MEMS structure

• US 9,764,943 B2
• Filed: 11/28/2016
• Issued: 09/19/2017
• Est. Priority Date: 06/05/2014
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Okami, Tsuyoshi, Mizota, Takashi, Ueya, Yuki, Matsuoka, Junya, Tsuji, Nobuaki
• Primary Examiner(s): WOLDEGEORGIS, ERMIAS T
• Application Number:
  US15/361,972
• Publication Number:
  US 20170073216A1
• Time in Patent Office: 295 Days
• CPC Class Codes: B81B 2201/0228 Inertial sensors
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2203/0154 Torsion bars
• CPC Class Codes: B81B 3/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes B81B5/00 takes precedence
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: B81B 3/0045 Improve properties related to angular swinging, e.g. control resonance frequency
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: H10N 30/30 with mechanical input and electrical output, e.g. functioning as generators or sensors
• CPC Class Codes: H10N 30/302 Sensors
• CPC Class Codes: H10N 35/101 with mechanical input and electrical output, e.g. generators, sensors

Abstract

A MEMS structure includes a planar substrate, a support body coupled to the planar substrate, a fixed electrode coupled to the planar substrate and a moveable portion. The movable portion is spaced from and faces the fixed electrode. The movable electrode includes a movable weight and an intermediate frame surrounding an outer edge of the movable weight. A plurality of elastic supports connect the movable weight to the intermediate frame. The elastic supports are elastically deformable in a first direction extending parallel to the plane of the substrate such that the movable weight can move in the first direction. At least one torsion bar pivotally connects one end of the intermediate frame to the support body so as to allow the intermediate frame, and with it the movable weight, to pivot around an axis which extends parallel to the plane of the substrate and perpendicular to the first direction.

Claims

1. A MEMS structure comprising:

a planar substrate;

a support body coupled to the planar substrate;

a fixed electrode coupled to the planar substrate; and

a movable portion spaced from and facing the fixed electrode, the movable portion being coupled to the substrate and including;

a movable weight;

an intermediate frame surrounding an outer edge of the movable weight;

a plurality of elastic supports connecting the movable weight to intermediate frame, the elastic supports being elastically deformable in a first direction extending parallel to the plane of the planar substrate such that the movable weight can move in the first direction; and

at least one torsion bar pivotally connecting one end of the intermediate frame to the support body so as to allow the intermediate frame, and with it the movable weight, to pivot around an axis which extends parallel to the plane of the planar substrate and perpendicular to the first direction.

2. The MEMS structure according to claim 1, wherein:

the movable weight has a rectangular shape including first and second opposite edges extending along the first direction and third and fourth opposite edges extending along the second direction; and

at least one of the elastic supports is connected between the first edge and the intermediate frame and at least one of the elastic supports is connected between the second edge and the intermediate frame.

3. The MEMS structure according to claim 2, wherein the movable weight has four corners and the elastic supports connect the four corners of the movable weight to the intermediate frame.

4. The MEMS structure according to claim 1, wherein the support body and the movable portion are planar in shape and lie in the same plane.

5. A MEMS structure comprising:

a planar substrate;

a support body coupled to the planar substrate;

a fixed electrode coupled to the planar substrate; and

a movable portion spaced from and facing the fixed electrode, the movable portion being coupled to the planar substrate and including;

a movable weight;

an intermediate frame surrounding an outer edge of the movable weight;

at least one torsion bar pivotally connecting one end of the movable weight to the intermediate frame so as to allow the movable weight to pivot around an axis which extends parallel to the plane of the planar substrate and in a first direction; and

a plurality of elastic supports connecting the intermediate frame to the support body, the elastic supports being elastically deformable in a second direction extending horizontal to the plane of the planar substrate and perpendicular to the first direction such that the intermediate frame, and with it the movable weight, can move in the second direction.

6. The MEMS structure according to claim 5, wherein:

the movable weight has a rectangular shape including first and second opposite edges extending along the first direction and third and fourth opposite edges extending along the second direction; and

the at least one torsion bar is connected between the first edge and the intermediate frame.

7. The MEMS structure according to claim 6, wherein the intermediate frame has four corners and the elastic supports connect the four corners of the intermediate frame to the support body.

8. The MEMS structure according to claim 5, wherein the support body and the movable portion are planar in shape and lie in the same plane.