Semiconductor device and manufacturing method thereof
First Claim
Patent Images
1. A display device comprising:
- a gate wiring comprising a first conductive material, over a first substrate;
an insulating film over the gate wiring;
a semiconductor film over the insulating film;
a source region and a drain region over the semiconductor film;
a source electrode and a drain electrode formed over the source region and the drain region, respectively, each of the source electrode and the drain electrode comprising a second conductive material;
a source wiring being continuous to the source electrode;
a pixel electrode comprising a transparent conductive film in contact with the drain electrode;
a first terminal portion electrically connected to the gate wiring, comprising;
a first layer comprising a same material as the first conductive material, over the first substrate; and
a second layer comprising a same material as the transparent conductive film, over the first layer;
a second terminal portion electrically connected to the source wiring, comprising;
a first layer comprising a same material as the second conductive material, over the first substrate; and
a second layer comprising a same material as the transparent conductive film, over the first layer;
a second substrate joined to the first substrate by using a sealing material;
a second electrode formed adjacent to the second substrate so as to be opposed to the pixel electrode;
a flexible printed circuit electrically connected to the second terminal portion through an anisotropic conductive adhesive, the flexible printed circuit comprising a resin film; and
a resin over the first substrate, the resin covering an edge of the resin film.
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Abstract
[Summary]
[Problem]
A TFT is manufactured using at least five photomasks in a conventional liquid crystal display device, and therefore the manufacturing cost is high.
[Solving Means]
By performing the formation of the pixel electrode 127, the source region 123 and the drain region 124 by using three photomasks in three photolithography steps, a liquid crystal display device prepared with a pixel TFT portion, having a reverse stagger type n-channel TFT, and a storage capacitor can be realized.
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Citations
15 Claims
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1. A display device comprising:
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a gate wiring comprising a first conductive material, over a first substrate; an insulating film over the gate wiring; a semiconductor film over the insulating film; a source region and a drain region over the semiconductor film; a source electrode and a drain electrode formed over the source region and the drain region, respectively, each of the source electrode and the drain electrode comprising a second conductive material; a source wiring being continuous to the source electrode; a pixel electrode comprising a transparent conductive film in contact with the drain electrode; a first terminal portion electrically connected to the gate wiring, comprising; a first layer comprising a same material as the first conductive material, over the first substrate; and a second layer comprising a same material as the transparent conductive film, over the first layer; a second terminal portion electrically connected to the source wiring, comprising; a first layer comprising a same material as the second conductive material, over the first substrate; and a second layer comprising a same material as the transparent conductive film, over the first layer; a second substrate joined to the first substrate by using a sealing material; a second electrode formed adjacent to the second substrate so as to be opposed to the pixel electrode; a flexible printed circuit electrically connected to the second terminal portion through an anisotropic conductive adhesive, the flexible printed circuit comprising a resin film; and a resin over the first substrate, the resin covering an edge of the resin film. - View Dependent Claims (2, 3, 4, 5)
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6. A display device comprising:
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a gate wiring comprising a first conductive material, over a first substrate; an insulating film over the gate wiring; a first semiconductor film over the insulating film; a source region and a drain region over the first semiconductor film; a source electrode and a drain electrode formed over the source region and the drain region, respectively, each of the source electrode and the drain electrode comprising a second conductive material; a source wiring being continuous to the source electrode; a pixel electrode comprising a transparent conductive film in contact with the drain electrode; a first terminal portion electrically connected to the gate wiring, comprising; a first layer comprising a same material as the first conductive material, over the first substrate; and a second layer comprising a same material as the transparent conductive film, over the first layer; a second terminal portion electrically connected to the source wiring, comprising; a first layer over the first substrate, comprising a same material as the first semiconductor film; a second layer formed on the first layer and comprising a same material as the source region and the drain region; a third layer formed on the second layer and comprising a same material as the second conductive material; and a fourth layer formed on the third layer and comprising a same material as the transparent conductive film; a second substrate joined to the first substrate by using a sealing material; a second electrode formed adjacent to the second substrate so as to be opposed to the pixel electrode; a flexible printed circuit electrically connected to the second terminal portion through an anisotropic conductive adhesive, the flexible printed circuit comprising a resin film; and a resin over the first substrate, the resin covering an edge of the resin film. - View Dependent Claims (7, 8, 9, 10)
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11. A display device comprising:
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a thin film transistor comprising a gate electrode formed over a substrate, an insulating film formed over the gate electrode, a first semiconductor film formed over the insulating film, source and drain regions formed over the first semiconductor film, and a source electrode over the source region, and a drain electrode formed over the drain region; a pixel electrode comprising a transparent conductive material, formed over the thin film transistor, and connected to the drain electrode; a gate wiring formed between the substrate and the insulating film and being continuous to the gate electrode; a source wiring being continuous to the source electrode, the source wiring comprising a second semiconductor film and a third semiconductor film formed on the second semiconductor film; a gate wiring terminal portion comprising a first layer comprising a same material as the gate electrode and a second layer comprising a same material as the transparent conductive material; a source wiring terminal portion formed over the substrate and including a first layer comprising a same material as the first semiconductor film, a second layer formed on the first layer, the second layer comprising a same material as the source region and the drain region, a third layer formed on the second layer, the third layer comprising a same material as the source electrode, and a fourth layer formed on the third layer, the fourth layer comprising a same material as the transparent conductive material; a flexible printed circuit electrically connected to the source wiring terminal portion through an anisotropic conductive adhesive, the flexible printed circuit comprising a resin film; and a resin over the substrate, the resin covering an edge of the resin film, wherein the second semiconductor film is continuous to the first semiconductor film, and comprises a same material as the first semiconductor film, wherein the third semiconductor film is continuous to the source region, and comprises a same material as the source region, wherein at least a portion of the second semiconductor film is wider than the source wiring and the third semiconductor film at least at an intersection of the gate wiring and the source wiring, and wherein the fourth layer is wider than the third layer in the source wiring terminal portion. - View Dependent Claims (12, 13, 14, 15)
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Specification