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Force detecting device, robot, electronic component conveying apparatus

  • US 9,770,826 B2
  • Filed: 11/04/2014
  • Issued: 09/26/2017
  • Est. Priority Date: 11/05/2013
  • Status: Active Grant
First Claim
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1. A force detecting device comprising:

  • a first base section;

    a second base section; and

    a plurality of piezoelectric elements sandwiched by the first base section and the second base section and configured to detect external forces applied to the first base section and the second base section, whereinthe first base section includes a first attachment surface fixed to a first portion of a measurement target and the second base section includes a second attachment surface fixed to a second portion of the measurement target,at least one of the plurality of piezoelectric elements includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate, the first board and the second board are laminated in parallel, and, in a laminating direction of the first board and the second board, an x axis of the first board and an x axis of the second board cross each other and a z axis of the first board and a z axis of the second board cross each other,each of the plurality of piezoelectric elements is set such that the laminating direction is a direction different from a normal of the first attachment surface or the second attachment surface, andthe plurality of piezoelectric elements include the piezoelectric elements not arranged on the same plane and not arranged in parallel to each other.

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