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Polymer layer system pressure sensor device, and polymer layer system pressure sensor method

  • US 9,766,144 B2
  • Filed: 07/03/2012
  • Issued: 09/19/2017
  • Est. Priority Date: 08/31/2011
  • Status: Active Grant
First Claim
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1. A polymer layer system pressure sensor device, comprising:

  • a first polymer substrate with a first cavity;

    a first polymer membrane stretched over the first cavity and configured to be deflected vertically in dependence on a pressure in the first cavity;

    a first membrane metallization portion attached on the first polymer membrane above the first cavity and configured to be deflected together with the first polymer membrane in dependence on the pressure in the first cavity;

    a second polymer substrate arranged over the first polymer membrane and having a second cavity arranged over the first cavity;

    a second polymer membrane stretched over the second cavity;

    a second membrane metallization portion attached on the second polymer membrane within the second cavity; and

    a third polymer substrate arranged over the second polymer membrane, wherein the second cavity is connected to a first pressure channel, configured to run in the second polymer substrate, wherein the first membrane metallization portion and the second membrane metallization portion are configured to come into contact with one another when there is deflection under pressure.

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