Substrate processing system, storage medium and method of registering new device
First Claim
1. A substrate processing system comprising:
- a main control unit having a configuration file in which identification information and detail information about devices is recorded, the detail information includes information needed for controlling the devices, the devices being configured to process a substrate; and
a module controller having a list file obtained by converting the configuration file, in which the identification information and the detail information about the devices for processing the substrate and for controlling the devices is recorded, into a readable form, the module controller controlling the devices for processing the substrate described in the list file on the basis of instructions from the main control unit having the configuration file,wherein the module controller automatically adds, to the list file, identification information and detail information about a new device newly connected to the module controller to establish a condition under which the new device can be controlled without rebooting the main control unit, the new device being configured to process the substrate.
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Abstract
A substrate processing system includes a main control unit having a configuration file in which ID information and detail information about devices for processing a substrate is recorded, the detail information includes information needed for controlling the devices, and a module controller having a list file obtained by converting the configuration file into a readable form, the module controller controlling the devices described in the list file on the basis of instructions from the main control unit. The module controller automatically adds, to the list file, ID information and detail information about a new device newly connected to the module controller to establish a condition under which the new device can be controlled.
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Citations
15 Claims
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1. A substrate processing system comprising:
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a main control unit having a configuration file in which identification information and detail information about devices is recorded, the detail information includes information needed for controlling the devices, the devices being configured to process a substrate; and a module controller having a list file obtained by converting the configuration file, in which the identification information and the detail information about the devices for processing the substrate and for controlling the devices is recorded, into a readable form, the module controller controlling the devices for processing the substrate described in the list file on the basis of instructions from the main control unit having the configuration file, wherein the module controller automatically adds, to the list file, identification information and detail information about a new device newly connected to the module controller to establish a condition under which the new device can be controlled without rebooting the main control unit, the new device being configured to process the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A computer-readable storage medium storing a program for causing a computer to execute a process for a substrate processing system comprising:
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a main control unit having a configuration file in which identification information and detail information about devices is recorded, the detail information includes information needed for controlling the devices, the devices being configured to process a substrate; and a module controller having a list file obtained by converting the configuration file, in which the identification information and the detail information about the devices for processing the substrate and for controlling the devices is recorded, into a readable form, the module controller controlling the devices for processing the substrate described in the list file on the basis of instructions from the main control unit having the configuration file, wherein the module controller automatically adds, to the list file, identification information and detail information about a new device newly connected to the module controller to establish a condition under which the new device can be controlled without rebooting the main control unit, the new device being configured to process the substrate, the process comprising; checking whether or not the new device exists which is not registered in the module controller but is actually connected to the module controller; obtaining the identification information about the new device when the new device is found in the checking; obtaining the detail information about the new device by communicating with the new device and by associating the detail information with the identification information; and registering the identification information and the detail information in the module controller so that the module controller can control the new device. - View Dependent Claims (9, 10, 11, 12)
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13. A method of registering a new device for a substrate processing system comprising:
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a main control unit having a configuration file in which identification information and detail information about devices is recorded, the detail information includes information needed for controlling the devices, the devices being configured to process a substrate; and a module controller having a list file obtained by converting the configuration file, in which the identification information and the detail information about the devices for processing the substrate and for controlling the devices is recorded, into a readable form, the module controller controlling the devices for processing the substrate described in the list file on the basis of instructions from the main control unit having the configuration file, wherein the module controller automatically adds, to the list file, identification information and detail information about a new device newly connected to the module controller to establish a condition under which the new device can be controlled without rebooting the main control unit, the new device being configured to process the substrate, the method comprising the steps of; causing the module controller controlling the devices under an instruction from the main control unit to obtain the identification information about the new device newly connected to the module controller; and causing the module controller to communicate with the new device and obtain the detail information about the new device while associating the detail information with the identification information so that the module controller can control the new device. - View Dependent Claims (14, 15)
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Specification