Stress-tuned planar lightwave circuit and method therefor

• US 9,764,352 B2
• Filed: 12/23/2015
• Issued: 09/19/2017
• Est. Priority Date: 10/11/2012
• Status: Active Grant

• Current Assignee: OctroliX B.V.
• Original Assignee: OctroliX B.V.
• Inventors: Heideman, Rene Gerrit, Leinse, Arne
• Primary Examiner(s): KIM, ELLEN E
• Application Number:
  US14/998,174
• Publication Number:
  US 20160202502A1
• Time in Patent Office: 636 Days
• Field of Search: 385 14, 385 39, 385 45, 385 31, 385 3, 385 2, 385 8, 427 58, 427162
• CPC Class Codes: B05D 1/36 Successively applying liquids or other fluent materials, e.g. without intermediate treatment
• CPC Class Codes: B05D 5/06 to obtain multicolour or other optical effects B05D5/02 takes precedence
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/132 by deposition of thin films
• CPC Class Codes: G02B 6/14 Mode converters
• CPC Class Codes: G02B 6/305 and having an integrated mode-size expanding section, e.g. tapered waveguide
• CPC Class Codes: G02F 1/00 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
• CPC Class Codes: G02F 1/0134 in optical waveguides
• CPC Class Codes: G02F 1/0136 for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation G02F1/0353 takes precedence
• CPC Class Codes: G02F 1/225 in an optical waveguide structure

Abstract

A planar lightwave circuit that can be optically coupled with an external device with low optical loss, while also providing low-power functional control over an optical signal propagating through the PLC is disclosed. The PLC includes a high-contrast waveguide region in a stress-inducing (SI) phase shifter is formed such that it can control the phase of the optical signal. The high-contrast-waveguide region is optically coupled to a low-contrast-waveguide region via a spotsize converter, thereby enabling optical coupling to off-chip devices with low optical loss. Formation of the SI phase shifter in a high-contrast-waveguide region enables improved responsivity and phase control, reduced voltage, and smaller required chip real estate. As a result, the present invention enables lower-cost and higher-performance PLC systems.

Claims

1. A planar-lightwave circuit (PLC) comprising:

a first waveguide having;

a core that supports the propagation of an optical mode of a first light signal, the optical mode including a first TE-polarization mode and a first TM-polarization mode, the core including a plurality of layers that collectively support the propagation of the optical mode, the plurality of layers comprising a first silicon nitride layer, a second silicon nitride layer, and a silicon dioxide layer that is between the first silicon nitride layer and second silicon nitride layer; and

a top cladding disposed on the core;

a first layer comprising a piezoelectric material, the first layer being disposed on the first waveguide in at least a portion of a first region;

wherein the first layer is dimensioned and arranged to induce a first stress-induced phase shift in the first TE-polarization mode and a second stress-induced phase shift in the first TM-polarization mode in response to a first electric signal applied to the first layer.

2. The PLC of claim 1 wherein the first layer is operative for inducing at least one of the first phase shift and second phase shift such that it is a π

phase shift when the first electric signal is characterized by a power level that is less than or equal to 5 microWatts.

3. The PLC of claim 1 further comprising a projection in the first region, the projection being a portion of the top cladding and having a top surface, a first side, and a second side;

wherein the first layer is disposed on the top surface and each of the first and second sides.

4. The PLC of claim 3 wherein the projection is characterized by a first ratio of width to height, and wherein a second ratio of the first phase shift to the second phase shift is based on the first ratio.

5. The PLC of claim 1 wherein the first layer is characterized by a first ratio of thickness to length, and wherein a second ratio of the first phase shift to the second phase shift is based on the first ratio.

6. The PLC of claim 3 wherein a first ratio of the first phase shift to the second phase shift is based on a second ratio of a first width of the projection and a second width of the core.

7. The PLC of claim 1 further comprising:

a second waveguide, the second waveguide being operative for supporting propagation of a second light signal that includes a second TE-polarization mode and a second TM-polarization mode;

a third waveguide; and

a coupler operative for (1) combining the first light signal and second light signal into a third light signal having a third TE-polarization mode and a third TM-polarization mode and (2) coupling the third light signal into the third waveguide;

wherein the magnitude of each of the third TE-polarization mode and third TM-polarization mode is based on the magnitude of the first electrical signal.

