Voltage-driven intelligent characterization bench for semiconductor

• US 9,772,371 B2
• Filed: 03/17/2015
• Issued: 09/26/2017
• Est. Priority Date: 01/06/2011
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Montrose, Charles J., Wang, Ping-Chuan
• Primary Examiner(s): Betsch, Regis
• Application Number:
  US14/659,793
• Publication Number:
  US 20150185277A1
• Time in Patent Office: 924 Days
• CPC Class Codes: G01R 31/2607 Circuits therefor G01R31/2642 takes precedence
• CPC Class Codes: G01R 31/2834 Automated test systems [ATE]; using microprocessors or computers G01R31/317 takes precedence; ATE for detection of defective computer hardware G06F11/2736
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801
• CPC Class Codes: G01R 31/31924 Voltage or current aspects, e.g. driver, receiver
• CPC Class Codes: G01R 31/31935 Storing data, e.g. failure memory

Abstract

A method, and forming an associated system, for testing semiconductor devices. Driver channels are provided, each driver channel connected to a storage device via a bus and connected to a respective semiconductor device. Each driver channel includes: a first voltage driver connected to the respective semiconductor device and having a first input for the respective semiconductor device, a second voltage driver connected to the respective semiconductor device and having a second input for the respective semiconductor device, first and second sets of optical switches in the first and second voltage driver respectively, and a microcontroller. All connections between the respective semiconductor device and both the first and second voltage drivers, in response to all optical switches of the first and second set of optical switches being closed. The semiconductor devices are tested, using the driver channels and the test parameters. The test results are provided to the storage device.

Claims

1. A method for testing a plurality of semiconductor devices, said system comprising:

providing a plurality of driver channels, each driver channel connected to a storage device via a bus, each driver channel connected to a respective semiconductor device of the plurality of semiconductor devices, wherein each driver channel comprises;

a first voltage driver connected to the respective semiconductor device and having a first input for the respective semiconductor device, a second voltage driver connected to the respective semiconductor device and having a second input for the respective semiconductor device, a first set of optical switches in the first voltage driver, a second set of optical switches in the second voltage driver, and a microcontroller;

simultaneously grounding all connections between the respective semiconductor device and both the first voltage driver and the second voltage driver, in response to all optical switches of the first set and the second set of optical switches being closed;

said microcontroller receiving test parameters from the storage device and setting the received test parameters in the first voltage driver and the second voltage driver;

independently and simultaneously testing, using the plurality of driver channels and the received test parameters and while said all connections between the respective semiconductor device and both the first voltage driver and the second voltage driver are grounded, the respective semiconductor device to which each driver channel is connected; and

providing test results from the test to the storage device.

2. The method of claim 1, wherein said simultaneously grounding all connections comprises:

grounding a voltage sensed signal from a first probe location on the respective semiconductor device; and

constraining a voltage force signal from the first voltage driver to the respective semiconductor device to be at a same voltage level as the voltage sensed signal.

3. The method of claim 1, wherein the storage device is a computer.

4. The method of claim 1, wherein each driver channel comprises a flag which when set denotes that the test results are available to be provided to the storage device.

5. The method of claim 1, wherein each driver channel further comprises an analog-to-digital converter, and wherein for each driver channel, the first and second voltage drivers are configured provide the test results to the analog-to-digital converter and the analog-to-digital converter is configured to provide the test results in digital form to the microcontroller.

6. The method of claim 1, wherein for each driver channel, the first and second voltage drivers are constant voltage drivers which are set within the driver channel and are not set by voltage sources external to the driver channel.

7. The method of claim 1, wherein each driver channel further comprises an output ready flag, an output read flag, and a buffer for storing the test results, wherein for each driver channel, said providing the test results to the storage device comprises performing a loop, and wherein each iteration of the loop comprises:

transmitting a portion of the test results from the microcontroller to the buffer;

determining that the portion of the test results is ready to be read from the buffer, and in response setting the output ready flag;

determining that the output ready flag is set and in response, reading the portion of the test results from the buffer and providing the read portion of the test results to the storage device and in response setting the output read flag;

determining that the output read flag is set and in response, determining whether all of the test results have been provided to the storage device and if not then performing a next iteration of the loop until it is determined that all of the test results have been provided to the storage device.

8. The method of claim 1, wherein each driver channel further comprises a test parameter ready flag and a test parameter read flag, and wherein for each driver channel said receiving test parameters from the storage device comprises performing a loop, and wherein each iteration of the loop comprises:

determining that a portion of the test parameters is ready to be received by the controller from the storage device, and in response setting the test parameter ready flag;

determining that the test parameter ready flag is set and in response, receiving the portion of the test parameters by the controller from the storage device and in response setting the test parameter read flag;

determining that the test parameter read flag is set and in response, determining whether all of the test parameters have been received from the storage device and if not then performing a next iteration of the loop until it is determined that all of the test parameters have been received from the storage device.

