High efficiency on-chip 3D transformer structure

• US 9,779,869 B2
• Filed: 07/25/2013
• Issued: 10/03/2017
• Est. Priority Date: 07/25/2013
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Barry, Robert L., Groves, Robert A., Vanukuru, Venkata Nr.
• Primary Examiner(s): Lian, Mangtin
• Application Number:
  US13/950,557
• Publication Number:
  US 20150028986A1
• Time in Patent Office: 1,531 Days
• Field of Search: 336200, 336223, 336145, 336147, 336182, 29605
• CPC Class Codes: H01F 2027/2809 on stacked layers
• CPC Class Codes: H01F 27/2804 Printed windings
• CPC Class Codes: H01F 27/2871 Pancake coils
• CPC Class Codes: Y10T 29/49071 by winding or coiling

Abstract

An integrated circuit transformer structure includes at least two conductor groups stacked in parallel in different layers. A first spiral track is formed in the at least two conductor groups, the first spiral track included first turns of a first radius within each of the at least two conductor groups, and second turns of a second radius within each of the at least two conductor groups, the first and second turns being electrically connected. A second spiral track is formed in the at least two conductor groups, the second spiral track including third turns of a third radius within each of the at least two conductor groups and disposed in a same plane between the first and second turns in each of the at least two conductor groups.

Claims

1. A multi-planar integrated circuit transformer structure, comprising:

at least two interleaved conductor coils stacked in parallel in at least two different layers, having a first conductor coil, including;

a first coil turn within each of the at least two different layers having a same first radius, where the first coil turn within each of the at least two different layers are directly connected together electrically and are spatially arranged in parallel; and

a second coil turn within each of the at least two different layers having a same second radius, where the second coil turn within each of the at least two different layers are directly connected together electrically and are spatially arranged in parallel, such that the first coil turn and second coil turn in a same one of each of the different layers are concentric, and wherein the first and second coil turns are electrically connected; and

a second conductor coil including;

a third coil turn within each of the at least two different layers having a same third radius, where the third coil turn in each of the at least two different layers are directly connected together electrically and are spatially arranged in parallel, where the third coil turn in each of the at least two different layers is in a same plane between the first coil and second coil turns, wherein the first radius, second radius and third radius are different, such that the first, second, and third coil turns form three concentric inductors.

2. The structure as recited in claim 1, wherein the at least two interleaved conductor coils each include one or more metal layers.

3. The structure as recited in claim 1, wherein the first coil turn within each of the at least two different layers is connected by a vertical via.

4. The structure as recited in claim 3, wherein the vertical via interconnecting the first coil turn within each of the at least two different layers is configured to provide a current path that is clockwise or counter-clockwise in all of the first coil turns.

5. The structure as recited in claim 1, wherein one of the first turns is electrically connected to one of the second turns through a connection that is electrically isolated from one of the third turns.

6. The structure as recited in claim 1, wherein the first coil turns, second coil turns, and third coil turns of the at least two interleaved conductor coils are around the same central axis, and the first coil turns, second coil turns, and third coil turns each have a cross-sectional dimension that is successively smaller as each of the coil turns gets closer to the center axis.

7. The structure as recited in claim 1, wherein the at least two interleaved conductor coils include first coil turns, second coil turns, and third coil turns having spaces between each of the coil turns about a central axis, where the spaces that are successively larger as each of the coil turns gets closer to the center axis.

8. The structure as recited in claim 1, wherein the at least two interleaved conductor coils have first coil turns, second coil turns, and third coil turns stacked in parallel in three or more different layers.

9. The structure as recited in claim 1, further comprising additional coil turns connected in series between each of the at least two interleaved conductor coils, and being alternatingly connected to the second conductor coil and the first conductor coil, respectively.

10. An integrated circuit transformer structure, comprising:

at least two interleaved conductor coils, each of the at least two conductor coils forming a circular path around a central axis, the circular paths of the at least two interleaved conductor coils being stacked in parallel in different layers;

a first conductor coil of the at least two conductor coils including;

turns of a first radius directly connected together electrically in series between the different layers to form a first cylinder of turns having the same first radius;

turns of a second radius directly connected together electrically in series between the different layers to form a second cylinder of turns having the same second radius; and

turns of a third radius directly connected together electrically in series between the different layers to form a third cylinder of turns having the same third radius within the at least two interleaved conductor coils, wherein the first and the third cylinder are electrically connected to each other and electrically isolated from the second cylinder.

11. The structure as recited in claim 10, wherein the at least two conductor coils each include one or more metal layers.

12. The structure as recited in claim 10, wherein at least one conductor coils includes two or more metal layers connected by vias.

13. The structure as recited in claim 10, wherein one of the first and third cylinders or the second cylinder includes a primary transformer coil, and the other of the first and third cylinders or the second cylinder includes a secondary transformer coil.

14. The structure as recited in claim 10, wherein the first cylinder is electrically connected to the third cylinder through a connection that is electrically isolated from the second cylinder.

15. The structure as recited in claim 10, wherein at least one of the conductor coils has a line winding about a central axis and the line has a cross-sectional line dimension reduced at a rate as winding toward the center axis.

16. The structure as recited in claim 10, wherein at least one of the conductor coils has spaces between a line winding about a central axis and the spaces are increased at a rate as winding toward the center axis.

17. The structure as recited in claim 10, wherein the conductor coils of different layers have at least one of different line widths and different line spacings therebetween.

18. The structure as recited in claim 10, further comprising additional concentric cylinders of turns connected in series and being alternatingly connected to odd and even number cylinders.

19. A method for constructing an integrated circuit transformer structure, comprising:

forming at least two interleaved conductor coils, each conductor coil forming at least a portion of a circular path around a central axis, the circular paths of the at least two interleaved conductor coils being stacked in parallel in at least two different layers, where the at least two interleaved conductor coils are formed by;

forming a first conductive coil having turns of a first radius in a first layer of the at least two different layers and turns of the first radius in a second layer of the at least two different layers, where the turns of the first radius in the first layer are directly connected electrically to the turns of the first radius in the second layer to form a first cylinder of turns, and turns of a third radius in the first layer of the at least two different layers and turns of the third radius in the second layer of the at least two different layers, where the turns of the third radius in the first layer are directly connected electrically to the turns of the third radius in the second layer to form a third cylinder of turns; and

forming a second conductive coil having turns of a second radius in a first layer of the at least two different layers and turns of the second radius in a second layer of the at least two different layers, where the turns of the second radius in the first layer are directly connected electrically to the turns f the second radius in the second layer to form a second cylinder of turns, wherein the second cylinder has a larger radius than the first cylinder,

wherein the third cylinder has a larger radius than the second cylinder, and the first and the third cylinder are directly connected to each other electrically, and electrically isolated from the second cylinder.