Segmenting a model within a plasma system

• US 9,779,196 B2
• Filed: 04/04/2014
• Issued: 10/03/2017
• Est. Priority Date: 01/31/2013
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Valcore, Jr., John C., Howald, Arthur M.
• Primary Examiner(s): Yi, Roy Y
• Application Number:
  US14/245,803
• Publication Number:
  US 20140214395A1
• Time in Patent Office: 1,278 Days
• CPC Class Codes: G06F 30/36 Circuit design at the analogue level

Abstract

Systems and methods for segmenting an impedance matching model are described. One of the methods includes receiving the impedance matching model. The impedance matching model represents an impedance matching circuit, which is coupled to an RF generator via an RF cable and to a plasma chamber via an RF transmission line. The method further includes segmenting the impedance matching model into two or more modules of a first set. Each module includes a series circuit and a shunt circuit. The shunt circuit is coupled to the series circuit. The series circuit of the first module is coupled to a cable model and the series circuit of the second module is coupled to an RF transmission model. The series circuit and the shunt circuit of the first module are coupled to the series circuit of the second module. The shunt circuit of the second module is coupled to the RF transmission model.

Claims

1. A method for segmenting an impedance matching model, the method comprising:

receiving the impedance matching model, the impedance matching model representing an impedance matching circuit, the impedance matching circuit coupled to a radio frequency (RF) generator via an RF cable and to a plasma chamber via an RF transmission line;

segmenting the impedance matching model into two or more modules of a first set, each module including a series circuit and a shunt circuit, the shunt circuit coupled to the series circuit, the shunt circuit coupled to a ground connection, the series circuit of a first one of the modules coupled to a cable model and the series circuit of a second one of the modules coupled to an RF transmission model, the series circuit of the first module coupled to the series circuit of the second module, the shunt circuit of the first module coupled to the series circuit of the second module, the shunt circuit of the second module coupled to the RF transmission model; and

replacing one of the modules of the first set with a module of a second set,

wherein the method is executed by a processor.

2. The method of claim 1, wherein the impedance matching model has the same impedance, or capacitance, or resistance, or a combination thereof as that of the impedance matching circuit before said replacing.

3. The method of claim 1, wherein the impedance matching circuit includes one or more resistors, one or more capacitors, one or more inductors, a combination thereof, wherein the impedance matching circuit matches an impedance of the RF generator and the RF cable with an impedance of the RF transmission line and the plasma chamber.

4. The method of claim 1, wherein the RF generator generates an RF signal to provide to the plasma chamber via the RF cable, the impedance matching circuit, and the RF transmission line.

5. The method of claim 1, wherein segmenting the impedance matching model into multiple modules is performed to generate a series combination of a resistor, an inductor, and a capacitor and a parallel combination of a resistor, an inductor, and a capacitor, the series combination coupled to the parallel combination.

6. The method of claim 1, wherein the series circuit of each module includes a combination of a resistor, a capacitor, and an inductor, wherein the shunt circuit of each module includes a combination of a resistor, a capacitor, and an inductor.

7. The method of claim 1, wherein the cable model has same circuit elements as that of the RF cable, and the RF transmission model has same circuit elements as that of the RF transmission line.

8. The method of claim 1, wherein replacing the one of the modules of the first set with the module of the second set is performed when the impedance matching circuit is replaced with another impedance matching circuit.

9. The method of claim 1, wherein the module of the second set and unreplaced modules of the first set represent another impedance matching circuit.

10. The method of claim 1, wherein replacing the one of the modules of the first set with the module of the second set is performed when the impedance matching circuit is replaced with another impedance matching circuit, said method further comprising determining whether characteristics of the module of the second set and unreplaced modules of the first set are similar to characteristics of the other impedance matching circuit.

