Dual discharge modes operation for remote plasma

• US 9,773,648 B2
• Filed: 08/25/2014
• Issued: 09/26/2017
• Est. Priority Date: 08/30/2013
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Cho, Tae Seung, Sen, Yi-Heng, Park, Soonam, Lubomirsky, Dmitry
• Primary Examiner(s): BERMAN, JASON
• Application Number:
  US14/468,066
• Publication Number:
  US 20150060265A1
• Time in Patent Office: 1,128 Days
• CPC Class Codes: H01J 37/32018 Glow discharge
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01J 37/32541 Shape
• CPC Class Codes: H01J 37/32568 Relative arrangement or disposition of electrodes; moving means
• CPC Class Codes: H01J 37/32596 Hollow cathodes

Abstract

Embodiments of the present technology may include a method of processing a semiconductor substrate. The method may include providing the semiconductor substrate in a processing region. Additionally, the method may include flowing gas through a cavity defined by a powered electrode. The method may further include applying a negative voltage to the powered electrode. Also, the method may include striking a hollow cathode discharge in the cavity to form hollow cathode discharge effluents from the gas. The hollow cathode discharge effluents may then be flowed to the processing region through a plurality of apertures defined by electrically grounded electrode. The method may then include reacting the hollow cathode discharge effluents with the semiconductor substrate in the processing region.

Claims

1. A method of processing a semiconductor substrate, the method comprising:

flowing a gas through a cavity defined by a powered electrode;

applying a negative voltage to the powered electrode;

striking a hollow cathode discharge in the cavity to form hollow cathode discharge effluents from the gas;

flowing the hollow cathode discharge effluents to a processing region through a plurality of apertures defined by an electrically grounded electrode; and

reacting the hollow cathode discharge effluents with the semiconductor substrate in the processing region, wherein;

applying the negative voltage comprises applying the negative voltage through an electronic ballast, and

the electronic ballast has a frequency of less than about 1 MHz.

2. The method of claim 1, wherein the method further comprises:

applying a positive voltage to the powered electrode;

striking a glow discharge to form glow discharge effluents from the gas, wherein most of the glow discharge is between the powered electrode and the electrically grounded electrode and not in the cavity;

flowing glow discharge effluents to the processing region through the plurality of apertures; and

reacting the glow discharge effluents with the semiconductor substrate in the processing region.

3. The method of claim 1, wherein the gas comprises argon or helium.

4. The method of claim 3, wherein the gas further comprises fluorinated compounds.

5. The method of claim 1, wherein the gas comprises NF₃ or NH₃.

6. The method of claim 4, wherein the cavity is conical.

7. The method of claim 6, wherein the electrically grounded electrode has a first surface and a second surface, and the first surface and the second surface are substantially flat.

8. The method of claim 1, wherein the cavity is cylindrical.

9. The method of claim 7, wherein striking the hollow cathode discharge comprises striking the hollow cathode discharge at a pressure between about 1.5 Torr and about 10 Torr.

10. The method of claim 9, wherein the powered electrode comprises nickel-coated aluminum without a dielectric coating and the electrically grounded electrode comprises nickel-coated aluminum without a dielectric coating.

11. The method of claim 10, wherein the electronic ballast has a power of about 60 W.

19. The method of claim 1, wherein the electronic ballast has a power between about 50 W and about 100 W.

20. The method of claim 2, wherein the negative voltage and the positive voltage are applied as sinusoidal oscillating voltages.

12. A method of processing a semiconductor substrate, the method comprising:

flowing a gas to a processing region;

striking a hollow cathode discharge to form hollow cathode discharge effluents from the gas;

reacting hollow cathode discharge effluents with the semiconductor substrate in the processing region;

striking a glow discharge to form glow discharge effluents from the gas; and

reacting the glow discharge effluents with the semiconductor substrate in the processing region, wherein;

striking the hollow cathode discharge comprises applying a negative voltage to a powered electrode through an electronic ballast, and

the electronic ballast has a frequency of less than about 1 MHz.

13. The method of claim 12, wherein striking the hollow cathode discharge comprises striking the hollow cathode discharge in a first space in a conical cavity defined by the powered electrode.

14. The method of claim 13, wherein striking the glow discharge comprises striking the glow discharge in a second space between the powered electrode and an electrically grounded electrode, wherein the second space is different from the first space.

15. The method of claim 12, wherein striking the glow discharge further comprises applying a positive voltage to the powered electrode.

16. A system for processing a semiconductor substrate, the system comprising:

a powered electrode electrically coupled with an electronic ballast;

a conical cavity defined by the powered electrode, wherein the conical cavity is characterized by a narrower diameter end and a wider diameter end;

a power supply electrically coupled with the electronic ballast, wherein the power supply is configured to deliver a negative voltage at a frequency below about 1 MHz to the powered electrode to strike a hollow cathode discharge in the conical cavity;

a gas inlet connected to the narrower diameter end of the conical cavity; and

an electrically grounded electrode defining a plurality of apertures, wherein;

the electrically grounded electrode is disposed closer to the wider diameter end of the conical cavity than the narrower diameter end of the conical cavity,

the electrically grounded electrode has a first surface and a second surface,

the first surface and the second surface are substantially flat, and

the first surface is parallel to the second surface.

17. The system of claim 16, wherein the system further comprises a high-speed intensified charge-coupled device (ICCD) aligned to record time-resolved images of the hollow cathode discharge and a glow discharge.

18. The system of claim 16, wherein the powered electrode comprises nickel-coated aluminum without a dielectric coating and the electrically grounded electrode comprises nickel-coated aluminum without a dielectric coating.