Epitaxial wafer and method for manufacturing same

• US 9,773,932 B2
• Filed: 08/18/2014
• Issued: 09/26/2017
• Est. Priority Date: 10/22/2013
• Status: Active Grant

• Current Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Original Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Inventors: Fujii, Kei, Nishizuka, Koji, Kyono, Takashi, Shibata, Kaoru, Akita, Katsushi
• Primary Examiner(s): YUSHIN, NIKOLAY K
• Application Number:
  US15/028,225
• Publication Number:
  US 20160247951A1
• Time in Patent Office: 1,135 Days
• CPC Class Codes: H01L 21/02392 Phosphides
• CPC Class Codes: H01L 21/02461 Phosphides
• CPC Class Codes: H01L 21/02463 Arsenides
• CPC Class Codes: H01L 21/02466 Antimonides
• CPC Class Codes: H01L 21/02507 Alternating layers, e.g. superlattice
• CPC Class Codes: H01L 21/02546 Arsenides
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 31/03042 characterised by the doping material
• CPC Class Codes: H01L 31/03046 including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
• CPC Class Codes: H01L 31/035236 Superlattices; Multiple quantum well structures
• CPC Class Codes: H01L 31/1832 comprising ternary compounds, e.g. Hg Cd Te
• CPC Class Codes: Y02E 10/544 Solar cells from Group III-V materials
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

An epitaxial wafer which allows manufacture of a photodiode having suppressed dark current and ensured sensitivity, and a method for manufacturing the epitaxial wafer, are provided. The epitaxial wafer of the present invention includes: a III-V semiconductor substrate; and a multiple quantum well structure disposed on the substrate, and including a plurality of pairs of a first layer and a second layer. The total concentration of elements contained as impurities in the multiple quantum well structure is less than or equal to 5×10¹⁵ cm⁻³.

Claims

1. An epitaxial wafer comprising:

a III-V semiconductor substrate; and

a multiple quantum well structure disposed on the substrate, and including a plurality of pairs of a first layer and a second layer, wherein sulfur, selenium, and tellurium are contained as impurities,

wherein a total concentration of elements contained as impurities in the multiple quantum well structure is less than or equal to 5×

10¹⁵ cm<sup>−

3</sup>, and

wherein the multiple quantum well structure contains antimony as a constituent element thereof.

2. The epitaxial wafer according to claim 1, wherein silicon, germanium, and tin are further contained as impurities, and a total concentration of sulfur, selenium, tellurium, silicon, germanium, and tin contained as impurities is less than or equal to 5×

10¹⁵ cm<sup>−

3</sup>.

3. The epitaxial wafer according to claim 1, wherein

the substrate comprises InP, and

in the multiple quantum well structure, the first layer comprises a semiconductor that contains at least Ga, As, and Sb, and the second layer comprises a semiconductor that contains at least In, Ga, and As.

4. The epitaxial wafer according to claim 1, further comprising:

a first conductivity type III-V semiconductor layer disposed on a side, facing the substrate, of the multiple quantum well structure; and

a second conductivity type III-V semiconductor layer disposed on the multiple quantum well structure.

5. A photodiode manufactured by using the epitaxial wafer according to claim 1.

6. The epitaxial wafer according to claim 1, wherein the antimony is contained as a constituent element in only the first layer, and an aggregate concentration of sulfur, selenium, tellurium, silicon, germanium, and tin contained as impurities in the first layer is less than or equal to 1×

10¹⁶ cm<sup>−

3</sup>.

7. The epitaxial wafer according to claim 6, wherein the total concentration of sulfur, selenium, tellurium, silicon, germanium, and tin contained as impurities in the second layer is less than or equal to 1×

10¹⁵ cm<sup>−

3</sup>.

8. The epitaxial wafer according to claim 1, further comprising:

a diffusive-concentration-distribution-adjusting layer disposed on the multiple quantum well structure, and comprising a III-V semiconductor; and

a window layer disposed on the diffusive-concentration-distribution-adjusting layer, and comprising a III-V semiconductor.

9. The epitaxial wafer according to claim 8, wherein the window layer comprises InP, and a regrown interface on which at least one of oxygen, carbon, and hydrogen is accumulated is absent at a boundary portion between the InP window layer and a layer beneath the InP window layer.

10. A method for manufacturing an epitaxial wafer on a III-V semiconductor substrate, comprising the steps of;

growing a III-V semiconductor buffer layer on the substrate; and

growing a multiple quantum well structure comprising a III-V semiconductor on the buffer layer, wherein sulfur, selenium, and tellurium are contained as impurities, and wherein the multiple quantum well structure contains antimony as a constituent element thereof,

wherein in the step of growing the multiple quantum well structure, the multiple quantum well structure is grown by metal-organic vapor phase epitaxy so that a total concentration of elements contained as impurities in the multiple quantum well structure is less than or equal to 5×

10¹⁵ cm<sup>−

3</sup>.

11. The method for manufacturing the epitaxial wafer according to claim 10, wherein, in the step of growing the multiple quantum well structure, a metal-organic source in which a total concentration of sulfur, selenium, tellurium, silicon, germanium, and tin is less than or equal to 0.5 ppm is used as a source of antimony used for the metal-organic vapor phase epitaxy.