11. A method for segmenting an impedance matching model, the method comprising:

receiving the impedance matching model, the impedance matching model representing an impedance matching circuit, the impedance matching circuit coupled to a radio frequency (RF) generator via an RF cable and to a plasma chamber via an RF transmission line;

segmenting the impedance matching model into two or more modules of a first set, each module including a series circuit and a shunt circuit, the shunt circuit coupled to the series circuit, the shunt circuit coupled to a ground connection, the series circuit of a first one of the modules coupled to a cable model, the shunt circuit of the first module coupled to the cable model, the series circuit of the first module coupled to the series circuit of the second module, the series circuit of the second module coupled to the RF transmission model, the shunt circuit of the second module coupled to the series circuit of the first module; and

replacing one of the modules of the first set with a module of a second set,

wherein the method is executed by a processor.

12. The method of claim 11, wherein the impedance matching model has the same impedance, or capacitance, or resistance, or a combination thereof as that of the impedance matching circuit before said replacing.

13. The method of claim 11, wherein the impedance matching circuit includes one or more resistors, one or more capacitors, one or more inductors, a combination thereof, wherein the impedance matching circuit matches an impedance of the RF generator and the RF cable with an impedance of the RF transmission line and the plasma chamber.

14. The method of claim 11, wherein the RF generator generates an RF signal to provide to the plasma chamber via the RF cable, the impedance matching circuit, and the RF transmission line.

15. The method of claim 11, wherein segmenting the impedance matching model into multiple modules is performed to generate a series combination of a resistor, an inductor, and a capacitor and a parallel combination of a resistor, an inductor, and a capacitor, the series combination coupled to the parallel combination.

16. The method of claim 11, wherein the series circuit of each module includes a combination of a resistor, a capacitor, and an inductor, wherein the shunt circuit of each module includes a combination of a resistor, a capacitor, and an inductor.

17. The method of claim 11, wherein the cable model has same circuit elements as that of the RF cable, and the RF transmission model has same circuit elements as that of the RF transmission line.

18. The method of claim 11, wherein replacing the one of the modules of the first set with the module of the second set is performed when the impedance matching circuit is replaced with another impedance matching circuit.

19. The method of claim 11, wherein the module of the second set and unreplaced modules of the first set represent another impedance matching circuit.

20. A method for segmenting an impedance matching model, the method comprising:

receiving the impedance matching model, the impedance matching model representing an impedance matching circuit, the impedance matching circuit coupled to a radio frequency (RF) generator via an RF cable and to a plasma chamber via an RF transmission line;

segmenting the impedance matching model into two or more modules of a first set, each module including a series function and a shunt function, the shunt function coupled to the series function, the shunt function coupled to a ground function, the series function of a first one of the modules coupled to a cable model and the series function of a second one of the modules coupled to an RF transmission model, the series function of the first module coupled to the series function of the second module, the shunt function of the first module coupled to the series function of the second module, the shunt function of the second module coupled to the RF transmission model; and

replacing one of the modules of the first set with a module of a second set,

wherein the method is executed by a processor.

21. The method of claim 20, wherein the impedance matching model has the same impedance, or capacitance, or resistance, or a combination thereof as that of the impedance matching circuit.

22. The method of claim 20, wherein the shunt function includes a combination of a resistance and a reactance, wherein the series function includes a combination of a resistance and a reactance.

23. A method for segmenting an impedance matching model, the method comprising:

receiving the impedance matching model, the impedance matching model representing an impedance matching circuit, the impedance matching circuit coupled to a radio frequency (RF) generator via an RF cable and to a plasma chamber via an RF transmission line;

segmenting the impedance matching model into two or more modules of a first set, each module including a series function and a shunt function, the shunt function coupled to the series function, the shunt function coupled to a ground function, the series function of a first one of the modules coupled to a cable model, the shunt function of the first module coupled to the cable model, the series function of the first module coupled to the series function of the second module, the series function of the second module coupled to the RF transmission model, the shunt function of the second module coupled to the series function of the first module; and

replacing one of the modules of the first set with a module of a second set,

wherein the method is executed by a processor.

24. The method of claim 23, wherein the impedance matching model has the same impedance, or capacitance, or resistance, or a combination thereof as that of the impedance matching circuit before said replacing.

25. The method of claim 23, wherein the shunt function includes a combination of a resistance and a reactance, wherein the series function includes a combination of a resistance and a reactance.