Methods and apparatus for increasing accuracy of RMS measurements of signals with a high crest factor

• US 9,766,275 B2
• Filed: 05/15/2014
• Issued: 09/19/2017
• Est. Priority Date: 06/04/2013
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Serebryanov, Oleg
• Primary Examiner(s): JENNISON, BRIAN W
• Application Number:
  US14/278,621
• Publication Number:
  US 20140355972A1
• Time in Patent Office: 1,223 Days
• CPC Class Codes: G01R 19/02 Measuring effective values, i.e. root-mean-square values
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H05B 1/0233 for semiconductors manufacturing

Abstract

Methods and apparatus for determining the root-mean-square (RMS) voltage of an input voltage are provided herein. In some embodiments, an apparatus for determining the root-mean-square (RMS) voltage of an input voltage includes an amplifier to modify an amplitude of the input voltage signal; an amplitude detector, coupled to the amplifier, to transform the spectrum of the modified input voltage signal so that an increased portion of the signal is disposed within a desired frequency region; and a root-mean-square (RMS) converter, coupled to the amplitude detector, to determine the RMS voltage of the transformed input voltage signal, wherein a bandwidth of the RMS converter includes the desired frequency region.

Claims

1. An apparatus for determining a root-mean-square (RMS) voltage of an input voltage signal, comprising:

an amplifier to modify an amplitude of an input voltage signal, wherein the input voltage signal is a pulse width modulated signal supplied to a lamp driver;

an amplitude detector, coupled to the amplifier, that outputs a normalized signal having an amplitude equal to an amplitude of the input voltage signal, with a longer duration of time than the input voltage signal; and

a root-mean-square (RMS) converter, coupled to the amplitude detector, to determine the RMS voltage of the input voltage signal over the longer duration of time, wherein a bandwidth of the RMS converter includes a desired frequency region, and wherein the bandwidth of the RMS converter is smaller than a frequency range of the input voltage signal and larger than a frequency range of the normalized signal such that RMS voltage calculation error is reduced.

2. The apparatus of claim 1, wherein the amplitude detector comprises:

a diode, coupled in series with a resistor, to pulse the modified input voltage signal; and

a capacitor, coupled in parallel to the resistor and the diode, to smooth the pulsed modified input voltage signal.

3. The apparatus of claim 2, wherein the resistor has a resistance ranging in value from approximately 10 kΩ

to 30 kΩ and

the capacitor has an approximate capacitance of 100 pF to 200 pF.

4. The apparatus of claim 1, further comprising:

a lamp driver, wherein the input voltage is from the lamp driver to control a lamp circuit of a substrate process chamber.

5. The apparatus of claim 4, wherein the lamp driver has a pulse width modulated signal.

6. The apparatus of claim 1, wherein the normalized signal comprises a greater amount of signal energy in lower frequency regions than the amount of signal energy in higher frequency regions.

7. The apparatus of claim 1, wherein the amplitude detector comprises:

a first circuit branch to transform a positive portion of the input voltage signal; and

a second circuit branch to transform a negative portion of the input voltage signal,

wherein the apparatus further comprises a summing module to sum positive portion of the input voltage signal from the first circuit branch and the negative portion of the input voltage signal from the second circuit branch.

8. The apparatus of claim 7, wherein the first and second circuit branch both comprise:

a diode coupled to a resistor;

a capacitor coupled in parallel to the resistor; and

an amplifier coupled to the capacitor.

9. The apparatus of claim 8, further comprising:

a lamp driver, wherein the input voltage signal is from the lamp driver to control a lamp circuit of a substrate process chamber and the RMS voltage controls operation of the lamp driver.

10. The apparatus of claim 9, wherein the lamp driver generates a pulse width modulated signal.

11. A method for determining a root-mean-square (RMS) voltage of an input voltage signal, comprising:

modifying, using an amplifier, an amplitude of the input voltage signal, wherein the input voltage signal is a pulse width modulated signal supplied to a lamp driver;

normalizing a spectrum of the modified input voltage signal to generate a normalized signal with an amplitude equal to an amplitude of the input voltage signal and a longer duration of time than the input voltage signal; and

determining, using an RMS converter, the RMS voltage of the input voltage signal over the longer duration of time, wherein a bandwidth of the RMS converter includes a desired frequency region, and wherein the bandwidth of the RMS converter is smaller than a frequency range of the input voltage signal, but larger than a frequency range of the normalized signal such that RMS voltage calculation error is reduced.

12. The method of claim 11, further comprising:

pulsing the modified input voltage signal; and

smoothing the pulsed modified input voltage signal prior to transforming the spectrum of the modified input voltage signal.

13. The method of claim 12, further comprising:

pulsing the modified input voltage signal using a diode coupled to a resistor; and

smoothing the pulsed modified input voltage signal using a capacitor coupled in parallel to the resistor and the diode.

14. The method of claim 11, further comprising providing the input voltage signal from a lamp driver for controlling a lamp circuit of a substrate process chamber.

15. The method of claim 14, wherein the lamp driver has a pulse width modulated signal.

16. The method of claim 11, wherein normalized signal comprises a greater amount of signal energy in lower frequency regions than the amount of signal energy in higher frequency regions.

17. The method of claim 11, wherein transforming the spectrum of the modified input voltage signal includes:

transforming a positive portion of the input voltage signal using a first circuit branch of an amplitude detector;

transforming a negative portion of the input voltage signal using a second circuit branch of an amplitude detector; and

summing the transformed positive portion of the input voltage signal and the transformed negative portion of the input voltage signal.

18. The method of claim 17, wherein the first and second circuit branch both comprise:

a diode coupled to a resistor;

a capacitor coupled in parallel to the resistor; and

an amplifier coupled to the capacitor.

19. The method of claim 18, further comprising:

controlling a lamp driver using the RMS voltage, wherein the lamp driver controls a lamp circuit of a substrate process chamber.

20. A substrate processing apparatus, comprising:

a process chamber;

a lamp array configured to provide heat to the process chamber to process substrates when disposed therein;

a lamp driver that delivers stepped-down power to the lamp array as a pulse width modulated input voltage signal;

a power source electrically coupled to the lamp driver to deliver power to the lamp driver;

a controller communicatively coupled to the lamp driver to control operation of the lamp driver; and

a measuring system coupled to an output voltage of the lamp driver and configured to provide root-mean-square (RMS) voltage information to the controller to control the lamp driver, the measuring system comprising;

an amplifier to modify an amplitude of the input voltage signal provided by the lamp driver;

an amplitude detector, coupled to the amplifier, that outputs a normalized signal having an amplitude equal to an amplitude of the input voltage signal, with a longer duration of time than the input voltage signal; and

a root-mean-square (RMS) converter, coupled to the amplitude detector, to determine the RMS voltage of the input voltage signal over the longer duration of time, wherein a bandwidth of the RMS converter includes a desired frequency region, and wherein the bandwidth of the RMS converter is smaller than a frequency range of the input voltage signal and larger than a frequency range of the normalized signal such that RMS voltage calculation error is reduced.