8. A planar-lightwave circuit (PLC) comprising:

a first waveguide having a core and a top cladding disposed on the core, wherein the first waveguide has a first region in which the core includes a plurality of layers that collectively support the propagation of a first light signal having a first optical mode that includes a first TE-polarization mode and a first TM-polarization mode, the plurality of layers including a first silicon nitride layer, a second silicon nitride layer, and a silicon dioxide layer that is between the first and second silicon nitride layers; and

a stress-inducing (SI) phase shifter that is operatively coupled with the first waveguide in the first region;

wherein the SI phase shifter is dimensioned and arranged to induce a stress in at least one layer of the plurality thereof to control a first phase shift in the first TE-polarization mode and a second phase shift in the first TM-polarization mode.

9. The PLC of claim 8 wherein the first waveguide includes a projection in the first region, the projection including a top surface, a first side, and a second side, and wherein the SI phase shifter includes a first layer of piezoelectric material that is disposed on each of the top surface, the first side, and the second side.

10. The PLC of claim 8 further comprising:

a second waveguide;

a third waveguide; and

a coupler that is operative for combining the first light signal and a second light signal propagating in the second waveguide into a third light signal and optically coupling the third light signal into the third waveguide;

wherein the second light signal has a second optical mode that includes a second TE-polarization mode and a second TM-polarization mode; and

wherein the third light signal has a third optical mode that includes a third TE-polarization mode whose magnitude is based on the stress and a third TM-polarization mode whose magnitude is based on the stress.

11. The PLC of claim 8 wherein the first waveguide includes a second region in which the first silicon nitride layer has a thickness that changes from a first thickness to zero, and wherein the first region and second region are optically coupled.

12. The PLC of claim 8 wherein the first waveguide includes a projection in the first region, and wherein the SI phase shifter is disposed on at least a portion of the projection, and further wherein the projection and the core are dimensioned and arranged such that the first and second phase shifts are substantially equal.

13. A method for controlling the phase of each of a TE-polarization mode and a TM-polarization mode of a light signal propagating through a first waveguide of a planar-lightwave circuit (PLC), the method comprising:

providing the first waveguide such that, in a first region, it includes a core that comprises a plurality of dielectric layers that includes a first silicon nitride layer, a second silicon nitride layer, and a silicon dioxide layer that is between the first and second silicon nitride layers, the plurality of dielectric layers collectively supporting an optical mode of the light signal, the optical mode including the TE-polarization mode and TM-polarization mode;

providing a first layer comprising a piezoelectric material, the first layer being disposed on the first waveguide;

applying a first electric signal to the first layer; and

controlling the magnitude of the first electrical signal;

wherein the application of the first electric signal to the first layer gives rise to a stress in the first waveguide; and

wherein the first layer is dimensioned and arranged such that the stress induces a first stress-induced phase shift in the TE-polarization mode and a second stress-induced phase shift in the TM-polarization mode.

14. The method of claim 13 wherein the magnitude of first electric signal is controlled to induce a π

phase shift on at least one of the TE-polarization mode and the TM-polarization mode at a power consumption level that is less than or equal to 5 microWatts.

15. The method of claim 13 further comprising controlling the first phase shift and second phase shift such that they are substantially equal.

16. The method of claim 13 further comprising forming the first waveguide such that it includes a second region in which the core comprises the first silicon nitride layer, the second silicon nitride layer, and the silicon dioxide layer, wherein the thickness of the first silicon nitride layer changes monotonically from a first thickness to zero in the second region.

17. The method of claim 13 further comprising providing the waveguide such that it includes an upper cladding layer between the core and the first layer, wherein the core has a width and the upper cladding layer has a thickness, and wherein at least one of the first phase shift and second phase shift is based on a ratio between the width and thickness, and wherein the ratio is within the range of approximately 2.5:

1 to approximately 6;

1.