Fluid mechanism, support member constituting fluid mechanism and fluid control system

• US 9,766,634 B2
• Filed: 10/28/2015
• Issued: 09/19/2017
• Est. Priority Date: 10/05/2011
• Status: Expired due to Fees

• Current Assignee: Horiba STEC, Co., Ltd. (Horiba Limited)
• Original Assignee: Horiba STEC, Co., Ltd. (Horiba Limited)
• Inventors: Yasuda, Tadahiro
• Primary Examiner(s): McManmon, Mary
• Assistant Examiner(s): COLON MORALES, DAVID
• Application Number:
  US14/925,830
• Publication Number:
  US 20160048136A1
• Time in Patent Office: 692 Days
• Field of Search: 138 42, 138 44
• CPC Class Codes: F16K 27/003 Housing formed from a plurality of the same valve elements
• CPC Class Codes: G01F 5/00 Measuring a proportion of the volume flow
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/87249 Multiple inlet with multiple outlet
• CPC Class Codes: Y10T 137/87885 Sectional block structure

Abstract

This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.

Claims

1. A fluid control system comprising:

a primary flow channel that extends in parallel to an imaginary plane;

a plurality of secondary flow channels that intersect with the primary flow channel viewed from a position above the imaginary plane and that are so configured to be connected to the primary flow channel at the intersect points and into which a part of a fluid flowing in the primary flow channel flows; and

a fluid resistive element that is arranged in an installation area set at least at one of the intersect points and that determines a ratio of the fluid flow rate flowing from the primary flow channel into at least one of the plurality of secondary flow channels, wherein

the fluid resistive element is configured with an internal channel through which at least a portion of the fluid flows from one side of the primary flow channel into the at least one of the plurality of secondary flow channels, and through which a remaining portion of the fluid flows from the one side of the primary flow channel to a second side of the primary flow channel, and

the primary flow channel and the plurality of secondary flow channels are configured in a skewed relationship.

2. The fluid control system described in claim 1, further comprising:

a fluid supply device connected to each end of the primary flow channel so as to flow the fluid into the primary flow channel from each end respectively.

3. The fluid control system described in claim 1, further comprising a plurality of primary flow channels, and which is characterized in that multiple primary flow channels and multiple secondary flow channels are configured in a latticed state viewed from the position above the imaginary plane.

4. The fluid control system described in claim 1, wherein

the installation area is arranged in the primary flow channel.

5. The fluid control system described in claim 1, wherein

at least a portion of the internal channel is a large channel;

and

inside of the fluid resistive element are formed the large channel where substantially no resistance is generated and a pair of small channels that are bifurcated from the large channel and where resistance is generated, the large channel of the fluid resistive element being arranged in the installation area in communication with at least one of the plurality of secondary flow channels, and each of the small channels being in communication with an upstream side and a downstream side in the installation area of the primary flow channel respectively.