Electronic device, electronic apparatus, and moving object

• US 9,764,940 B2
• Filed: 04/16/2015
• Issued: 09/19/2017
• Est. Priority Date: 04/18/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Tanaka, Satoru
• Primary Examiner(s): Noori, Max
• Application Number:
  US14/688,310
• Publication Number:
  US 20150298967A1
• Time in Patent Office: 887 Days
• Field of Search: 73488, 7351432
• CPC Class Codes: B81B 3/0008 Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

An electronic device includes a first functional element including a first movable element capable of moving in a first axis direction, and a first dummy electrode; a second functional element including a second movable element capable of moving in a second axis direction intersecting with the first axis direction, and a second dummy electrode; and a first wiring interconnecting the first dummy electrode and the second dummy electrode.

Claims

1. An electronic device comprising:

a first functional element including a first movable element that moves in a first axis direction, and a first dummy electrode;

a second functional element including a second movable element that moves in a second axis direction intersecting with the first axis direction, and a second dummy electrode;

a first wiring interconnecting the first dummy electrode and the second dummy electrode; and

a first terminal that is electrically connected to the first dummy electrode,

wherein an electric potential is applied to the first and second dummy electrodes by only the first terminal via the first wiring, and

the first dummy electrode is electrically connected to the first movable element.

2. The electronic device according to claim 1, further comprising:

a third functional element including a third movable element that moves in a third axis direction intersecting with the first axis direction and the second axis direction, and a third dummy electrode; and

a second wiring interconnecting the second dummy electrode and the third dummy electrode,

wherein the electric potential is applied to the first, second, and third dummy electrodes by only the first terminal via the first and second wirings.

3. The electronic device according to claim 2, wherein the first dummy electrode is electrically connected to the first movable element, the second dummy electrode is electrically connected to the second movable element, and the third dummy electrode is electrically connected to the third movable element.

4. The electronic device according to claim 2, further comprising:

a third wiring interconnecting the second dummy electrode and a fourth dummy electrode that is further included in the third functional element,

wherein the electric potential is applied to the first, second, third, and fourth dummy electrodes by only the first terminal via the first, second, and third wirings.

5. The electronic device according to claim 2, further comprising:

a fourth wiring interconnecting the first dummy electrode and a fifth dummy electrode that is further included in the third functional element,

wherein the electric potential is applied to the first, second, third, fourth, and fifth dummy electrodes by only the first terminal via the first, second, third, and fourth wirings.

6. The electronic device according to claim 2,

wherein the second functional element is provided at a position located at first side of the first functional element along the first axis direction, and

the third functional element is provided at a position located at the first side of the first functional element along the first axis direction and located at second side of the second functional element along the second axis direction.

7. The electronic device according to claim 6, wherein a width of the first functional element in the second axis direction is larger than a width of the first functional element in the first axis direction, a width of the second functional element in the first axis direction is larger than a width of the second functional element in the second axis direction, and a width of the third functional element in the first axis direction is larger than a width of the third functional element in the second axis direction.

8. A moving object comprising the electronic device according to claim 1.

9. The electronic device according to claim 1, wherein the first dummy electrode, the second dummy electrode, and the first wiring are provided as a unified structure.

10. The electronic device according to claim 3, further comprising:

a third wiring interconnecting the second dummy electrode and a fourth dummy electrode that is further included in the third functional element,

wherein the electric potential is applied to the first, second, third, and fourth dummy electrodes by only the first terminal via the first, second, and third wirings.

11. The electronic device according to claim 3, further comprising:

a fourth wiring interconnecting the first dummy electrode and a fifth dummy electrode that is further included in the third functional element,

wherein the electric potential is applied to the first, second, third, fourth, and fifth dummy electrodes by only the first terminal via the first, second, third, and fourth wirings.

12. The electronic device according to claim 3,

wherein the second functional element is provided at a position located at first side of the first functional element along the first axis direction, and

the third functional element is provided at a position located at the first side of the first functional element along the first axis direction and located at second side of the second functional element along the second axis direction.

13. The electronic device according to claim 12, wherein a width of the first functional element in the second axis direction is larger than a width of the first functional element in the first axis direction, a width of the second functional element in the first axis direction is larger than a width of the second functional element in the second axis direction, and a width of the third functional element in the first axis direction is larger than a width of the third functional element in the second axis direction.

14. An electronic apparatus comprising the electronic device according to claim 1.

15. The electronic device according to claim 4, further comprising:

a fourth wiring interconnecting the first dummy electrode and a fifth dummy electrode that is further included in the third functional element,

wherein the electric potential is applied to the first, second, third, fourth, and fifth dummy electrodes by only the first terminal via the first, second, third, and fourth wirings.

16. The electronic device according to claim 4,

wherein the second functional element is provided at a position located at first side of the first functional element along the first axis direction, and

the third functional element is provided at a position located at second side of the first functional element along the first axis direction and located at second side of the second functional element along the second axis direction.

17. The electronic device according to claim 16, wherein a width of the first functional element in the second axis direction is larger than a width of the first functional element in the first axis direction, a width of the second functional element in the first axis direction is larger than a width of the second functional element in the second axis direction, and a width of the third functional element in the first axis direction is larger than a width of the third functional element in the second axis direction.