Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
First Claim
1. A rotation sensor for detecting a rate of rotation about at least one axis of orthogonal axes, the rotation sensor comprising:
- a substrate;
a central anchor coupled to the substrate;
a plurality of masses that are coupled to the central anchor and displaceable relative to the substrate and disposed in a first plane parallel to the substrate;
a first driving means that oscillates a first sensor mass within the plurality of masses, the first sensor mass radially oscillates in a first direction in the first plane and between first and second axes of the rotation sensor;
a second driving means that oscillates a second sensor mass within the plurality of masses, the second sensor mass radially oscillates in a second direction in the first plane and between the first and second axes of the rotation sensor; and
a first sensor element coupled to the first sensor mass, the first sensor element detects a first deflection of the first sensor mass caused by a first rotation about the first axis.
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Accused Products
Abstract
The present invention relates to a method for operating a rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x,y,z). The rotation sensor comprises a substrate, driving masses, X-Y sensor masses, and Z sensor masses. The driving masses are driven by drive elements to oscillate in the X-direction. The X-Y sensor masses are coupled to the driving masses, and driven to oscillate in the X-Y direction radially to a center. When a rate of rotation of the substrate occurs about the X-axis or the Y-axis, the X-Y sensor masses are jointly deflected about the Y-axis or X-axis. When a rate of rotation of the substrate occurs about the Z-axis, the X-Y sensor masses are rotated about the Z-axis, and the Z sensor masses are deflected substantially in the X-direction.
28 Citations
19 Claims
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1. A rotation sensor for detecting a rate of rotation about at least one axis of orthogonal axes, the rotation sensor comprising:
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a substrate; a central anchor coupled to the substrate; a plurality of masses that are coupled to the central anchor and displaceable relative to the substrate and disposed in a first plane parallel to the substrate; a first driving means that oscillates a first sensor mass within the plurality of masses, the first sensor mass radially oscillates in a first direction in the first plane and between first and second axes of the rotation sensor; a second driving means that oscillates a second sensor mass within the plurality of masses, the second sensor mass radially oscillates in a second direction in the first plane and between the first and second axes of the rotation sensor; and a first sensor element coupled to the first sensor mass, the first sensor element detects a first deflection of the first sensor mass caused by a first rotation about the first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for sensing at least one rate of rotation about at least one axis of orthogonal axes, the method comprising:
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causing a first sensor mass to radially oscillate from a central location in a first direction between first and second axes and in a first plane; detecting a first deflection of a first sensor element coupled to the first sensor mass, the first deflection resulting from a first rotation about the first axis; detecting a second deflection of a second sensor element coupled to the first sensor mass, the second deflection resulting from the first rotation about the first axis; and determining a rate of the first rotation by generating electrical signals corresponding to changes in the first and second deflections. - View Dependent Claims (17, 18, 19)
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Specification