface of the syringe barrel or cartridge barrel; and at least part of the time while providing plasma, providing a magnetic field in or near the plasma, the magnetic field having a position, orientation, and field strength effective to improve the uniformity, density, or both of plasma modification of the surface of the syringe barrel or cartridge barrel, in which the uniformity of plasma modification is expressed as a ratio of;
one standard deviation of coating thickness/mean coating thickness and the ratio is from 0.5 to 0.2;wherein the plasma is generated by providing an outer electrode outside the barrel and an inner electrode at least partially inside the lumen of the barrel and the inner electrode comprises a material supply tube having a generally cylindrical wall disposed within the lumen for providing gaseous material to the lumen; and wherein the plasma process conditions are controlled such that the distance between the inlet tube and the wall of the syringe barrel or other part undergoing PECVD is at least 2 times as great as the Debye Length. - View Dependent Claims (23)
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Specification