9. The method of claim 1, wherein each semiconductor device comprises a transistor, wherein each voltage driver further comprises a ground, and wherein for each voltage driver:

the first output of the first voltage driver is connected to a source of the respective transistor,

the second output of the second voltage driver is connected to a gate of the respective transistor, and

the ground has a third output connected to a drain of the respective transistor.

10. The method of claim 1, wherein upon all optical switches of the first set and the second set of optical switches being closed, a voltage sensed signal from a first probe location on the respective semiconductor device is grounded by a first and second optical switch of the first set of optical switches being closed, and wherein a voltage force signal from the first voltage driver to the respective semiconductor device is grounded by being connected to the first probe location on the respective semiconductor device so as to constrain the voltage force signal to be at a same voltage level as the voltage sensed signal.

11. A method for forming a system configured to test a plurality of semiconductor devices, said method comprising:

connecting each driver channel of a plurality of driver channels to a storage device via a bus;

connecting each driver channel to a respective semiconductor device of the plurality of semiconductor devices, wherein the plurality of driver channels are configured to;

(i) independently and simultaneously test, using test parameters, the respective semiconductor device to which each driver channel is connected and (ii) provide test results from the test to the storage device, wherein each driver channel comprises a first voltage driver connected to the respective semiconductor device and having a first input for the respective semiconductor device,

a second voltage driver connected to the respective semiconductor device and having a second input for the respective semiconductor device, a microcontroller for receiving the test parameters from the storage device and set the test parameters in the first voltage driver and the second voltage driver; and

a first set of optical switches in the first voltage driver and a second set of optical switches in the second voltage driver; and

simultaneously grounding all connections between the respective semiconductor device and both the first voltage driver and the second voltage driver, in response to all optical switches of the first set and the second set of optical switches being closed.

12. The method of claim 11, wherein the bus is a dual unidirectional 8-bit hand shaked data bus.

13. The method of claim 11, wherein the storage device is a computer.

14. The method of claim 11, wherein each driver channel comprises a flag which when set denotes that the test results are available to be provided to the storage device.

15. The method of claim 11, wherein each driver channel further comprises an analog-to-digital converter, and wherein for each driver channel, the first and second voltage drivers are configured provide the test results to the analog-to-digital converter and the analog-to-digital converter is configured to provide the test results in digital form to the microcontroller.

16. The method of claim 11, wherein for each driver channel, the first and second voltage drivers are constant voltage drivers which are set within the driver channel and are not set by voltage sources external to the driver channel.

17. The method of claim 11, wherein each driver channel further comprises an output ready flag, an output read flag, and a buffer for storing the test results, wherein, for each driver channel, said to provide the test results to the storage device comprises to perform a loop, and wherein each iteration of the loop comprises:

transmitting a portion of the test results from the microcontroller to the buffer;

determining that the portion of the test results is ready to be read from the buffer, and in response setting the output ready flag;

determining that the output ready flag is set and in response, reading the portion of the test results from the buffer and providing the read portion of the test results to the storage device and in response setting the output read flag;

determining that the output read flag is set and in response, determining whether all of the test results have been provided to the storage device and if not then performing a next iteration of the loop until it is determined that all of the test results have been provided to the storage device.

18. The method of claim 11, wherein each driver channel further comprises a test parameter ready flag and a test parameter read flag, and wherein, for each driver channel, said receiving the test parameters from the storage device comprises performing a loop, and wherein each iteration of the loop comprises:

determining that a portion of the test parameters is ready to be received by the controller from the storage device, and in response setting the test parameter ready flag;

determining that the test parameter ready flag is set and in response, receiving the portion of the test parameters by the controller from the storage device and in response setting the test parameter read flag;

determining that the test parameter read flag is set and in response, determining whether said receiving the test parameters from the storage device is complete and if not then performing a next iteration of the loop until it is determined that said receiving the test parameters from the storage device is complete.

19. The method of claim 11, wherein each semiconductor device comprises a transistor, wherein each voltage driver further comprises a ground, and wherein for each voltage driver:

the first output of the first voltage driver is connected to a source of the respective transistor,

the second output of the second voltage driver is connected to a gate of the respective transistor, and

the ground has a third output connected to a drain of the respective transistor.

20. The method of claim 11, wherein upon all optical switches of the first set and the second set of optical switches being closed, a voltage sensed signal from a first probe location on the respective semiconductor device is grounded by a first and second optical switch of the first set of optical switches being closed, and wherein a voltage force signal from the first voltage driver to the respective semiconductor device is grounded by being connected to the first probe location on the respective semiconductor device so as to constrain the voltage force signal to be at a same voltage level as the voltage sensed signal.