Integrated optical nanoscale probe measurement of electric fields from electric charges in electronic devices
First Claim
1. A method comprising:
- providing an electric charge in an area of a sample;
scanning a probe having a probe tip comprising at least one nitrogen vacancy center over the area of the sample with the electric charge;
providing an excitation radio frequency (RF) field to the at least one nitrogen vacancy center;
producing excitation illumination that is incident on the at least one nitrogen vacancy center;
measuring Optically Detected Spin Resonance (ODMR) as the probe tip is scanned over the area of the sample with the electric charge by detecting a decrease in a spin dependent photoluminescence in response to the excitation illumination caused by electron spin resonance (ESR) of the at least one nitrogen vacancy center; and
determining a characteristic of the area of the sample with the electric charge using the ODMR.
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Accused Products
Abstract
A diamond probe is suitable to be attached to an Atomic Force Microscope and is created with a tip that incorporates a one or more Nitrogen Vacancy (NV) centers located near the end of the tip. The probe arm acts as an optical waveguide to propagate the emission from the NV center with high efficiency and a beveled end directs excitation light to the NV center and directs photoluminescence light emanating from the NV center into the probe arm. The probe tip is scanned over an area of a sample with an electric charge, such as a field effect transistor or flash memory. Optically Detected Spin Resonance (ODMR) is measured as the probe tip is scanned over the area of the sample, from which a characteristic of the area of the sample with the electric charge may be determined.
60 Citations
49 Claims
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1. A method comprising:
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providing an electric charge in an area of a sample; scanning a probe having a probe tip comprising at least one nitrogen vacancy center over the area of the sample with the electric charge; providing an excitation radio frequency (RF) field to the at least one nitrogen vacancy center; producing excitation illumination that is incident on the at least one nitrogen vacancy center; measuring Optically Detected Spin Resonance (ODMR) as the probe tip is scanned over the area of the sample with the electric charge by detecting a decrease in a spin dependent photoluminescence in response to the excitation illumination caused by electron spin resonance (ESR) of the at least one nitrogen vacancy center; and determining a characteristic of the area of the sample with the electric charge using the ODMR. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. An apparatus comprising:
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a biasing source configured to provide a bias signal; a voltage source to provide a gate control voltage; a probe card coupled to the biasing source and the voltage source and is configured to be connected to a sample to provide an electric charge in an area of the sample and to provide the gate control voltage; a probe having a probe tip comprising at least one nitrogen vacancy center, the probe configured to scan the probe tip across the area of the sample with the electric charge; a light source that produces excitation illumination that is incident on the at least one nitrogen vacancy center; a detector configured to detect photoluminescence produced by the at least one nitrogen vacancy center in the probe tip; and at least one processor coupled to the detector and configured to measure Optically Detected Spin Resonance (ODMR) as the probe tip is scanned over the area of the sample with the electric charge by detecting a decrease in a spin dependent photoluminescence in response to a received excitation radio frequency (RF) field and the excitation illumination caused by electron spin resonance (ESR) of the at least one nitrogen vacancy center; and
determine a characteristic of the area of the sample with the electric charge using the ODMR. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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47. A method comprising:
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controlling a sample to produce a magnetic field; scanning a probe having a probe tip comprising at least one nitrogen vacancy center through the magnetic field produced by the sample; producing excitation illumination that is incident on the at least one nitrogen vacancy center; measuring Optically Detected Spin Resonance (ODMR) by detecting a decrease in a spin dependent photoluminescence in response to a received excitation radio frequency (RF) field and the excitation illumination caused by electron spin resonance (ESR) of the at least one nitrogen vacancy center; and determining a characteristic of the sample using the ODMR. - View Dependent Claims (48, 49)
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Specification