Force detecting device, robot, electronic component conveying apparatus
First Claim
1. A force detecting device comprising:
- a first base section;
a second base section; and
a plurality of piezoelectric elements sandwiched by the first base section and the second base section and configured to detect external forces applied to the first base section and the second base section, whereinthe first base section includes a first attachment surface fixed to a first portion of a measurement target and the second base section includes a second attachment surface fixed to a second portion of the measurement target,at least one of the plurality of piezoelectric elements includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate, the first board and the second board are laminated in parallel, and, in a laminating direction of the first board and the second board, an x axis of the first board and an x axis of the second board cross each other and a z axis of the first board and a z axis of the second board cross each other,each of the plurality of piezoelectric elements is set such that the laminating direction is a direction different from a normal of the first attachment surface or the second attachment surface, andthe plurality of piezoelectric elements include the piezoelectric elements not arranged on the same plane and not arranged in parallel to each other.
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Accused Products
Abstract
A force detecting device includes a first base section, a second base section, and a charge output element arranged between the first base section and the second base section. The charge output element includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate. The boards are laminated in a direction orthogonal to the normal an attachment surface of the second base section. The force detecting device detects an external force on the basis of a first output corresponding to a shearing force in a first detection direction orthogonal to the laminating direction of the first board and a second output corresponding to a shearing force in a second detection direction orthogonal to the laminating direction of the second board and crossing the first detection direction.
43 Citations
29 Claims
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1. A force detecting device comprising:
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a first base section; a second base section; and a plurality of piezoelectric elements sandwiched by the first base section and the second base section and configured to detect external forces applied to the first base section and the second base section, wherein the first base section includes a first attachment surface fixed to a first portion of a measurement target and the second base section includes a second attachment surface fixed to a second portion of the measurement target, at least one of the plurality of piezoelectric elements includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate, the first board and the second board are laminated in parallel, and, in a laminating direction of the first board and the second board, an x axis of the first board and an x axis of the second board cross each other and a z axis of the first board and a z axis of the second board cross each other, each of the plurality of piezoelectric elements is set such that the laminating direction is a direction different from a normal of the first attachment surface or the second attachment surface, and the plurality of piezoelectric elements include the piezoelectric elements not arranged on the same plane and not arranged in parallel to each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A force detecting device comprising:
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a first base section; a second base section; and a plurality of piezoelectric elements sandwiched by the first base section and the second base section and configured to detect external forces applied to the first base section and the second base section, wherein the first base section includes a first attachment surface fixed to a first portion of a measurement target and the second base section includes a second attachment surface fixed to a second portion of the measurement target, at least one of the plurality of piezoelectric elements includes a first board and a second board having a laminating direction different from a normal direction of the first attachment surface or the second attachment surface and detects the external forces applied to the first base section and the second base section from detection of a shearing force in a first detection direction same as the normal direction by the first board and detection of a shearing force in a second detection direction crossing the first detection direction by the second board, and the plurality of piezoelectric elements include the piezoelectric elements not arranged on the same plate and not arranged in parallel to each other. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A force detecting device comprising:
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a first base section; a second base section; and a plurality of piezoelectric elements sandwiched by the first base section and the second base section and configured to detect external forces applied to the first base section and the second base section, wherein the first base section includes a first attachment surface fixed to a first portion of a measurement target and the second base section includes a second attachment surface fixed to a second portion of the measurement target, each of the plurality of piezoelectric elements is set such that a laminating direction of a first board and a second board of the piezoelectric element is a direction different from a normal of the first attachment surface or the second attachment surface, and the plurality of piezoelectric elements include the piezoelectric elements not arranged on the same plane and not arranged in parallel to each other. - View Dependent Claims (20, 21, 22, 23, 24)
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25. A force detecting device comprising:
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a first base section; a second base section; and a plurality of piezoelectric elements sandwiched by the first base section and the second base section and configured to detect external forces applied to the first base section and the second base section, wherein the first base section includes a first attachment surface fixed to a first portion of a measurement target and the second base section includes a second attachment surface fixed to a second portion of the measurement target, each of the plurality of piezoelectric elements is set such that a laminating direction of a first board and a second board of the piezoelectric element is a direction different from a normal of the first attachment surface or the second attachment surface, a conversion circuit configured to convert charges output by the plurality of piezoelectric elements into a voltage and an arithmetic circuit configured to calculate an external force from the voltage are housed in a space between the first base section and the second base section, and the plurality of piezoelectric elements include the piezoelectric elements not arranged on the same plane and not arranged in parallel to each other. - View Dependent Claims (26, 27, 28, 29)
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Specification